Abstract:
A method for making an integrated device is disclosed employing a plurality of fully insulated islands having plane walls. Selected diffusion steps are made overlapping certain of the islands and certain of the other diffusion steps.
Abstract:
An integrated device and/or circuit and the method for making such is disclosed employing a plurality of fully insulated islands having plane walls. Selected diffusion steps are made overlapping certain of the islands and certain of the other diffusion steps.
Abstract:
Disclosed are three processes, which all employ a common sequence of steps, for forming discrete and integrtated circuit transistors having emitters self-aligned between base enhancements and various polycrystalline silicon contacting members. The first process forms transistors having polycrystalline emitter contacts. The second process employs anisotropic etching techniques for forming self-aligned, integrated circuit transistors having polycrystalline emitter and collector contacts along with shallow isolation and collector buried layer contacting diffusions. The third process provides a transistor having polycrystalline silicon contacts to the emitter and base enhancement regions and utilizes boron doped polycrystalline silicon base contacts as an etch stop.
Abstract:
VARIOUS DEVICES ARE DESCRIBED HEREIN UTILIZING ANISOTROPIC ETCHING AND DIELECTRIC ISOLATIONS AS MEANS FOR LIMITING AREAS OF EITHER CONDUCTIVITY TYPE SEMICONDUCTOR MATERIAL. SURFACE JUNCTIONS NORMALLY FOUND IN THE DIFFUSED SEMICONDUCTOR DEVICES OF THE PRIOR ART ARE ALSO ELIMINATED BY THE USE OF OVERLAP DIFFUSION TECHNIQUES. ANISOTROPIC ETCHING IS EMPLOYED IN CERTAIN OF THE DEVICES FOR ATTAINING BURIED PN JUNCTIONS.
Abstract:
An integrated device and/or circuit and the method for making such is disclosed employing a plurality of fully insulated islands having plane walls. Selected diffusion steps are made overlapping certain of the islands and certain of the other diffusion steps.