- 专利标题: Conveyance system and conveyance method
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申请号: US15780685申请日: 2016-10-13
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公开(公告)号: US10446427B2公开(公告)日: 2019-10-15
- 发明人: Osamu Honda , Keiji Yamada , Takashi Nozawa , Daisuke Ono
- 申请人: MURATA MACHINERY, LTD.
- 申请人地址: JP Kyoto
- 专利权人: MURATA MACHINERY, LTD.
- 当前专利权人: MURATA MACHINERY, LTD.
- 当前专利权人地址: JP Kyoto
- 代理机构: Keating & Bennett, LLP
- 优先权: JP2015-239616 20151208
- 国际申请: PCT/JP2016/080414 WO 20161013
- 国际公布: WO2017/098805 WO 20170615
- 主分类号: H01L21/677
- IPC分类号: H01L21/677 ; B65G43/10
摘要:
A conveyance system includes a track, ceiling conveyance vehicles, and a conveyance controller configured or programmed to output a conveyance instruction for a FOUP to the ceiling conveyance vehicles. When a first FOUP on a downstream port is waiting for collection, the conveyance controller waits without outputting a conveyance instruction instructing collection of the first FOUP until any of the conveyance vehicles conveying a second FOUP to an upstream port has been recognized until a waiting time set in advance has elapsed since the first FOUP changed to a state waiting for collection and outputs the conveyance instruction instructing collection of the first FOUP when the waiting time has elapsed since a point in time when the first FOUP changed to the state waiting for collection.
公开/授权文献
- US20180358252A1 CONVEYANCE SYSTEM AND CONVEYANCE METHOD 公开/授权日:2018-12-13
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