公开(公告)号：US10354902B2

公开(公告)日：2019-07-16

申请号：US15780680

申请日：2016-10-13

申请人： MURATA MACHINERY, LTD.

发明人： Osamu Honda ,  Keiji Yamada ,  Daisuke Ono ,  Takashi Nozawa

IPC分类号： G06F7/00 ,  H01L21/677 ,  B65G1/00 ,  B65G43/00

摘要： A conveyance system includes a track, ceiling conveyance vehicles, storage apparatuses, and a conveyance controller configured or programmed to control operations of the ceiling conveyance vehicles and a local vehicle in accordance with an operation mode. The storage apparatus includes a storage plate and the local vehicle that transfer a FOUP between the storage plate and an apparatus port. The conveyance controller switches the operation mode among a first mode prohibiting transfer from the apparatus port to the storage plate by the local vehicle, a second mode prohibiting transfer to the storage plate by any of the ceiling conveyance vehicles and transfer from the storage plate to the apparatus port by the local vehicle, and a third mode that does not restrict transfer by the local vehicle.

公开(公告)号：US10446427B2

公开(公告)日：2019-10-15

申请号：US15780685

申请日：2016-10-13

申请人： MURATA MACHINERY, LTD.

发明人： Osamu Honda ,  Keiji Yamada ,  Takashi Nozawa ,  Daisuke Ono

IPC分类号： H01L21/677 ,  B65G43/10

摘要： A conveyance system includes a track, ceiling conveyance vehicles, and a conveyance controller configured or programmed to output a conveyance instruction for a FOUP to the ceiling conveyance vehicles. When a first FOUP on a downstream port is waiting for collection, the conveyance controller waits without outputting a conveyance instruction instructing collection of the first FOUP until any of the conveyance vehicles conveying a second FOUP to an upstream port has been recognized until a waiting time set in advance has elapsed since the first FOUP changed to a state waiting for collection and outputs the conveyance instruction instructing collection of the first FOUP when the waiting time has elapsed since a point in time when the first FOUP changed to the state waiting for collection.