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公开(公告)号:US10768349B2
公开(公告)日:2020-09-08
申请号:US15638981
申请日:2017-06-30
Applicant: Lumentum Operations LLC
Inventor: John Michael Miller , Hery Djie , Patrick Lu , Xiaowei Guo , Qinghong Du , Eddie Chiu , Chester Murley
Abstract: A reflective diffraction grating and a fabrication method are provided. The reflective diffraction grating includes a substrate, a UV-absorbing layer, a grating layer having a binary surface-relief pattern formed therein, and a conforming reflective layer. Advantageously, the UV-absorbing layer absorbs light at a UV recording wavelength to minimize reflection thereof by the substrate during holographic patterning at the UV recording wavelength.
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公开(公告)号:US09720147B2
公开(公告)日:2017-08-01
申请号:US14229399
申请日:2014-03-28
Applicant: Lumentum Operations LLC
Inventor: John Michael Miller , Hery Djie , Patrick Lu , Xiaowei Guo , Qinghong Du , Eddie Chiu , Chester Murley
CPC classification number: G02B5/1861 , B29D11/00769 , G02B1/10 , G02B5/1814 , G02B5/1857 , G02B5/208 , G03F7/001
Abstract: A reflective diffraction grating and a fabrication method are provided. The reflective diffraction grating includes a substrate, a UV-absorbing layer, a grating layer having a binary surface-relief pattern formed therein, and a conforming reflective layer. Advantageously, the UV-absorbing layer absorbs light at a UV recording wavelength to minimize reflection thereof by the substrate during holographic patterning at the UV recording wavelength.
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