发明授权
- 专利标题: Conveyance system
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申请号: US15780680申请日: 2016-10-13
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公开(公告)号: US10354902B2公开(公告)日: 2019-07-16
- 发明人: Osamu Honda , Keiji Yamada , Daisuke Ono , Takashi Nozawa
- 申请人: MURATA MACHINERY, LTD.
- 申请人地址: JP Kyoto
- 专利权人: MURATA MACHINERY, LTD.
- 当前专利权人: MURATA MACHINERY, LTD.
- 当前专利权人地址: JP Kyoto
- 代理机构: Keating & Bennett, LLP
- 优先权: JP2015-239615 20151208
- 国际申请: PCT/JP2016/080412 WO 20161013
- 国际公布: WO2017/098804 WO 20170615
- 主分类号: G06F7/00
- IPC分类号: G06F7/00 ; H01L21/677 ; B65G1/00 ; B65G43/00
摘要:
A conveyance system includes a track, ceiling conveyance vehicles, storage apparatuses, and a conveyance controller configured or programmed to control operations of the ceiling conveyance vehicles and a local vehicle in accordance with an operation mode. The storage apparatus includes a storage plate and the local vehicle that transfer a FOUP between the storage plate and an apparatus port. The conveyance controller switches the operation mode among a first mode prohibiting transfer from the apparatus port to the storage plate by the local vehicle, a second mode prohibiting transfer to the storage plate by any of the ceiling conveyance vehicles and transfer from the storage plate to the apparatus port by the local vehicle, and a third mode that does not restrict transfer by the local vehicle.
公开/授权文献
- US20180350646A1 CONVEYANCE SYSTEM 公开/授权日:2018-12-06
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