公开(公告)号：US11067754B2

公开(公告)日：2021-07-20

申请号：US16989448

申请日：2020-08-10

Applicant: Massachusetts Institute of Technology

Inventor： Lionel C. Kimerling ,  Jurgen Michel ,  Anuradha M. Agarwal ,  Kazumi Wada ,  Drew Michael Weninger ,  Samuel Serna

IPC: G02B6/30 ,  G02B6/12 ,  G02B6/43 ,  G02B6/42

Abstract: Optical interconnects can offer higher bandwidth, lower power, lower cost, and higher latency than electrical interconnects alone. The optical interconnect system enables both optical and electrical interconnection, leverages existing fabrication processes to facilitate package-level integration, and delivers high alignment tolerance and low coupling losses. The optical interconnect system provides connections between a photonics integrated chip (PIC) and a chip carrier and between the chip carrier and external circuitry. The system provides a single flip chip interconnection between external circuitry and a chip carrier using a ball grid array (BGA) infrastructure. The system uses graded index (GRIN) lenses and cross-taper waveguide couplers to optically couple components, delivers coupling losses of less than 0.5 dB with an alignment tolerance of ±1 μm, and accommodates a 2.5× higher bandwidth density.

公开(公告)号：US11604147B2

公开(公告)日：2023-03-14

申请号：US17522819

申请日：2021-11-09

Applicant: Massachusetts Institute of Technology

Inventor： Eveline Postelnicu ,  Samarth Aggarwal ,  Kazumi Wada ,  Jurgen Michel ,  Lionel C. Kimerling ,  Michelle L. Clark ,  Anuradha M. Agarwal

IPC: G01N21/77 ,  G02B6/125 ,  H01L21/60 ,  H01L21/02

Abstract: A layer of amorphous Ge is formed on a substrate using electron-beam evaporation. The evaporation is performed at room temperature. The layer of amorphous Ge has a thickness of at least 50 nm and a purity of at least 90% Ge. The substrate is complementary metal-oxide-semiconductor (CMOS) compatible and is transparent at Long-Wave Infrared (LWIR) wavelengths. The layer of amorphous Ge can be used as a waveguide in chemical sensing and data communication applications. The amorphous Ge waveguide has a transmission loss in the LWIR of 11 dB/cm or less at 8 μm.

公开(公告)号：US10571335B2

公开(公告)日：2020-02-25

申请号：US16275747

申请日：2019-02-14

Applicant: Massachusetts Institute of Technology

Inventor： Juejun Hu ,  Tian Gu ,  Kazumi Wada ,  Anuradha Murthy Agarwal ,  Lionel Cooper Kimerling ,  Derek Kita ,  Junying Li ,  Fleur Jacolien Fok

IPC: G01J3/00 ,  G01J3/12 ,  G01J3/02 ,  G01J3/28 ,  G01J3/32

Abstract: An apparatus for generating a spectral image includes a filter to receive incident light. The filter has a variable refractive index. The apparatus also includes a modulator, operably coupled to the filter, to modulate the variable refractive index of the filter so as to generate a plurality of optical patterns from the incident light. The plurality of optical patterns represents the spectral image and each optical pattern in the plurality of optical patterns corresponds to a different modulation of the variable refractive index. The apparatus further includes a detector, in optical communication with the filter, to detect the plurality of optical patterns.

公开(公告)号：US11204327B2

公开(公告)日：2021-12-21

申请号：US16691007

申请日：2019-11-21

Applicant: Massachusetts Institute of Technology

Inventor： Eveline Postelnicu ,  Samarth Aggarwal ,  Kazumi Wada ,  Jurgen Michel ,  Lionel C. Kimerling ,  Michelle L. Clark ,  Anuradha M. Agarwal

IPC: G01N21/77 ,  G02B6/125 ,  H01L21/60 ,  H01L21/02

Abstract: A layer of amorphous Ge is formed on a substrate using electron-beam evaporation. The evaporation is performed at room temperature. The layer of amorphous Ge has a thickness of at least 50 nm and a purity of at least 90% Ge. The substrate is complementary metal-oxide-semiconductor (CMOS) compatible and is transparent at Long-Wave Infrared (LWIR) wavelengths. The layer of amorphous Ge can be used as a waveguide in chemical sensing and data communication applications. The amorphous Ge waveguide has a transmission loss in the LWIR of 11 dB/cm or less at 8 μm.

公开(公告)号：US20190285473A1

公开(公告)日：2019-09-19

申请号：US16275747

申请日：2019-02-14

Applicant: Massachusetts Institute of Technology

Inventor： Juejun Hu ,  Tian Gu ,  Kazumi Wada ,  Anuradha Murthy Agarwal ,  Lionel Cooper Kimerling ,  Derek Kita ,  Junying Li ,  Fleur Jacolien Fok

IPC: G01J3/12 ,  G01J3/02 ,  G01J3/32 ,  G01J3/28

Abstract: An apparatus for generating a spectral image includes a filter to receive incident light. The filter has a variable refractive index. The apparatus also includes a modulator, operably coupled to the filter, to modulate the variable refractive index of the filter so as to generate a plurality of optical patterns from the incident light. The plurality of optical patterns represents the spectral image and each optical pattern in the plurality of optical patterns corresponds to a different modulation of the variable refractive index. The apparatus further includes a detector, in optical communication with the filter, to detect the plurality of optical patterns.