公开(公告)号：US20240213955A1

公开(公告)日：2024-06-27

申请号：US18436660

申请日：2024-02-08

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Patrick TURNER ,  Doug JACHOWSKI ,  Bryant GARCIA

IPC: H03H9/205 ,  H03H3/02 ,  H03H9/02 ,  H03H9/58 ,  H03H9/60

CPC classification number: H03H9/205 ,  H03H3/02 ,  H03H9/02015 ,  H03H9/02157 ,  H03H9/02228 ,  H03H9/588 ,  H03H9/605

Abstract: An acoustic resonator is fabricated by bonding a first piezoelectric plate to a substrate and spans locations for a first and second cavity in the substrate. A top surface of the first piezoelectric plate is planarized to a first thickness. A bonding layer is formed on the first piezoelectric plate and spans the first and second cavity locations. A second piezoelectric plate is bonded to the bonding layer and spans the first and second cavity locations. A portion of the second piezoelectric plate spanning the second cavity location is etched away to form a first membrane over the first cavity location and a second membrane over the second cavity location. Interdigital transducers are formed on the first and second membranes over the first and second cavity location to form a first and second resonator on the same die.

公开(公告)号：US20240154597A1

公开(公告)日：2024-05-09

申请号：US18412131

申请日：2024-01-12

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Greg DYER ,  Bryant GARCIA ,  Doug JACHOWSKI ,  Robert HAMMOND ,  Neal FENZI ,  Ryo WAKABAYASHI

IPC: H03H9/02 ,  H03H9/17 ,  H03H9/205 ,  H03H9/54

CPC classification number: H03H9/02228 ,  H03H9/02015 ,  H03H9/02133 ,  H03H9/174 ,  H03H9/205 ,  H03H9/54

Abstract: An acoustic resonator is provided that includes a substrate; a piezoelectric layer having a portion that forms a diaphragm over a cavity; and IDT on the piezoelectric layer that includes a first conductor level including first and second busbars disposed on respective portions of the piezoelectric layer, a first set of elongated fingers extending from the first bus bar onto the diaphragm, and a second set of elongated fingers extending from the second bus bar onto the diaphragm, the second set of elongated fingers interleaved with the first set of elongated fingers. The acoustic resonator also includes a second conductor level over the piezoelectric layer and covering at least portions of the first and second busbars.