公开(公告)号：US08964943B2

公开(公告)日：2015-02-24

申请号：US13705724

申请日：2012-12-05

Applicant: Moxtek, Inc.

Inventor： Steven Liddiard ,  Brian Taylor ,  Keith Decker ,  Jason Maynard

IPC: H01J35/18 ,  H01J5/18 ,  G21K1/00 ,  B82Y20/00

CPC classification number: G21K1/00 ,  B82Y20/00 ,  H01J5/18 ,  H01J35/18 ,  H01J2235/18 ,  H01J2235/183

Abstract: An x-ray window includes a mount with a support frame and an aperture. A window film has a stack of layers including: a thin film layer comprising a material selected from the group consisting of diamond, graphene, diamond-like carbon, beryllium, and combinations thereof; a boron hydride layer; and a polymer layer. The window film, including the thin film layer, the boron hydride layer, and the polymer layer, extends across the aperture and is supported by the support frame. The window film is attached to the support frame, defining a sealed joint. The layers are capable of withstanding a differential pressure of at least 1 atmosphere. The window film is substantially transmissive to x-rays having an energy in the range of 100-20,000 electronvolts.

Abstract translation: X射线窗口包括具有支撑框架和孔的安装座。 窗膜具有一叠层，包括：薄膜层，其包含选自金刚石，石墨烯，类金刚石碳，铍及其组合的材料; 硼氢化物层; 和聚合物层。 包括薄膜层，硼氢化物层和聚合物层的窗膜延伸穿过孔并由支撑框架支撑。 窗膜附接到支撑框架，限定密封接头。 这些层能承受至少1个大气压的差压。 窗膜对具有在100-20,000电子伏特范围内的能量的x射线基本上是透射的。

公开(公告)号：US20220320353A1

公开(公告)日：2022-10-06

申请号：US17843238

申请日：2022-06-17

Applicant: Moxtek, Inc.

Inventor： Jason Maynard ,  Shawn S. Chin ,  Jonathan Barron ,  David S. Hoffman

IPC: H01L31/024 ,  H01L35/32 ,  G01T1/24 ,  H01L31/115 ,  H01L31/02

Abstract: An x-ray detector can be small and have efficient cooling. In one embodiment, the x-ray detector can comprise a thermoelectric cooler (TEC) with upper electrical connections, a support, a cap, and a silicon drift detector (SDD). A planar side of the support can be directly affixed to upper electrical connections of the TEC. The support can have a non-planar side, opposite of the planar side, with a raised structure. A bottom face of the cap can be affixed to the raised structure, forming a cavity between the cap and the non-planar side of the support. The SDD can be affixed to a top face of the cap. In another embodiment, the non-planar side of the support can face the TEC. In another embodiment, a PIN photodiode can be directly affixed to a plate and the plate directly affixed to upper electrical connections of the TEC.

公开(公告)号：US20130094629A1

公开(公告)日：2013-04-18

申请号：US13705724

申请日：2012-12-05

Applicant: Moxtek, Inc.

Inventor： Steven Liddiard ,  Brian Taylor ,  Keith Decker ,  Jason Maynard

IPC: G21K1/00 ,  H01J35/18

CPC classification number: G21K1/00 ,  B82Y20/00 ,  H01J5/18 ,  H01J35/18 ,  H01J2235/18 ,  H01J2235/183

Abstract: An x-ray window includes a mount with a support frame and an aperture. A window film has a stack of layers including: a thin film layer comprising a material selected from the group consisting of diamond, graphene, diamond-like carbon, beryllium, and combinations thereof; a boron hydride layer; and a polymer layer. The window film, including the thin film layer, the boron hydride layer, and the polymer layer, extends across the aperture and is supported by the support frame. The window film is attached to the support frame, defining a sealed joint. The layers are capable of withstanding a differential pressure of at least 1 atmosphere. The window film is substantially transmissive to x-rays having an energy in the range of 100-20,000 electronvolts.

Abstract translation: X射线窗口包括具有支撑框架和孔的安装座。 窗膜具有一叠层，包括：薄膜层，其包含选自金刚石，石墨烯，类金刚石碳，铍及其组合的材料; 硼氢化物层; 和聚合物层。 包括薄膜层，硼氢化物层和聚合物层的窗膜延伸穿过孔并由支撑框架支撑。 窗膜附接到支撑框架，限定密封接头。 这些层能承受至少1个大气压的差压。 窗膜对具有在100-20,000电子伏特范围内的能量的x射线基本上是透射的。

公开(公告)号：US11640999B2

公开(公告)日：2023-05-02

申请号：US17843238

申请日：2022-06-17

Applicant: Moxtek, Inc.

Inventor： Jason Maynard ,  Shawn S. Chin ,  Jonathan Barron ,  David S. Hoffman

IPC: H01L31/024 ,  G01T1/24 ,  H01L31/115 ,  H01L31/02

Abstract: An x-ray detector can be small and have efficient cooling. In one embodiment, the x-ray detector can comprise a thermoelectric cooler (TEC) with upper electrical connections, a support, a cap, and a silicon drift detector (SDD). A planar side of the support can be directly affixed to upper electrical connections of the TEC. The support can have a non-planar side, opposite of the planar side, with a raised structure. A bottom face of the cap can be affixed to the raised structure, forming a cavity between the cap and the non-planar side of the support. The SDD can be affixed to a top face of the cap. In another embodiment, the non-planar side of the support can face the TEC. In another embodiment, a PIN photodiode can be directly affixed to a plate and the plate directly affixed to upper electrical connections of the TEC.