Vehicle rear suspension system
    1.
    发明授权
    Vehicle rear suspension system 失效
    车辆后悬挂系统

    公开(公告)号:US4815755A

    公开(公告)日:1989-03-28

    申请号:US43479

    申请日:1987-04-20

    IPC分类号: B60G3/22 B60G3/28 B60G3/20

    摘要: A vehicle rear suspension system having a vertically swingable arm connected at the front end swingably to the vehicle body and secured at the rear end to a wheel carrying member which carries a rear wheel for rotation. Three lateral links ar provided and have inward ends pivotably connected to the vehicle body and outward ends pivotably connected to the wheel carrying member. The points of connection of the three lateral links to the wheel carrying member are not aligned in a straight line so that the orientation of the wheel carrying member can appropriately be controlled under bump and rebouncing movements of the rear wheel and under side and longitudinal forces acting on the rear wheel.

    Vehicle rear suspension system
    2.
    发明授权
    Vehicle rear suspension system 失效
    车辆后悬挂系统

    公开(公告)号:US4930805A

    公开(公告)日:1990-06-05

    申请号:US266869

    申请日:1988-11-03

    IPC分类号: B60G3/22 B60G3/28 B60G3/20

    摘要: A vehicle rear suspension system having a vergically swingable arm connected at the front end swingably to the vehicle body and secured at the rear end to a wheel carrying member which carries a rare wheel for rotation. Three lateral links are provided and have inward ends pivotably connected to the vehicle body and outward ends pivotably connected to the wheel carrying member. The points of connection of the three lateral links to the wheel carrying member are not aligned in a straight line so that the orientation of the wheel carrying member can appropriately be controlled under bump and rebouncing movements of the rear wheel and under side and longitudinal forces acting on the rear wheel.

    Spectrometry measuring apparatus
    3.
    发明授权
    Spectrometry measuring apparatus 失效
    光谱测量仪

    公开(公告)号:US06597451B1

    公开(公告)日:2003-07-22

    申请号:US09686934

    申请日:2000-10-12

    申请人: Nobuhiro Araki

    发明人: Nobuhiro Araki

    IPC分类号: G01J328

    摘要: In a spectrographic type spectrometry measuring apparatus employing a concave holographic diffraction grating or a replica thereof, a small-size and light-weight spectrometry measuring apparatus having a high reliability with a spectrum position does not move in a photo detector plane in spite of an occurrence of a temperature change. This measuring apparatus is composed of a light-condensing device, a concave holographic diffraction grating or a replica thereof, and a telecentric correction lens for condensing a diffracted light from the diffraction grating telecentrically on the spectrum condensing plane. In this constitution, the spectral ray enters vertically to the spectrum focusing plane, and if the photo detector is moved in the optical axis direction due to a temperature change, the spectrum is not moved on the photo detector surface, and it is not necessary to calibrate an optical element due to an ambient temperature change.

    摘要翻译: 在使用凹面全息衍射光栅或其复制品的光谱型光谱测量装置中,尽管发生了光谱检测器平面中具有光谱位置的高可靠性的小尺寸和重量轻的光谱测量装置不会移动 的温度变化。 该测量装置由聚光装置,凹面全息衍射光栅或其复制品组成,以及用于将衍射光栅的衍射光以中心方向聚集在光谱冷凝平面上的远心校正透镜。 在这种结构中,光谱射线垂直于光谱聚焦平面进入,并且如果光电检测器由于温度变化而在光轴方向上移动,则光谱在光检测器表面上不移动,并且不需要 由于环境温度变化,校准光学元件。

    Compact reticle/wafer alignment system
    4.
    发明授权
    Compact reticle/wafer alignment system 失效
    COMPACT RETICLE / WAFER ALIGNMENT SYSTEM

    公开(公告)号:US5194744A

    公开(公告)日:1993-03-16

    申请号:US704406

    申请日:1991-05-23

    IPC分类号: G03F9/00 H01L21/027 H01L21/30

    CPC分类号: G03F9/7065 G03F9/7049

    摘要: A reticle/wafer alignment system provided with a laser beam source for emitting laser beams, a first optical system portion for a reticle/wafer alignment which consists of a first optical sub-system for receiving laser beams from the laser beam source and projecting the received laser beams onto alignment marks formed on a substrate and made up of diffraction gratings and a second optical sub-system for gathering laser beams diffracted by the alignment marks to form an image thereof, a photoelectric detection portion for performing a photoelectric conversion of the gathered laser beams, a position detecting portion for measuring the position of the substrate based on a signal outputted from the photoelectric detection portion, a second optical system portion for an image processing which consists of a third optical sub-system for illuminating the alignment marks and a fourth optical sub-system having a television camera for observing the image of the alignment marks, and an image processing portion for performing an image processing of video signals outputted from the television camera. The first and second optical system portions are made in such a manner to have a common part thereof. Thereby, an entire alignment system can be made to be compact. Consequently, a position measurement accuracy can be improved.

    Lens for facsimile or laser printer
    5.
    发明授权
    Lens for facsimile or laser printer 失效
    传真机或激光打印机镜头

    公开(公告)号:US4755030A

    公开(公告)日:1988-07-05

    申请号:US927452

    申请日:1986-11-06

    IPC分类号: G02B13/00 G02B9/60 G02B26/08

    CPC分类号: G02B13/0005

    摘要: An f.multidot..theta. lens system for use in an apparatus such as a facsimile, machine laser printer, and the like for scanning and recording by a laser beam. The lens system minimizes the amount of image distorted in the sagittal direction and provides equal angular scanning velocity, high brightness and high resolution. The lens system comprises five serially disposed lenses the first of which is a positive meniscus lens whose concave surface is directed toward the incident side of a laser beam, the second lens is a negative meniscus lens whose concave surface is directed toward the incident side of the laser beam, and the third to fifth lenses a positive meniscus lenses whose concave surfaces are directed toward the beam incident side, wherein these lenses satisfy particular conditions relating to the radii of curvatures of their surfaces, lens thickness, refractive indices and lens-to-lens distances.

    摘要翻译: 一种用于诸如传真机,机器激光打印机等的设备的用于通过激光束扫描和记录的fxθ透镜系统。 透镜系统使矢量方向上的图像失真量最小化,提供相等的角度扫描速度,高亮度和高分辨率。 透镜系统包括五个串联配置的透镜,其中第一透镜是其凹面指向激光束的入射侧的正弯月形透镜,第二透镜是负凹面透镜,其凹面朝向 激光束和第三至第五透镜,其凹面指向光束入射侧的正弯月形透镜,其中这些透镜满足与其表面的曲率半径相关的特定条件,透镜厚度,折射率和透镜 - 镜头距离。

    Projection optical system
    8.
    发明授权
    Projection optical system 失效
    投影光学系统

    公开(公告)号:US4757354A

    公开(公告)日:1988-07-12

    申请号:US43620

    申请日:1987-04-28

    摘要: A projection optical system for photolithography includes a refraction sub-system and a cata-dioptric sub-system optically connected to each other. The refraction sub-system extends at an object side. The cata-dioptric sub-system extends at an image side. The refraction sub-system is generally composed of refracting members. The cata-dioptric sub-system is generally composed of a phase compensating member, a concave mirror, and a convex mirror. The phase compensating member adjoins the refraction sub-system. At least the concave mirror has a central opening through which light passes. The light forms an image at a rear of the concave mirror.

    摘要翻译: 用于光刻的投影光学系统包括彼此光学连接的折射子系统和cata度数子系统。 折射子系统在物体侧延伸。 cata-indiopt子系统在图像侧延伸。 折射子系统通常由折射构件组成。 数位子系统通常由相位补偿构件,凹面镜和凸面镜组成。 相位补偿构件邻接折射子系统。 至少凹面镜具有光通过的中心开口。 光在凹面镜的后部形成图像。

    Measuring method for optical transfer function, image restoring method, and digital imaging device
    9.
    发明申请
    Measuring method for optical transfer function, image restoring method, and digital imaging device 审中-公开
    光学传递函数的测量方法,图像恢复方法和数字成像装置

    公开(公告)号:US20070146689A1

    公开(公告)日:2007-06-28

    申请号:US10597114

    申请日:2005-01-13

    IPC分类号: G01M11/00

    摘要: In an measuring method for optical transfer function of the invention, irradiating-light from a light source (31) scans an element to be measured within an image sensor of an imaging camera constituted by integrating an imaging optical system and the image sensor. The element to be measured converts sequentially the irradiating-light into an electrical signal and outputs the electrical signal. Further, based on the outputted electrical signal, point spread function data is generated, and subjected to Fourier transform to calculate an optical transfer function. Accordingly, a method is provided for measuring an optical transfer function for properly restoring image degradation due to factors including the position of the imaging optical system within the imaging camera and inter-element cross talk.

    摘要翻译: 在本发明的光学传递函数的测量方法中,来自光源(31)的照射光在由成像光学系统和图像传感器集成构成的成像摄像机的图像传感器内扫描要测量的元件。 要测量的元件依次将照射光转换成电信号并输出​​电信号。 此外,基于输出的电信号,生成点扩散函数数据,并进行傅立叶变换以计算光学传递函数。 因此,提供了一种用于测量光学传递函数的方法,用于由于包括成像光学系统在成像照相机和元件间串扰内的位置的因素而适当地恢复图像劣化。

    Linescan apparatus for detecting salient pattern of a product
    10.
    发明授权
    Linescan apparatus for detecting salient pattern of a product 失效
    用于检测产品突出图案的线条装置

    公开(公告)号:US4983827A

    公开(公告)日:1991-01-08

    申请号:US427507

    申请日:1989-10-25

    CPC分类号: G01R31/309 H05K13/08

    摘要: A linescan apparatus for detecting salient pattern on a surface of a product comprises: a laser light source for continuously emitting a laser beam; a polygon mirror for reflecting the laser beam; a drive for rotating the polygon mirror to scan said laser beam; an f.theta. lens arranged such that the linescan laser beam strikes against the plane perpendicularly; a carrying device for moving the product in the direction substantially perpendicular to the plane; a mirror for reflecting the linescan laser beam reflected at a surface of the product to direct the linescan laser beam to the polygon mirror through the f.theta. lens, the mirror being positioned apart from the second plane; and a beam position detector for detecting unidimensional position of a spot mede by the linescan laser beam projected thereon from the mirror via the polygon mirror. This linescan apparatus provides three-dimensional data of a surface of the product. The detected position signal is compared by reference data for inspecting the product. An linescan apparatus further comprises second beam position detector and an averaging circuit for averaging outputs from first mentioned and second beam detectors.

    摘要翻译: 用于检测产品表面上的突出图案的线条扫描装置包括:用于连续发射激光束的激光源; 用于反射激光束的多面镜; 用于旋转多面镜以扫描所述激光束的驱动器; f theta透镜布置成使得线可激光束垂直于平面撞击平面; 用于沿着与该平面基本垂直的方向移动产品的承载装置; 用于反射在产品的表面处反射的线阵激光束的反射镜,以通过fθ透镜将线阵激光束引导到多面镜,反射镜被定位成离开第二平面; 以及光束位置检测器,用于通过经由多面镜从反射镜投射到其上的线扫描激光束来检测点中心的一维位置。 该线扫描装置提供产品表面的三维数据。 通过用于检查产品的参考数据来比较检测到的位置信号。 线扫描装置还包括第二光束位置检测器和用于平均来自第一和第二光束检测器的输出的平均电路。