公开(公告)号：US08148684B2

公开(公告)日：2012-04-03

申请号：US12813064

申请日：2010-06-10

Applicant: Mitsutoshi Yoshikawa

Inventor： Mitsutoshi Yoshikawa

IPC: G01N23/00 ,  G21K5/00

CPC classification number: H01J37/09 ,  H01J37/023 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/188 ,  H01J2237/24475 ,  H01J2237/2605

Abstract: An electron beam apparatus has the electron optical column for releasing an electron beam from the front-end portion after the beam is emitted from an electron beam source located on a rear-end portion of the column, a specimen chamber connected to a front-end portion of the column, and an aperture member withdrawably disposed in the front-end portion of the column within the specimen chamber. The apparatus further includes a rotating mechanism for rotating the aperture member along a given plane lying along the direction of a path of the beam. Thus, the aperture member can be attached and detached to and from the front-end portion of the column.

Abstract translation: 电子束装置具有用于在从位于柱的后端部分的电子束源发射光束之后从前端部分释放电子束的电子束，连接到前端的样本室 所述柱的一部分，以及在所述试样室内的所述塔的前端部抽出地设置的孔部件。 该装置还包括旋转机构，用于沿着沿着梁的路径方向的给定平面旋转孔径构件。 因此，孔部件可以与柱的前端部分分离和分离。

公开(公告)号：US20110006209A1

公开(公告)日：2011-01-13

申请号：US12813064

申请日：2010-06-10

Applicant: Mitsutoshi Yoshikawa

Inventor： Mitsutoshi Yoshikawa

IPC: H01J37/26

CPC classification number: H01J37/09 ,  H01J37/023 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/188 ,  H01J2237/24475 ,  H01J2237/2605

Abstract: An electron beam apparatus has the electron optical column for releasing an electron beam from the front-end portion after the beam is emitted from an electron beam source located on a rear-end portion of the column, a specimen chamber connected to a front-end portion of the column, and an aperture member withdrawably disposed in the front-end portion of the column within the specimen chamber. The apparatus further includes a rotating mechanism for rotating the aperture member along a given plane lying along the direction of a path of the beam. Thus, the aperture member can be attached and detached to and from the front-end portion of the column.

Abstract translation: 电子束装置具有用于在从位于柱的后端部分的电子束源发射光束之后从前端部分释放电子束的电子束，连接到前端的样本室 所述柱的一部分，以及在所述试样室内的所述塔的前端部抽出地设置的孔部件。 该装置还包括旋转机构，用于沿着沿着梁的路径方向的给定平面旋转孔径构件。 因此，孔部件可以与柱的前端部分分离和分离。