HIGH-SCAN RATE POSITIONER FOR SCANNED PROBE MICROSCOPY
    1.
    发明申请
    HIGH-SCAN RATE POSITIONER FOR SCANNED PROBE MICROSCOPY 有权
    用于扫描探针显微镜的高扫描速率定位器

    公开(公告)号:US20130174300A1

    公开(公告)日:2013-07-04

    申请号:US13716814

    申请日:2012-12-17

    IPC分类号: G01Q30/00

    CPC分类号: G01Q30/00 B82Y35/00 G01Q10/04

    摘要: A system contains a first actuator half containing a first pair of actuator coils and a second pair of actuator coils located above the first pair of actuator coils, wherein the first pair of actuator coils is connected to a first metallic backing. A second actuator half is also providing within the system, which contains a first pair of actuator coils and a second pair of actuator coils located above the first pair of actuator coils, wherein the first pair of actuator coils is connected to a second metallic backing. The system also contains a mechanical flexure suspension having at least one flexure supporting a permanent magnet that is capable of moving, wherein the mechanical flexure suspension is located between the first actuator half and the second actuator half.

    摘要翻译: 系统包括第一致动器半部,其包含第一对致动器线圈和位于第一对致动器线圈上方的第二对致动器线圈,其中第一对致动器线圈连接到第一金属背衬。 第二致动器半部还在系统内提供,其包含第一对致动器线圈和位于第一对致动器线圈上方的第二对致动器线圈,其中第一对致动器线圈连接到第二金属背衬。 该系统还包含机械挠曲悬架,其具有至少一个支撑能够移动的永磁体的挠曲件,其中机械挠曲悬架位于第一致动器半部和第二致动器半部之间。

    High-scan rate positioner for scanned probe microscopy
    2.
    发明授权
    High-scan rate positioner for scanned probe microscopy 有权
    用于扫描探针显微镜的高扫描速率定位器

    公开(公告)号:US08860260B2

    公开(公告)日:2014-10-14

    申请号:US13716814

    申请日:2012-12-17

    CPC分类号: G01Q30/00 B82Y35/00 G01Q10/04

    摘要: A system contains a first actuator half containing a first pair of actuator coils and a second pair of actuator coils located above the first pair of actuator coils, wherein the first pair of actuator coils is connected to a first metallic backing. A second actuator half is also providing within the system, which contains a first pair of actuator coils and a second pair of actuator coils located above the first pair of actuator coils, wherein the first pair of actuator coils is connected to a second metallic backing. The system also contains a mechanical flexure suspension having at least one flexure supporting a permanent magnet that is capable of moving, wherein the mechanical flexure suspension is located between the first actuator half and the second actuator half.

    摘要翻译: 系统包括第一致动器半部,其包含第一对致动器线圈和位于第一对致动器线圈上方的第二对致动器线圈,其中第一对致动器线圈连接到第一金属背衬。 第二致动器半部还在系统内提供,其包含第一对致动器线圈和位于第一对致动器线圈上方的第二对致动器线圈,其中第一对致动器线圈连接到第二金属背衬。 该系统还包含机械挠曲悬架,其具有至少一个支撑能够移动的永磁体的挠曲件,其中机械挠曲悬架位于第一致动器半部和第二致动器半部之间。