公开(公告)号：US20220320353A1

公开(公告)日：2022-10-06

申请号：US17843238

申请日：2022-06-17

申请人： Moxtek, Inc.

发明人： Jason Maynard ,  Shawn S. Chin ,  Jonathan Barron ,  David S. Hoffman

IPC分类号： H01L31/024 ,  H01L35/32 ,  G01T1/24 ,  H01L31/115 ,  H01L31/02

摘要： An x-ray detector can be small and have efficient cooling. In one embodiment, the x-ray detector can comprise a thermoelectric cooler (TEC) with upper electrical connections, a support, a cap, and a silicon drift detector (SDD). A planar side of the support can be directly affixed to upper electrical connections of the TEC. The support can have a non-planar side, opposite of the planar side, with a raised structure. A bottom face of the cap can be affixed to the raised structure, forming a cavity between the cap and the non-planar side of the support. The SDD can be affixed to a top face of the cap. In another embodiment, the non-planar side of the support can face the TEC. In another embodiment, a PIN photodiode can be directly affixed to a plate and the plate directly affixed to upper electrical connections of the TEC.

公开(公告)号：US11640999B2

公开(公告)日：2023-05-02

申请号：US17843238

申请日：2022-06-17

申请人： Moxtek, Inc.

发明人： Jason Maynard ,  Shawn S. Chin ,  Jonathan Barron ,  David S. Hoffman

IPC分类号： H01L31/024 ,  G01T1/24 ,  H01L31/115 ,  H01L31/02

摘要： An x-ray detector can be small and have efficient cooling. In one embodiment, the x-ray detector can comprise a thermoelectric cooler (TEC) with upper electrical connections, a support, a cap, and a silicon drift detector (SDD). A planar side of the support can be directly affixed to upper electrical connections of the TEC. The support can have a non-planar side, opposite of the planar side, with a raised structure. A bottom face of the cap can be affixed to the raised structure, forming a cavity between the cap and the non-planar side of the support. The SDD can be affixed to a top face of the cap. In another embodiment, the non-planar side of the support can face the TEC. In another embodiment, a PIN photodiode can be directly affixed to a plate and the plate directly affixed to upper electrical connections of the TEC.