公开(公告)号：US20210231499A1

公开(公告)日：2021-07-29

申请号：US17054157

申请日：2020-03-25

Applicant: MKS TECHNOLOGY, INC. (D/B/A SNOWY RANGE INSTRUMENT

Inventor： Quaid Vohra ,  Celestin Zemtsop ,  Mark Watson

IPC: G01J3/44 ,  G01J3/02 ,  G01J3/10 ,  G01J3/28 ,  G01J3/18

Abstract: A multi-dispersive spectrometer is provided in which the spectrometer comprises an an optical system configured to direct an excitation signal from an excitation light source toward a sample, receive a spectroscopy signal from the sample, and direct the spectroscopy signal toward the detector. The optical system comprises a movable optical component adapted to move the spectroscopy signal relative to at least one sensor of the detector and the detector is adapted to detect a plurality of discrete shifted spectroscopy signals. A method of obtaining a Raman spectrum from a sample is also provided. The method comprises directing an excitation signal from an excitation light source toward a sample; receiving a spectroscopy signal from the sample; and directing the spectroscopy signal toward a detector, wherein the spectroscopy signal is moved relative to at least one sensor of the detector to provide a plurality of discrete shifted spectroscopy signals.

公开(公告)号：US11441948B2

公开(公告)日：2022-09-13

申请号：US17054157

申请日：2020-03-25

Applicant: MKS TECHNOLOGY, INC.

Inventor： Quaid Vohra ,  Celestin Zemtsop ,  Mark Watson

IPC: G01J3/44 ,  G01J3/02 ,  G01J3/10 ,  G01J3/18 ,  G01J3/28

Abstract: A multi-dispersive spectrometer is provided in which the spectrometer comprises an optical system configured to direct an excitation signal from an excitation light source toward a sample, receive a spectroscopy signal from the sample, and direct the spectroscopy signal toward the detector. The optical system comprises a movable optical component adapted to move the spectroscopy signal relative to at least one sensor of the detector and the detector is adapted to detect a plurality of discrete shifted spectroscopy signals. A method of obtaining a Raman spectrum from a sample is also provided. The method comprises directing an excitation signal from an excitation light source toward a sample; receiving a spectroscopy signal from the sample; and directing the spectroscopy signal toward a detector, wherein the spectroscopy signal is moved relative to at least one sensor of the detector to provide a plurality of discrete shifted spectroscopy signals.