公开(公告)号：US11173439B2

公开(公告)日：2021-11-16

申请号：US16677640

申请日：2019-11-07

Applicant: MILAEBO CO., LTD.

Inventor： Che Hoo Cho ,  Jae Jun Lee ,  Myung Pil Han

IPC: B01D45/00 ,  B01D45/06 ,  H01L21/67 ,  C23C16/44 ,  B01D45/08

Abstract: The flow path switching type collecting apparatus of by-products for a semiconductor manufacturing process of the present disclosure includes: a cylindrical housing that has a top plate having a gas inlet and a bottom plate having a gas outlet and fastening portions extending and protruding inside the housing, and receives and then discharges an exhaust gas flowing inside; and a flow path switching type disc collection tower that is installed vertically in the housing and includes an open edge-mesh center type collection disc, a mesh edge-open center type collection disc, a solid edge-open center type collection disc, and an open edge-solid center type collection disc that have different external shape to collect by-products of an exhaust gas flowing insides.

公开(公告)号：US11117086B2

公开(公告)日：2021-09-14

申请号：US16677621

申请日：2019-11-07

Applicant: MILAEBO CO., LTD.

Inventor： Che Hoo Cho ,  Jae Jun Lee ,  Myung Pil Han

IPC: B01D50/00 ,  C23C16/44 ,  B01D46/24 ,  B01D45/08 ,  H01L21/67 ,  B08B15/02

Abstract: The apparatus for collecting by-products of the present disclosure includes: a cylindrical housing that has a top plate having a gas inlet and a bottom plate having a gas outlet extending and protruding inside the housing, and receives and then discharges an exhaust gas flowing inside; and a flow path change-type vertical internal collection tower that is installed in a hanging state inside the housing and includes a disc type collector, a diffusion plate, a cylindrical collector, and a cylindrical filter collector for collecting by-products in an exhaust gas flowing inside.