公开(公告)号：US20100205697A1

公开(公告)日：2010-08-12

申请号：US12700236

申请日：2010-02-04

Applicant: Masato Iyoki ,  Yoshiteru Shikakura ,  Masafumi Watanabe

Inventor： Masato Iyoki ,  Yoshiteru Shikakura ,  Masafumi Watanabe

IPC: G01Q10/00

CPC classification number: G01Q10/06

Abstract: In detecting a displacement of a cantilever (2) by a displacement detecting mechanism (5) and allowing a probe (1) and a sample (8) to approach each other by at least one of a coarse-movement mechanism (13) and a vertical direction fine-movement mechanism (11) at the same time, an excitation mechanism (4) excites the cantilever (2) with a first excitation condition and the probe (1) and the sample (8) are allowed to approach each other with a first stop condition, and then the cantilever (2) is excited with a second excitation condition different from the first excitation condition, a second stop condition is set, and the probe (1) and the sample (8) are allowed to approach each other by the at least one of the vertical direction fine-movement mechanism (11) and the coarse-movement mechanism (13) until the second stop condition is satisfied.

Abstract translation: 在通过位移检测机构（5）检测悬臂（2）的位移并且允许探针（1）和样品（8）通过粗略运动机构（13）和 垂直方向微动机构（11）同时激励机构（4）以第一激励条件激发悬臂（2），使探头（1）和样品（8）彼此靠近 第一停止条件，然后用与第一激励条件不同的第二激励条件激励悬臂（2），设置第二停止条件，并且允许探头（1）和样品（8）接近每个 另外通过垂直方向微动机构11和粗动机构13中的至少一个，直到满足第二停止条件为止。

公开(公告)号：US08024816B2

公开(公告)日：2011-09-20

申请号：US12700236

申请日：2010-02-04

Applicant: Masato Iyoki ,  Yoshiteru Shikakura ,  Masafumi Watanabe

Inventor： Masato Iyoki ,  Yoshiteru Shikakura ,  Masafumi Watanabe

IPC: G01Q10/00 ,  G02B6/26

CPC classification number: G01Q10/06

Abstract: In detecting a displacement of a cantilever (2) by a displacement detecting mechanism (5) and allowing a probe (1) and a sample (8) to approach each other by at least one of a coarse-movement mechanism (13) and a vertical direction fine-movement mechanism (11) at the same time, an excitation mechanism (4) excites the cantilever (2) with a first excitation condition and the probe (1) and the sample (8) are allowed to approach each other with a first stop condition, and then the cantilever (2) is excited with a second excitation condition different from the first excitation condition, a second stop condition is set, and the probe (1) and the sample (8) are allowed to approach each other by the at least one of the vertical direction fine-movement mechanism (11) and the coarse-movement mechanism (13) until the second stop condition is satisfied.

Abstract translation: 在通过位移检测机构（5）检测悬臂（2）的位移并且允许探针（1）和样品（8）通过粗略运动机构（13）和 垂直方向微动机构（11）同时激励机构（4）以第一激励条件激发悬臂（2），使探头（1）和样品（8）彼此靠近 第一停止条件，然后用与第一激励条件不同的第二激励条件激励悬臂（2），设置第二停止条件，并且允许探头（1）和样品（8）接近每个 另外通过垂直方向微动机构11和粗动机构13中的至少一个，直到满足第二停止条件为止。

公开(公告)号：US08214915B2

公开(公告)日：2012-07-03

申请号：US12455556

申请日：2009-06-03

Applicant: Masatsugu Shigeno ,  Kazutoshi Watanabe ,  Masato Iyoki ,  Naoya Watanabe

Inventor： Masatsugu Shigeno ,  Kazutoshi Watanabe ,  Masato Iyoki ,  Naoya Watanabe

IPC: G01Q20/00

CPC classification number: G01Q70/14 ,  G01G3/12 ,  G01G9/00 ,  G01Q10/045 ,  G01Q60/32

Abstract: Provided is a cantilever that is capable of bending and deforming in an active manner by itself. The cantilever includes: a lever portion having a proximal end that is supported by a main body part; and a resistor member that is formed in the cantilever and generates heat when a voltage is applied, to thereby deform the lever portion by thermal expansion due to the heat.

Abstract translation: 本发明提供一种能够以活跃的方式自身弯曲和变形的悬臂。 悬臂包括：杠杆部分，其具有由主体部分支撑的近端; 以及形成在悬臂中并在施加电压时产生热量的电阻器构件，从而通过由于热量的热膨胀而使杆部变形。

公开(公告)号：US07614287B2

公开(公告)日：2009-11-10

申请号：US11842722

申请日：2007-08-21

Applicant: Masato Iyoki ,  Hiroyoshi Yamamoto

Inventor： Masato Iyoki ,  Hiroyoshi Yamamoto

IPC: G01B5/28

CPC classification number: G01Q20/00 ,  G01Q10/04 ,  G01Q30/18 ,  G01Q70/02

Abstract: A displacement detection mechanism for a scanning probe microscope capable of performing measurement quickly with high precision even if an objective lens or an illumination system is arranged above or below a sample or a cantilever, and a scanning probe microscope comprising it. The displacement detection mechanism (112) for a scanning probe microscope comprising a supporting section (22) for supporting a cantilever (20), a light source (114) for irradiating a reflective surface (14) with light, and a light receiving section (121) for receiving light reflected off the reflective surface (14), and detecting displacement of the cantilever (20) based on the light receiving position of the light receiving section (121), wherein the rear end of the cantilever (20) is secured to the supporting section (22), and the above light is allowed to impinge on the reflective surface (14), while inclining toward the X axis and Y axis, from above regions B and C on the distal end side of the cantilever (20) out of regions A, B, C and D sectioned, when viewed from the above, by the Y axis extending in the longitudinal direction of the cantilever (20) and the X axis passing through the reflective surface (14) and extending in the direction intersecting the Y axis perpendicularly.

Abstract translation: 即使将物镜或照明系统配置在样本或悬臂的上方或下方，也可以以高精度快速进行测量的扫描探针显微镜以及包括该扫描探针显微镜的扫描探针显微镜。 一种用于扫描探针显微镜的位移检测机构（112），包括用于支撑悬臂（20）的支撑部分（22），用于用光照射反射表面（14）的光源（114）和光接收部分 121），用于接收从所述反射表面（14）反射的光，以及基于所述光接收部分（121）的光接收位置检测所述悬臂（20）的位移，其中所述悬臂（20）的后端被固定 到所述支撑部分（22），并且当所述悬臂（20）的远端侧上方的区域B和C向X轴和Y轴倾斜时，允许上述光照射在所述反射表面（14）上 ）在从上方观察的区域A，B，C和D中，通过沿悬臂（20）的纵向方向延伸的Y轴和穿过反射表面（14）的X轴延伸并在 方向垂直于Y轴 。

公开(公告)号：US20090189485A1

公开(公告)日：2009-07-30

申请号：US12276740

申请日：2008-11-24

Applicant: Masato Iyoki

Inventor： Masato Iyoki

IPC: H01L41/00 ,  G01R27/08 ,  G01B7/16

CPC classification number: G01B7/18 ,  G01Q10/04 ,  H01L41/04 ,  H01L41/042 ,  H01L41/083 ,  H01L41/092

Abstract: By resistor attached by a piezoelectric element, measurement with high accuracy is possible by strain of the piezoelectric element and there is not a trouble by a short, a piezoelectric actuator, the piezoelectric element and a positioning device therewith. The piezoelectric actuator includes; a piezoelectric element which is formed into an arbitrary shape, polarized in an arbitrary direction, and includes electrodes provided on at least two surfaces opposed in a thickness direction thereof; a driver power supply for applying a voltage between the electrodes to generate strain in the piezoelectric element; a driver power supply for applying a voltage to generate strain in the piezoelectric element; resistors provided on the electrodes through intermediation of insulators; and a displacement detection device connected with the resistors; The electrodes of the piezoelectric element on which the resistors are provided are set at a ground potential.

Abstract translation: 通过由压电元件附着的电阻器，可以通过压电元件的应变来进行高精度的测量，并且通过短的压电致动器，压电元件及其定位装置没有问题。 压电致动器包括： 形成任意形状的压电元件，其任意方向偏振，并且包括设置在其厚度方向上相对的至少两个表面上的电极; 用于在电极之间施加电压以在压电元件中产生应变的驱动器电源; 用于施加电压以在所述压电元件中产生应变的驱动器电源; 绝缘体通过电极设置在电极上; 以及与电阻器连接的位移检测装置; 设置有电阻器的压电元件的电极设定为接地电位。

公开(公告)号：US20060043290A1

公开(公告)日：2006-03-02

申请号：US11199290

申请日：2005-08-08

Applicant: Masato Iyoki ,  Masatsugu Shigeno

Inventor： Masato Iyoki ,  Masatsugu Shigeno

IPC: G21K7/00

CPC classification number: G01Q60/34 ,  G01Q70/02

Abstract: A scanning probe microscope having a cantilever holder is provided which gives a cantilever great amplitude by a small-sized vibrator configurable in a limited space and is stably operated even in environments of high viscous drag such as a liquid. A cantilever base part of a cantilever is fixed to a fixing part of a scanning probe microscopy cantilever holder. A vibrator is mounted on the fixing part. When it is defined that the front side is the side close to a probe and the rear side is the side close to a supporting part of the fixing part along in the longitudinal direction of the cantilever, the vibrator displaces the front and rear sides of the fixing part of the cantilever holder to each other in the opposite directions within the plane orthogonal to the sample surface to vibrate the cantilever in a liquid.

Abstract translation: 提供具有悬臂支架的扫描探针显微镜，其通过可在有限空间中配置的小尺寸振动器提供悬臂极大幅度，并且即使在诸如液体的高粘性阻力的环境中也能稳定地操作。 悬臂的悬臂底部固定在扫描探针显微镜悬臂支架的固定部分上。 振动器安装在固定部分上。 当确定前侧是靠近探头的一侧，并且后侧是沿着悬臂的纵向方向靠近固定部分的支撑部分的一侧时，振动器使前侧和后侧 将悬臂支架的一部分在与样品表面正交的平面内的相反方向彼此固定，以使悬臂在液体中振动。

公开(公告)号：US08058780B2

公开(公告)日：2011-11-15

申请号：US12378139

申请日：2009-02-11

Applicant: Masato Iyoki

Inventor： Masato Iyoki

IPC: H01L41/04

CPC classification number: H01L41/092 ,  G01Q10/04

Abstract: The cylindrical piezoelectric actuator which comprised a piezoelectric element which provided electrode in each of an inner peripheral face and an outer peripheral face which was cylindrical at least, and drive power supply to drive it. And the outer side electrode of the piezoelectric element covered the substantially circumferential outer face entirety and it was connected to a ground potential, and the electrode in the internal perimeter surface connected to drive power supply.

Abstract translation: 该圆柱形压电致动器包括一个压电元件，该压电元件至少在圆筒形的内周面和外周面中设置电极，驱动电源驱动该压电元件。 并且压电元件的外侧电极覆盖基本圆周的外表面整体，并且其连接到接地电位，并且内周边表面中的电极连接以驱动电源。

公开(公告)号：US20090206707A1

公开(公告)日：2009-08-20

申请号：US12378139

申请日：2009-02-11

Applicant: Masato Iyoki

Inventor： Masato Iyoki

IPC: H01L41/047

CPC classification number: H01L41/092 ,  G01Q10/04

Abstract: The cylindrical piezoelectric actuator which comprised a piezoelectric element which provided electrode in each of an inner peripheral face and an outer peripheral face which was cylindrical at least, and drive power supply to drive it. And the outer side electrode of the piezoelectric element covered the substantially circumferential outer face entirety and it was connected to a ground potential, and the electrode in the internal perimeter surface connected to drive power supply.

Abstract translation: 该圆柱形压电致动器包括一个压电元件，该压电元件至少在圆筒形的内周面和外周面中设置电极，驱动电源驱动该压电元件。 并且压电元件的外侧电极覆盖基本圆周的外表面整体，并且其连接到接地电位，并且内周边表面中的电极连接以驱动电源。

公开(公告)号：US20080061232A1

公开(公告)日：2008-03-13

申请号：US11842735

申请日：2007-08-21

Applicant: Masato Iyoki ,  Masatsugu Shigeno

Inventor： Masato Iyoki ,  Masatsugu Shigeno

IPC: G01N13/16 ,  G01B7/34

CPC classification number: G01Q10/04 ,  G01Q30/025

Abstract: An inching mechanism for a scanning probe microscope capable of performing measurement with high precision while enhancing the scanning speed by a probe furthermore, and a scanning probe microscope comprising it. The inching mechanism for a scanning probe microscope which is provided in a scanning probe microscope (SPM) (1) having a stage (16) for mounting a sample S, and a probe (20) approaching closely to or touching the surface of the sample S, characterized in that the inching mechanism comprises a first drive section and a second drive section provided independently, a probe inching mechanism (26) having the first drive section and inching, by the first drive section, the probe (20) in the X direction and Y direction parallel with the surface of the sample S and intersecting each other, and a stage inching mechanism (27) having the second drive section and inching, by the second drive section, the stage (16) in the Z direction perpendicular to the surface of the sample S.

Abstract translation: 一种扫描探针显微镜的微动机构，其特征在于，能够高精度地进行测量，同时通过探针增强扫描速度，以及包括该探针显微镜的扫描探针显微镜。 提供在具有用于安装样品S的载物台（16）的扫描探针显微镜（SPM）（1）中的扫描探针显微镜的微动机构和靠近或接触样品表面的探针（20） S，其特征在于，所述微动机构包括独立设置的第一驱动部和第二驱动部，具有所述第一驱动部的第一驱动部和所述第一驱动部的所述探针（20）在X 方向Y方向与样品S的表面平行并且彼此交叉，并且具有第二驱动部分的台阶微动机构（27）和由第二驱动部分在Z方向垂直于 样品S的表面

公开(公告)号：US20080049223A1

公开(公告)日：2008-02-28

申请号：US11840549

申请日：2007-08-17

Applicant: Masato Iyoki ,  Hiroyoshi Yamamoto ,  Kazutoshi Watanabe

Inventor： Masato Iyoki ,  Hiroyoshi Yamamoto ,  Kazutoshi Watanabe

IPC: G01J4/00 ,  G01B11/14 ,  G01N21/47

CPC classification number: G01Q20/02

Abstract: The optical displacement-detecting mechanism has: a light source for irradiating a target for measurement with light; a light source-driving circuit for driving the light source; an optical detector made from a semiconductor for receiving light after the irradiation of the target for measurement by the light source and converting the light into an electric signal thereby to detect an intensity of light; and an amplifier including a current-voltage conversion circuit for performing current-to-voltage conversion on a detection signal of the optical detector with a predetermined amplification factor. In the optical displacement-detecting mechanism, a light source having a spectrum half width of 10 nm or larger is used, whereby the light source can be driven with an output power of 2 mW or larger without generating mode hop noise and optical feedback noise.

Abstract translation: 光学位移检测机构具有：用光照射被测物的光源; 用于驱动光源的光源驱动电路; 由半导体制成的光检测器，用于在由光源照射测量目标物之后接收光，并将光转换成电信号从而检测光的强度; 以及放大器，其包括用于以预定的放大系数对光学检测器的检测信号进行电流 - 电压转换的电流 - 电压转换电路。 在光学位移检测机构中，使用光谱半宽度为10nm以上的光源，由此可以以2mW以上的输出功率驱动光源，而不产生模式跳噪声和光反馈噪声。