Abstract:
A MEMS device includes a plurality of ribbon elements, a securing portion, and a plurality of connecting portions. The securing portion supports the plurality of ribbon elements. The plurality of connecting portions are disposed on ends of each of the plurality of ribbon elements and connect each of the plurality of ribbon elements to the securing portion. An angle formed by a longitudinal extending line of each of the plurality of ribbon elements and each of the plurality of connecting portions is greater than 0° in a planar direction of each of the plurality of ribbon elements.
Abstract:
A light deflector includes a movable portion including a reflector; multiple drive beams supporting the movable portion to allow the movable portion to be oscillatable; at least one supporting part supporting the multiple drive beams, the at least one supporting part including a first connecting portion and a second connecting portion different from the first connecting portion; and a stopper having one end connected to the first connecting portion and the other end connected to the second connecting portion on the at least one supporting part to be contactable with and straddle the multiple drive beams.
Abstract:
A spectral measurement device includes a light reflection grating having a plurality of movable gratings and a movable grating drive unit that displaces the movable gratings to alter a grating pattern of the light reflection grating, a light detecting element that detects light incident on the light reflection grating, a storage unit storing a relationship between a light quantity to be detected by the light detecting element and corresponding light intensities at differing wavelengths for different grating patterns, and a computation unit that calculates light intensities at the differing wavelengths of the light incident on the light reflection grating based on the light quantity of the incident light detected by the light detecting element for each of the different grating patterns by altering the grating pattern based on the relationship between the light quantity and the corresponding light intensities for the different grating patterns stored in the storage unit.
Abstract:
An imaging module includes an imaging chip including a micro-lens guiding incident light and an imaging element in a semiconductor substrate and converting the incident light into an electric signal, and a polarizing glass chip including a polarizing filter glass having a polarizer determining a polarization direction of the incident light arranged on a transparent substrate such that the polarizer faces the micro-lens and a spacer member connected to the polarizing filter glass to adjust a gap between the polarizer and the micro-lens of the imaging chip. In the imaging module, a melt-bonding surface of the spacer member is melt-bonded to the semiconductor substrate such that the polarizer of the polarizing glass chip and the micro-lens of the imaging chip are arranged close to each other via the gap, and the imaging element and the micro-lens of the imaging chip are sealed by the polarizing glass chip.
Abstract:
A movable device includes: a mechanism configured to drive a movable portion, the mechanism including: a gear including a first protrusion; and a cam in contact with the movable portion; and a driver to drive the mechanism, the driver including: a second protrusion to engage with the first protrusion; and an actuator to cause the second protrusion to reciprocate in response to application of voltage or electric current, to rotate the gear in a predetermined direction, to rotate the cam with the rotation of the gear to drive the movable portion. The first protrusion has a shape in which a downstream portion in the predetermined direction is lower in a direction perpendicular to the predetermined direction than an upstream portion. The second protrusion has a shape in which a downstream portion in the predetermined direction is higher in the direction perpendicular to the predetermined direction than an upstream portion.
Abstract:
A light deflector includes a reflector having a reflecting surface; a first movable unit having one end coupled to the reflector; a second movable unit having one end coupled to the reflector, the reflector disposed between the first movable unit and the second movable unit; a first piezoelectric element on the first movable unit; a second piezoelectric element on the second movable unit; a first supporting part coupled to the other end of the first movable unit; a second supporting part coupled to the other end of the second movable unit; an input part configured to receive voltage to be applied to at least the second piezoelectric element; and a wire electrically connecting the second piezoelectric element and the input part through the reflector configured to transmit the voltage to the second piezoelectric element. A passage area is provided through which light reflected by the reflector passes.
Abstract:
A movable diffraction element and a spectroscope. The movable diffraction element includes a movable component having a comb-like shape, a supporting unit configured to support the movable component, a first cantilever actuator coupled to the supporting unit, a displacement determiner coupled to an edge of the first cantilever actuator, and a second cantilever actuator disposed parallel to the first cantilever actuator. In the movable diffraction element, a slope generated when the second cantilever actuator deforms is approximately equivalent to a slope generated at the first cantilever actuator. The spectroscope includes the movable diffraction element.
Abstract:
A vibration detector includes a diaphragm including a fixed end forming a line segment extending in a first direction; and a reference point farthest from the fixed end in a second direction orthogonal to the first direction; and a support portion supporting the diaphragm at the fixed end. The vibration detector satisfies a formula below: L 3 8 W 0
Abstract:
A movable device includes: a movable portion; a driving section configured to generate a driving force to move the movable portion; a movement mechanical section; and at least one convex portion. The movement mechanical section includes: a contact portion contacting the movable portion, the contact portion movable in a movement direction by the driving force of the driving section; and multiple concave-convex portions movable with the contact portion in the movement direction. At least one convex portion engaging with corresponding one of the multiple concave-convex portions, said at least one convex portion being static relative to the movement mechanical section in the movement direction.
Abstract:
To enable to provide a small-scale and low-cost spectrometer (Means of Achieving the Object) A spectrometer includes: a light incidence unit configured to allow incidence of light from outside; a diffraction grating configured to disperse, according to wavelength, the light that is incident through the light incidence unit; and a reflection unit including a reflection surface for reflecting the light that has been dispersed according to wavelength by the diffraction grating. Tilt of the reflection surface is changeable.