公开(公告)号：US20240094628A1

公开(公告)日：2024-03-21

申请号：US18180311

申请日：2023-03-08

申请人： NGK INSULATORS, LTD.

发明人： Toshikatsu KASHIWAYA ,  Naoki GORIKI ,  Shoji TANGE ,  Atsuo KONDO

IPC分类号： G03F1/64

CPC分类号： G03F1/64

摘要： There is provided an EUV transmissive membrane including: a main layer composed of metallic beryllium that has a first surface and a second surface; and a pair of surface layers provided on the first surface and the second surface of the main layer, each containing at least one fluoride selected from beryllium fluoride, beryllium fluoride nitride, beryllium fluoride oxide, and beryllium fluoride nitride oxide.

公开(公告)号：US20180002199A1

公开(公告)日：2018-01-04

申请号：US15707062

申请日：2017-09-18

申请人： NGK Insulators, Ltd.

发明人： Takashi YOKOYAMA ,  Shoji TANGE ,  Hideki SHIMIZU ,  Kazunari YAMADA

IPC分类号： C02F1/46 ,  C02F1/50 ,  H05H1/24

CPC分类号： C02F1/4608 ,  C02F1/50 ,  C02F1/78 ,  C02F2001/46133 ,  C02F2201/46135 ,  C02F2201/46175 ,  C02F2201/4619 ,  C02F2209/235 ,  C02F2303/04 ,  H05H1/24 ,  H05H1/2406 ,  H05H2001/2418 ,  H05H2001/2437 ,  H05H2245/121

摘要： A pulsed voltage is repeatedly applied between a first electrode and a second electrode to which a gas is supplied, a plasma is generated between the first electrode and the second electrode, and an active species is produced in the plasma. The energy necessary for plasma generation is set to a value greater than or equal to 1.8 W/cm3 and less than or equal to 8.5 W/cm3.