公开(公告)号：US11173439B2

公开(公告)日：2021-11-16

申请号：US16677640

申请日：2019-11-07

Applicant: MILAEBO CO., LTD.

Inventor： Che Hoo Cho ,  Jae Jun Lee ,  Myung Pil Han

IPC: B01D45/00 ,  B01D45/06 ,  H01L21/67 ,  C23C16/44 ,  B01D45/08

Abstract: The flow path switching type collecting apparatus of by-products for a semiconductor manufacturing process of the present disclosure includes: a cylindrical housing that has a top plate having a gas inlet and a bottom plate having a gas outlet and fastening portions extending and protruding inside the housing, and receives and then discharges an exhaust gas flowing inside; and a flow path switching type disc collection tower that is installed vertically in the housing and includes an open edge-mesh center type collection disc, a mesh edge-open center type collection disc, a solid edge-open center type collection disc, and an open edge-solid center type collection disc that have different external shape to collect by-products of an exhaust gas flowing insides.

公开(公告)号：US10801107B2

公开(公告)日：2020-10-13

申请号：US16234372

申请日：2018-12-27

Applicant: MILAEBO CO., LTD.

Inventor： Che Hoo Cho ,  Kyung Tae Kim ,  Myung Pil Han ,  Myoung Hoon Jung

IPC: C23C16/40 ,  C23C16/44 ,  H01L21/67

Abstract: Disclosed is an apparatus for collecting a by-product in a semiconductor process, the apparatus including: a housing; a heater plate; a heater power supply unit; first and second upper horizontal brackets collecting a by-product; a by-product collecting tower allowing the exhaust gas to pass through an exhaust gas passing space and collecting the by-product; the lower horizontal bracket guiding the exhaust gas toward the window and collecting the by-product contained in the exhaust gas; the window blocking the powder form by-product from introducing to a gas collecting and discharging port and guiding the exhaust gas thereto; and the gas collecting and discharging port. Accordingly, the apparatus can increase capacity of collecting a by-product with a simple structure, thereby extending a replacement period of the apparatus. In addition, the apparatus can collect a large amount of by-products quickly and efficiently over a long period of time.

公开(公告)号：US11562943B2

公开(公告)日：2023-01-24

申请号：US16669824

申请日：2019-10-31

Applicant: MILAEBO CO., LTD.

Inventor： Che Hoo Cho ,  Yeon Ju Lee ,  Myung Pil Han

IPC: H01L23/473 ,  B01D8/00 ,  B01D53/00 ,  H01L23/427 ,  C23C16/44 ,  H01L21/02 ,  H01L21/67 ,  F16T1/00

Abstract: ABSTRACT An apparatus is for collecting a by-product in a semiconductor manufacturing process. The apparatus includes: a housing cooling channel on an inner wall thereof to cool exhaust gas which is temperature-controlled by a heater while being introduced through a gas inlet of an upper plate; an internal collecting tower including multiple vertical plates and multiple horizontal plates that are assembled, and condensing and collecting a by-product from the exhaust gas; a main cooling channel having a serpentine shape and cooling the exhaust gas uniformly by using coolant while passing through the internal collecting tower; and a multi-connection pipe sequentially supplying the coolant to the upper plate cooling channel, the housing cooling channel, and the main cooling channel and discharging the coolant, by using a supply pipe and a discharge pipe that are provided outside the housing.

公开(公告)号：US11462422B2

公开(公告)日：2022-10-04

申请号：US16668205

申请日：2019-10-30

Applicant: MILAEBO CO., LTD.

Inventor： Che Hoo Cho ,  Yeon Ju Lee ,  Myung Pil Han

IPC: B29C65/00 ,  H01L21/67 ,  C23C16/44 ,  B01D45/16 ,  B01D53/00

Abstract: Disclosed is an apparatus having a cooling line for collecting a by-product in a semiconductor manufacturing process. The apparatus includes: a housing (110) including an inner wall plate (111) on an inner wall thereof to collect a by-product while generating a vortex in exhaust gas which is temperature-controlled by a heater (140) while being introduced through a gas inlet of an upper plate; an internal collecting tower (150) including vertical plates, an upper cover plate, and vortex plates fitted to the vertical plates, and condensing the introduced exhaust gas to collect the by-product; a main cooling channel (160) cooling the exhaust gas by using coolant while passing through the internal collecting tower (150); and a multi-connection pipe (170) sequentially supplying the coolant to an upper plate cooling channel and a main cooling channel and discharging the coolant, by using a supply pipe and a discharge pipe provided outside the housing.

公开(公告)号：US11117086B2

公开(公告)日：2021-09-14

申请号：US16677621

申请日：2019-11-07

Applicant: MILAEBO CO., LTD.

Inventor： Che Hoo Cho ,  Jae Jun Lee ,  Myung Pil Han

IPC: B01D50/00 ,  C23C16/44 ,  B01D46/24 ,  B01D45/08 ,  H01L21/67 ,  B08B15/02

Abstract: The apparatus for collecting by-products of the present disclosure includes: a cylindrical housing that has a top plate having a gas inlet and a bottom plate having a gas outlet extending and protruding inside the housing, and receives and then discharges an exhaust gas flowing inside; and a flow path change-type vertical internal collection tower that is installed in a hanging state inside the housing and includes a disc type collector, a diffusion plate, a cylindrical collector, and a cylindrical filter collector for collecting by-products in an exhaust gas flowing inside.

公开(公告)号：US20210134701A1

公开(公告)日：2021-05-06

申请号：US16669824

申请日：2019-10-31

Applicant: MILAEBO CO., LTD.

Inventor： Che Hoo CHO ,  Yeon Ju Lee ,  Myung Pil Han

IPC: H01L23/427 ,  B01D53/00 ,  H01L23/473 ,  H01L21/67 ,  C23C16/44 ,  H01L21/02

Abstract: Disclosed is an apparatus having a cooling line for collecting a by-product in a semiconductor manufacturing process. The apparatus includes: a housing cooling channel (111) on an inner wall thereof to cooling exhaust gas which is temperature-controlled by a heater (140) while being introduced through a gas inlet of an upper plate; an internal collecting tower (150) including multiple vertical plates and multiple horizontal plates that are assembled, and condensing and collecting a by-product from the exhaust gas; a main cooling channel (160) having a serpentine shape and cooling the exhaust gas uniformly by using coolant while passing through the internal collecting tower (150); and a multi-connection pipe (170) sequentially supplying the coolant to the upper plate cooling channel, the housing cooling channel, and the main cooling channel and discharging the coolant, by using a supply pipe and a discharge pipe that are provided outside the housing.