公开(公告)号：US20240360027A1

公开(公告)日：2024-10-31

申请号：US18682636

申请日：2022-07-29

申请人： NIPPON ELECTRIC GLASSS CO., LTD.

发明人： Miyako TAKEDA

IPC分类号： C03C3/091 ,  C03C4/00 ,  H01L21/02 ,  H01L23/15

CPC分类号： C03C3/091 ,  C03C4/0085 ,  H01L21/02164 ,  H01L23/15

摘要： A support glass substrate of the present invention is a support glass substrate for supporting a substrate to be processed, the support glass substrate including, as a glass composition, in terms of mol %, 50% to 80% of SiO2, 0% to 25% of Al2O3, 5.5% to 20% of B2O3, 0% to 5% of Li2O+Na2O+K2O, 0% to 15% of MgO, 1% to 25% of CaO, 0% to 10% of SrO, and 0% to 10% of BaO, having a molar ratio (MgO+SrO+BaO)/CaO of 1.5 or less, and having an average coefficient of thermal expansion at from 30° C. to 380° C. of from 35×10−7/° C. to 60×10−7/° C.