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公开(公告)号：US20110200285A1
公开(公告)日：2011-08-18
申请号：US12809391
申请日：2008-12-19
Applicant: Arjen Boersma , Tatiana Johanna Judith Teerling , Theodorus Henricus Cornelus Panken , Lun Kai Cheng
Inventor： Arjen Boersma , Tatiana Johanna Judith Teerling , Theodorus Henricus Cornelus Panken , Lun Kai Cheng
CPC classification number: G01N21/774
Abstract: The invention relates to a waveguide, comprising a grating in at least a part of the waveguide, which waveguide comprises a coating, the coating comprising a polymer, which polymer comprises an aliphatic chain, which aliphatic chain is provided with hydrophilic side-chains. The invention further relates to a sensor system comprising a waveguide according to any one of the preceding claims, a light source, and a photo-detector.
Abstract translation: 本发明涉及一种在波导的至少一部分中包括光栅的波导，该波导包括涂层，该涂层包含聚合物，该聚合物包含脂族链，该脂肪链具有亲水侧链。 本发明还涉及一种包括根据前述权利要求中任一项所述的波导，光源和光电检测器的传感器系统。
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公开(公告)号：US07061609B2
公开(公告)日：2006-06-13
申请号：US10275119
申请日：2001-05-01
Applicant: Lun Kai Cheng
Inventor： Lun Kai Cheng
IPC: G01J3/28
CPC classification number: G01J3/02 , G01J3/0208 , G01J3/0264 , G01J3/0294 , G01J3/14 , G01J3/2803 , G01J9/00 , G01J2003/2866
Abstract: An optical wavelength analyser including: an entrance slit (4) for receiving a light beam (3) including signals with various wavelengths and passing the beam at least partly; a diffractor (6, 7, 9) for receiving the passed beam and diffracting the signals dependent on their wavelength; a detector (8) including adjacent detector elements (32, 33, 35, 36, 38, 39) for receiving the diffracted signals and generating their output signals; a processor (21) for determining the wavelengths from the output signals, in which the received light beam has a spatially uniform intensity; the diffractor diffracts each signal on a different detector element subset, consisting of at least a first element (32, 33, 35, 36, 38, 39.) for receiving at least a first signal with a first signal level; the processor determines each signal's wavelength dependent on the first signal level and a calibration value.
Abstract translation: 一种光波长分析仪，包括：入射狭缝（4），用于接收包括具有各种波长的信号并且至少部分地通过所述光束的光束（3） 用于接收经过的光束并根据其波长衍射信号的衍射器（6,7,9）; 包括用于接收衍射信号并产生其输出信号的相邻检测器元件（32,33,35,36,38,39）的检测器（8）; 用于根据所述输出信号确定所述波长的处理器（21），其中所接收的光束具有空间上均匀的强度; 所述衍射器衍射不同的检测器元件子集上的每个信号，所述子集由至少第一元件（32,33,35,36,38,39）组成，用于至少接收具有第一信号电平的第一信号; 处理器根据第一信号电平和校准值确定每个信号的波长。
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3.发明授权
公开(公告)号：US6122225A
公开(公告)日：2000-09-19
申请号：US319576
申请日：1999-07-30
Applicant: Lun Kai Cheng , Dick Bruijn
Inventor： Lun Kai Cheng , Dick Bruijn
Abstract: Device (20) for measuring pressure waves in a liquid medium (E), comprising; one or more sensor elements (23) permeable to optical radiation; one or more support members (22) on which a sensor element (23) is arranged in each case and which is at least slightly flexible; a chamber (25) at least partly enclosed by a support member (22) and filled with the liquid medium; and a second compensation chamber (27) which is actively coupled to the first compensation chamber via an at least partially flexible wall (26), wherein the second compensation chamber is filled with gas; and detection means for detecting changes in the length of the sensor element.
Abstract translation: PCT No.PCT / NL97 / 00680 Sec。 371日期1999年7月30日第 102（e）1999年7月30日PCT 1997年12月9日PCT公布。 第WO98 / 26259号公报 日期1998年6月18日用于测量液体介质（E）中的压力波的装置（20），包括： 一个或多个可透光的传感器元件（23）; 一个或多个支撑构件（22），每个支撑构件（22）在其上布置有传感器元件（23），并且至少稍微柔性; 至少部分地由支撑构件（22）包围并填充有液体介质的室（25）; 以及第二补偿室（27），其经由至少部分柔性壁（26）主动地联接到所述第一补偿室，其中所述第二补偿室充满气体; 以及用于检测传感器元件的长度变化的检测装置。
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4.发明授权Karman vortex flowmeter assembly comprising a fiber bragg grating sensor and method to measure a fluid flow rate 有权卡曼涡街流量计组件包括光纤布拉格光栅传感器和测量流体流速的方法公开(公告)号：US08234931B2
公开(公告)日：2012-08-07
申请号：US12520511
申请日：2007-12-18
Applicant: Lun Kai Cheng , Marinus Carolus Adrianus Maria Peters , Wouter Schiferli
IPC: G01F1/32
CPC classification number: G01F1/3218 , G01F1/3263 , G01F15/022
Abstract: An assembly comprising a fluid channel and a flowmeter, the flowmeter (1) comprising at least one vortex shedder (2) extending in the channel (C), each vortex shedder (2) being configured to generate Karman vortices (V) in fluid flowing through the channel (C) during operation, wherein each vortex shedder (2) is provided with a first fiber Bragg grating (FBG) of a fiber Bragg grating sensor (3, 7, FBG), wherein a Karman vortex frequency (fe) of the vortices (V) generated by the vortex shedder (2) is detectable utilizing a fiber Bragg grating (FBG) sensor signal relating to the respective first fiber Bragg grating (FBG) of that vortex shedder (2).
Abstract translation: 一种包括流体通道和流量计的组件，所述流量计（1）包括在所述通道（C）中延伸的至少一个涡流开口（2），每个涡流脱落器（2）构造成产生流体流动的卡尔曼涡流（V） 在操作期间通过通道（C），其中每个涡流脱落器（2）设置有光纤布拉格光栅传感器（3,7，FBG）的第一光纤布拉格光栅（FBG），其中卡曼涡流频率（fe） 使用与该涡流发生器（2）的各自的第一光纤布拉格光栅（FBG）相关的光纤布拉格光栅（FBG）传感器信号可以检测由涡流发生器（2）产生的涡流（V）。
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5.发明申请Karman Vortex Flowmeter Assembly Comprising A Fiber Bragg Grating Sensor And Method To Measure A Fluid Flow Rate 有权Karman涡街流量计组件包括光纤布拉格光栅传感器和测量流体流速的方法公开(公告)号：US20100018323A1
公开(公告)日：2010-01-28
申请号：US12520511
申请日：2007-12-18
Applicant: Lun Kai Cheng , Marinus Carolus Adrianus Maria Peters , Wouter Schiferli
IPC: G01F1/32
CPC classification number: G01F1/3218 , G01F1/3263 , G01F15/022
Abstract: An assembly comprising a fluid channel and a flowmeter, the flowmeter (1) comprising at least one vortex shedder (2) extending in the channel (C), each vortex shedder (2) being configured to generate Karman vortices (V) in fluid flowing through the channel (C) during operation, wherein each vortex shedder (2) is provided with a first fiber Bragg grating (FBG) of a fiber Bragg grating sensor (3, 7, FBG), wherein a Karman vortex frequency (fe) of the vortices (V) generated by the vortex shedder (2) is detectable utilizing a fiber Bragg grating (FBG) sensor signal relating to the respective first fiber Bragg grating (FBG) of that vortex shedder (2).
Abstract translation: 一种包括流体通道和流量计的组件，所述流量计（1）包括在所述通道（C）中延伸的至少一个涡流开口（2），每个涡流脱落器（2）构造成产生流体流动的卡尔曼涡流（V） 在操作期间通过通道（C），其中每个涡流脱落器（2）设置有光纤布拉格光栅传感器（3,7，FBG）的第一光纤布拉格光栅（FBG），其中卡曼涡流频率（fe） 使用与该涡流发生器（2）的各自的第一光纤布拉格光栅（FBG）相关的光纤布拉格光栅（FBG）传感器信号可以检测由涡流发生器（2）产生的涡流（V）。
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Patent Agency Ranking
公开(公告)号：US20080309915A1
公开(公告)日：2008-12-18
申请号：US12188606
申请日：2008-08-08
Applicant: Nicolaas Antonius Allegondus Johannes Van Asten , Oana Cristina Balan , Luberthus Ouwehand , Machiel Jacobus Johannes Viguurs , Alexander Charles Franciscus Anna Van Well , Lun Kai Cheng , Huibert Blokland , Elke Van Loenhout , Hans Baltus Bakker
Inventor： Nicolaas Antonius Allegondus Johannes Van Asten , Oana Cristina Balan , Luberthus Ouwehand , Machiel Jacobus Johannes Viguurs , Alexander Charles Franciscus Anna Van Well , Lun Kai Cheng , Huibert Blokland , Elke Van Loenhout , Hans Baltus Bakker
IPC: G01C3/08
CPC classification number: G03F9/7049 , G01B11/0625 , G03F9/7034 , G03F9/7088
Abstract: The invention relates to a level sensor for determining a height of a substrate. The level sensor generates one or more measurement beam and directs the measurement beam to a measurement spot on the substrate and produces a reflected measurement beam. The level sensor also generates one or more reference beams. A detector detects both the reflected measurement beam and the reference beam, respectively, and produces a measurement signal and a reference signal, respectively, the measurement signal being indicative for the height at the measurement spot. A processor that receives these signals and corrects the measurement signal based on the reference signal. The level sensor has an optical arrangement in a predetermined area close to where the substrate is to be located. The measurement beam and the reference beam propagate along substantially equal optical paths of propagation in the predetermined area. The optical arrangement deviates the reference beam from the substantially equal optical paths of propagation in the predetermined area such that the at least one reference beam does not hit the substrate.
Abstract translation: 本发明涉及一种用于确定基板高度的液位传感器。 液位传感器产生一个或多个测量光束，并将测量光束引导到衬底上的测量点，并产生反射的测量光束。 液位传感器还产生一个或多个参考光束。 检测器分别检测反射的测量光束和参考光束，分别产生测量信号和参考信号，测量信号表示测量点处的高度。 接收这些信号并根据参考信号校正测量信号的处理器。 液位传感器在靠近基板的位置的预定区域具有光学布置。 测量光束和参考光束沿预定区域中基本相等的传播光路传播。 光学布置将参考光束从预定区域中的基本上相等的传播光路径偏离，使得至少一个参考光束不会撞击基板。
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公开(公告)号：US08831388B2
公开(公告)日：2014-09-09
申请号：US12809391
申请日：2008-12-19
Applicant: Arjen Boersma , Tatiana Johanna Judith Teerling , Theodorus Henricus Cornelus Panken , Lun Kai Cheng
Inventor： Arjen Boersma , Tatiana Johanna Judith Teerling , Theodorus Henricus Cornelus Panken , Lun Kai Cheng
CPC classification number: G01N21/774
Abstract: The invention relates to a waveguide, comprising a grating in at least a part of the waveguide, which waveguide comprises a coating, the coating comprising a polymer, which polymer comprises an aliphatic chain, which aliphatic chain is provided with hydrophilic side-chains. The invention further relates to a sensor system comprising a waveguide according to any one of the preceding claims, a light source, and a photo-detector.
Abstract translation: 本发明涉及一种在波导的至少一部分中包括光栅的波导，该波导包括涂层，该涂层包含聚合物，该聚合物包含脂族链，该脂肪链具有亲水侧链。 本发明还涉及一种包括根据前述权利要求中任一项所述的波导，光源和光电检测器的传感器系统。
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公开(公告)号：US07411667B2
公开(公告)日：2008-08-12
申请号：US11252254
申请日：2005-10-18
Applicant: Nicolaas Antonius Allegondus Johannes Van Asten , Oana Cristina Balan , Luberthus Ouwehand , Machiel Jacobus Johannes Viguurs , Alexander Charles Franciscus Anna Van Well , Lun Kai Cheng , Huibert Blokland , Elke Van Loenhout , Hans Baltus Bakker
Inventor： Nicolaas Antonius Allegondus Johannes Van Asten , Oana Cristina Balan , Luberthus Ouwehand , Machiel Jacobus Johannes Viguurs , Alexander Charles Franciscus Anna Van Well , Lun Kai Cheng , Huibert Blokland , Elke Van Loenhout , Hans Baltus Bakker
CPC classification number: G03F9/7049 , G01B11/0625 , G03F9/7034 , G03F9/7088
Abstract: The invention relates to a level sensor for determining a height of a substrate. The level sensor generates one or more measurement beam and directs the measurement beam to a measurement spot on the substrate and produces a reflected measurement beam. The level sensor also generates one or more reference beams. A detector detects both the reflected measurement beam and the reference beam, respectively, and produces a measurement signal and a reference signal, respectively, the measurement signal being indicative for the height at the measurement spot. A processor that receives these signals and corrects the measurement signal based on the reference signal. The level sensor has an optical arrangement in a predetermined area close to where the substrate is to be located. The measurement beam and the reference beam propagate along substantially equal optical paths of propagation in the predetermined area. The optical arrangement deviates the reference beam from the substantially equal optical paths of propagation in the predetermined area such that the at least one reference beam does not hit the substrate.
Abstract translation: 本发明涉及一种用于确定基板高度的液位传感器。 液位传感器产生一个或多个测量光束，并将测量光束引导到衬底上的测量点，并产生反射的测量光束。 液位传感器还产生一个或多个参考光束。 检测器分别检测反射的测量光束和参考光束，分别产生测量信号和参考信号，测量信号指示测量点处的高度。 接收这些信号并根据参考信号校正测量信号的处理器。 液位传感器在靠近基板的位置的预定区域具有光学布置。 测量光束和参考光束沿预定区域中基本相等的传播光路传播。 光学布置将参考光束从预定区域中的基本上相等的传播光路径偏离，使得至少一个参考光束不会撞击基板。
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公开(公告)号：US09170366B2
公开(公告)日：2015-10-27
申请号：US13141674
申请日：2009-12-22
Applicant: Arjen Boersma , Theodorus Henricus Cornelus Panken , Lun Kai Cheng
Inventor： Arjen Boersma , Theodorus Henricus Cornelus Panken , Lun Kai Cheng
CPC classification number: G02B6/02 , G01D5/268 , G01N21/774 , G01N2021/7723 , G02B6/02104 , G02B6/0229
Abstract: The invention relates to a sensor system comprising a waveguide, which waveguide comprises a grating in at least a part of the waveguide, which waveguide further comprises a coating, the coating comprising a polymer, which polymer comprises a chain, in which chain are present an aromatic group and a chemical group selected from the group of sulfonyl groups, carbonyl groups, carbonate groups, fluorocarbon groups, siloxane groups, pyridine groups and amide groups.
Abstract translation: 本发明涉及一种包括波导的传感器系统，该波导在波导的至少一部分中包括光栅，该波导还包括涂层，该涂层包含聚合物，该聚合物包含链，链中存在链 芳基和选自磺酰基，羰基，碳酸酯基，碳氟基，硅氧烷基，吡啶基和酰胺基的化学基团。
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公开(公告)号：US07751059B2
公开(公告)日：2010-07-06
申请号：US11446563
申请日：2006-06-05
Applicant: Nicolaas Antonius Allegondus Johannes Van Asten , Oana Cristina Balan , Luberthus Ouwehand , Machiel Jacobus Johannes Viguurs , Alexander Charles Franciscus Anna Van Well , Lun Kai Cheng , Huibert Blokland , Elke Van Loenhout , Hans Baltus Bakker
Inventor： Nicolaas Antonius Allegondus Johannes Van Asten , Oana Cristina Balan , Luberthus Ouwehand , Machiel Jacobus Johannes Viguurs , Alexander Charles Franciscus Anna Van Well , Lun Kai Cheng , Huibert Blokland , Elke Van Loenhout , Hans Baltus Bakker
IPC: G01B11/02
CPC classification number: G03F9/7049 , G01B11/0625 , G03F9/7034 , G03F9/7088
Abstract: A level sensor for determining a height of a substrate. In one configuration, the level sensor forms part of a lithographic apparatus that includes a projection lens system. The level sensor generates one or more measurement beams and directs the measurement beam to a measurement spot on a substrate having a first reflecting surface, and produces a reflected measurement beam. The level sensor also generates one or more reference beams. A detector detects both the reflected measurement beam and the reference beam, respectively, and produces a measurement signal and a reference signal, respectively, the measurement signal being indicative for the height at the measurement spot. A processor that receives these signals and corrects the measurement signal based on the reference signal. In one configuration, the level sensor has an optical element arranged to direct the reference beam towards a detection branch via an optical reference path arranged to be insensitive to the position of the projection lens system and the first reflecting surface. In one configuration, the level sensor is configured to direct the measurement beam and reference beam along optical paths that are at least partially substantially equal in at least one of the reference branch and the projection branch.
Abstract translation: 一种用于确定基板的高度的液位传感器。 在一种配置中，液位传感器构成包括投影透镜系统的光刻设备的一部分。 液位传感器产生一个或多个测量光束并将测量光束引导到具有第一反射表面的衬底上的测量点，并产生反射的测量光束。 液位传感器还产生一个或多个参考光束。 检测器分别检测反射的测量光束和参考光束，分别产生测量信号和参考信号，测量信号指示测量点处的高度。 接收这些信号并根据参考信号校正测量信号的处理器。 在一种配置中，液位传感器具有光学元件，其布置成经由布置成对投影透镜系统和第一反射表面的位置不敏感的光学参考路径将参考光束引向检测支路。 在一种配置中，水平传感器被配置成沿着在至少一个参考分支和投影分支中至少部分地相等的光路引导测量光束和参考光束。
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