公开(公告)号：US10311198B2

公开(公告)日：2019-06-04

申请号：US15119306

申请日：2015-02-16

Applicant: NOVA MEASURING INSTRUMENTS LTD.

Inventor： Gilad Barak ,  Tal Verdene ,  Michal Yachini ,  Dror Shafir ,  Changman Moon ,  Shay Wolfling

IPC: G06F17/50 ,  G03F7/20 ,  H01L21/027 ,  H01L21/67 ,  H01L29/66

Abstract: A sample comprising an overlay target is presented. The overlay target comprises at least one pair of patterned structures, the patterned structures of the pair being accommodated in respectively bottom and top layers of the sample with a certain vertical distance h between them, wherein a pattern in at least one of the patterned structures has at least one pattern parameter optimized for a predetermined optical overlay measurement scheme with a predetermined wavelength range.

公开(公告)号：US10209206B2

公开(公告)日：2019-02-19

申请号：US14903629

申请日：2014-07-08

Applicant: NOVA MEASURING INSTRUMENTS LTD.

Inventor： Gilad Barak ,  Shay Wolfling ,  Cornel Bozdog ,  Matthew Sendelbach

IPC: G01N23/00 ,  G01N23/20 ,  G01L1/24

Abstract: A control system is presented for use in measuring one or more parameters of a sample. The control system comprises an input utility and a processor utility. The input utility is configured for receiving input data including first data comprising X-ray Diffraction or High-Resolution X-ray Diffraction (XRD) response data of the sample indicative of a material distribution in the sample, and second data comprising optical response data of the sample to incident light indicative of at least a geometry of the sample. The processor utility is configured and operable for processing and analyzing one of the first and second data for optimizing the other one of the first and second data, and utilizing the optimized data for determining said one or more parameters of the sample including a strain distribution in the sample.

公开(公告)号：US10054423B2

公开(公告)日：2018-08-21

申请号：US14655791

申请日：2013-12-26

Applicant: NOVA MEASURING INSTRUMENTS LTD.

Inventor： Dror Shafir ,  Gilad Barak ,  Shay Wolfling

IPC: G01B11/02 ,  G01N21/47 ,  G01N21/956 ,  G02B21/36

CPC classification number: G01B11/02 ,  G01B2210/56 ,  G01N21/4738 ,  G01N21/956 ,  G01N2201/06113 ,  G01N2201/12 ,  G02B21/365

Abstract: Method and system for measuring one or more parameters of a patterned structure, using light source producing an input beam of at least partially coherent light in spatial and temporal domains, a detection system comprising a position sensitive detector for receiving light and generating measured data indicative thereof, an optical system configured for focusing the input light beam onto a diffraction limited spot on a sample's surface, collecting an output light returned from the illuminated spot, and imaging the collected output light onto a light sensitive surface of the position sensitive detector, where an image being indicative of coherent summation of output light portions propagating from the structure in different directions.

公开(公告)号：US20170018069A1

公开(公告)日：2017-01-19

申请号：US15120692

申请日：2014-10-30

Applicant: Globalfoundries Inc. ,  Nova Measuring Instruments Ltd.

Inventor： Alok Vaid ,  Cornel Bozdong ,  Shay Wolfling ,  Matthew J. Sendelbach ,  Jamie Tsai ,  Cermen Osorio

IPC: G06T7/00 ,  G01B15/02 ,  H01J37/28 ,  G01B11/06

CPC classification number: G06T7/0004 ,  G01B11/06 ,  G01B15/02 ,  G06T2207/10061 ,  G06T2207/10116 ,  G06T2207/30148 ,  H01J37/28

Abstract: A computerized system and method are provided for use in measuring at least one parameter of interest of a structure. The system comprises a server utility configured for data communication with at least first and second data provider utilities. The server utility receives, from the server provider utilities, measured data comprising first and second measured data pieces of different types indicative of parameters of the same structure; and is capable of processing the first and second measured data pieces for optimizing one or more first parameters values of the structure in one of the first and second measured data pieces by utilizing one or more second parameters values of the structure of the other of said first and second measured data pieces.

Abstract translation: 提供了一种用于测量结构感兴趣的至少一个参数的计算机化系统和方法。 该系统包括配置用于与至少第一和第二数据提供者实用程序的数据通信的服务器实用程序。 服务器实用程序从服务器提供商实用程序接收包括指示相同结构的参数的不同类型的第一和第二测量数据段的测量数据; 并且能够通过利用所述第一和第二测量数据中的另一个的结构的一个或多个第二参数值来处理第一和第二测量数据，以优化第一和第二测量数据段之一中的结构的一个或多个第一参数值 和第二个测量数据。