公开(公告)号：US11322629B2

公开(公告)日：2022-05-03

申请号：US17145301

申请日：2021-01-09

Applicant: Micron Technology, Inc. ,  Massachusetts Institute of Technology

Inventor： Roy Meade ,  Karan Mehta ,  Efraim Megged ,  Jason Orcutt ,  Milos Popovic ,  Rajeev Ram ,  Jeffrey Shainline ,  Zvi Sternberg ,  Vladimir Stojanovic ,  Ofer Tehar-Zahav

IPC: H01L31/0232 ,  H01L31/0368 ,  H01L27/144 ,  H01L31/18

Abstract: Method and structural embodiments are described which provide an integrated structure using polysilicon material having different optical properties in different regions of the structure.

公开(公告)号：US20220231178A1

公开(公告)日：2022-07-21

申请号：US17711728

申请日：2022-04-01

Applicant: Micron Technology, Inc. ,  Massachusetts Institute of Technology

Inventor： Roy Meade ,  Karan Mehta ,  Efraim Megged ,  Jason Orcutt ,  Milos Popovic ,  Rajeev Ram ,  Jeffrey Shainline ,  Zvi Sternberg ,  Vladimir Stojanovic ,  Ofer Tehar-Zahav

IPC: H01L31/0232 ,  H01L31/0368 ,  H01L27/144 ,  H01L31/18

Abstract: Method and structural embodiments are described which provide an integrated structure using polysilicon material having different optical properties in different regions of the structure.

公开(公告)号：US20210135025A1

公开(公告)日：2021-05-06

申请号：US17145301

申请日：2021-01-09

Applicant: Micron Technology, Inc. ,  Massachusetts Institute of Technology

Inventor： Roy Meade ,  Karan Mehta ,  Efraim Megged ,  Jason Orcutt ,  Milos Popovic ,  Rajeev Ram ,  Jeffrey Shainline ,  Zvi Sternberg ,  Vladimir Stojanovic ,  Ofer Tehar-Zahav

IPC: H01L31/0232 ,  H01L31/0368 ,  H01L27/144 ,  H01L31/18

Abstract: Method and structural embodiments are described which provide an integrated structure using polysilicon material having different optical properties in different regions of the structure.

公开(公告)号：US10312388B2

公开(公告)日：2019-06-04

申请号：US15679028

申请日：2017-08-16

Applicant: Micron Technology, Inc. ,  Massachusetts Institute of Technology

Inventor： Roy Meade ,  Karan Mehta ,  Efraim Megged ,  Jason Orcutt ,  Milos Popovic ,  Rajeev Ram ,  Jeffrey Shainline ,  Zvi Sternberg ,  Vladimir Stojanovic ,  Ofer Tehar-Zahav

IPC: H01L31/18 ,  H01L31/0232 ,  H01L31/0368 ,  H01L27/144

Abstract: Method and structural embodiments are described which provide an integrated structure using polysilicon material having different optical properties in different regions of the structure.

公开(公告)号：US20190245100A1

公开(公告)日：2019-08-08

申请号：US16384037

申请日：2019-04-15

Applicant: Micron Technology, Inc. ,  Massachusetts Institute of Technology

Inventor： Roy Meade ,  Karan Mehta ,  Efraim Megged ,  Jason Orcutt ,  Milos Popovic ,  Rajeev Ram ,  Jeffrey Shainline ,  Zvi Sternberg ,  Vladimir Stojanovic ,  Ofer Tehar-Zahav

IPC: H01L31/0232 ,  H01L31/0368 ,  H01L31/18 ,  H01L27/144

CPC classification number: H01L31/02327 ,  H01L27/1443 ,  H01L31/03682 ,  H01L31/1804 ,  H01L31/182 ,  Y02E10/546 ,  Y02P70/521

Abstract: Method and structural embodiments are described which provide an integrated structure using polysilicon material having different optical properties in different regions of the structure.

公开(公告)号：US10903377B2

公开(公告)日：2021-01-26

申请号：US16384037

申请日：2019-04-15

Applicant: Micron Technology, Inc. ,  Massachusetts Institute of Technology

Inventor： Roy Meade ,  Karan Mehta ,  Efraim Megged ,  Jason Orcutt ,  Milos Popovic ,  Rajeev Ram ,  Jeffrey Shainline ,  Zvi Sternberg ,  Vladimir Stojanovic ,  Ofer Tehar-Zahav

IPC: H01L31/0232 ,  H01L31/18 ,  H01L31/0368 ,  H01L27/144

Abstract: Method and structural embodiments are described which provide an integrated structure using polysilicon material having different optical properties in different regions of the structure.

公开(公告)号：US20170365726A1

公开(公告)日：2017-12-21

申请号：US15679028

申请日：2017-08-16

Applicant: Micron Technology, Inc. ,  Massachusetts Institute of Technology

Inventor： Roy Meade ,  Karan Mehta ,  Efraim Megged ,  Jason Orcutt ,  Milos Popovic ,  Rajeev Ram ,  Jeffrey Shainline ,  Zvi Sternberg ,  Vladimir Stojanovic ,  Ofer Tehar-Zahav

IPC: H01L31/0232 ,  H01L27/144 ,  H01L31/0368 ,  H01L31/18

CPC classification number: H01L31/02327 ,  H01L27/1443 ,  H01L31/03682 ,  H01L31/1804 ,  H01L31/182 ,  Y02E10/546 ,  Y02P70/521

Abstract: Method and structural embodiments are described which provide an integrated structure using polysilicon material having different optical properties in different regions of the structure.

公开(公告)号：US09768330B2

公开(公告)日：2017-09-19

申请号：US14467449

申请日：2014-08-25

Applicant: MICRON TECHNOLOGY, INC. ,  Massachusetts Institute of Technology

Inventor： Roy Meade ,  Karan Mehta ,  Efraim Megged ,  Jason Orcutt ,  Milos Popovic ,  Rajeev Ram ,  Jeffrey Shainline ,  Zvi Sternberg ,  Vladimir Stojanovic ,  Ofer Tehar-Zahav

IPC: H01L27/14 ,  H01L31/0232 ,  H01L31/0368 ,  H01L27/144 ,  H01L31/18

CPC classification number: H01L31/02327 ,  H01L27/1443 ,  H01L31/03682 ,  H01L31/1804 ,  H01L31/182 ,  Y02E10/546 ,  Y02P70/521

Abstract: Method and structural embodiments are described which provide an integrated structure using polysilicon material having different optical properties in different regions of the structure.

公开(公告)号：US20160056309A1

公开(公告)日：2016-02-25

申请号：US14467449

申请日：2014-08-25

Applicant: MICRON TECHNOLOGY, INC. ,  Massachusetts Institute of Technology

Inventor： Roy Meade ,  Karan Mehta ,  Efraim Megged ,  Jason Orcutt ,  Milos Popovic ,  Rajeev Ram ,  Jeffrey Shainline ,  Zvi Sternberg ,  Vladimir Stojanovic ,  Ofer Tehar-Zahav

IPC: H01L31/0232 ,  H01L27/144 ,  H01L31/18 ,  H01L31/0368

CPC classification number: H01L31/02327 ,  H01L27/1443 ,  H01L31/03682 ,  H01L31/1804 ,  H01L31/182 ,  Y02E10/546 ,  Y02P70/521

Abstract: Method and structural embodiments are described which provide an integrated structure using polysilicon material having different optical properties in different regions of the structure.

Abstract translation: 描述了使用在结构的不同区域中具有不同光学性质的多晶硅材料的集成结构的方法和结构实施例。

公开(公告)号：US20180217122A1

公开(公告)日：2018-08-02

申请号：US15883183

申请日：2018-01-30

Applicant: Massachusetts Institute of Technology

Inventor： Huaiyu Meng ,  Rajeev Ram

IPC: G01N33/487 ,  H01L31/107 ,  H01L31/16 ,  H01L31/02 ,  C12Q1/6876 ,  G01N27/447 ,  B03C5/00

CPC classification number: G01N33/48707 ,  B01L3/502715 ,  B01L3/50273 ,  B01L3/502761 ,  B01L2200/0663 ,  B01L2300/0816 ,  B01L2300/0896 ,  B01L2400/0421 ,  B01L2400/0424 ,  B03C5/005 ,  B03C5/026 ,  B03C2201/26 ,  B81B2201/058 ,  B81B2203/0338 ,  B81C1/00246 ,  B81C2203/0742 ,  B82B1/001 ,  B82B3/0019 ,  B82Y15/00 ,  B82Y40/00 ,  C12Q1/6876 ,  G01N27/44713 ,  G01N27/44726 ,  G01N27/44791 ,  H01L31/02005 ,  H01L31/02019 ,  H01L31/107 ,  H01L31/165

Abstract: A system for molecular mapping includes a semiconductor substrate defining a reservoir to receive a sample of molecules and a nanofluidic channel in fluid communication with the reservoir. The system also includes a plurality of electrodes, in electrical communication with the nanofluidic channel, to electrophoretically trap the sample of molecules in the nanofluidic channel. At least one avalanche photodiode is fabricated in the semiconductor substrate and disposed within an optical near-field of the nanofluidic channel to detect fluorescence emission from at least one molecule in the sample of molecules.