公开(公告)号：US06933240B2

公开(公告)日：2005-08-23

申请号：US10462512

申请日：2003-06-16

申请人： Laura Lazar ,  Matthias Kronke

发明人： Laura Lazar ,  Matthias Kronke

IPC分类号： H01L21/033 ,  H01L21/3065 ,  H01L21/60 ,  H01L21/302

CPC分类号： H01L21/76897 ,  H01L21/0332 ,  H01L21/0337 ,  H01L21/0338 ,  H01L21/3065

摘要： A hard mask made from polysilicon is used to etch a layer to be patterned. The hard mask is patterned using a resist mask. The etching of the hard mask is carried out in such a way that the openings which are etched into the hard mask have inclined sidewalls. This reduces the cross section of the openings, with the result that smaller openings can be formed in the layer that is to be patterned than the openings which have been predetermined by the resist mask. The hard mask is etched using only HBr. The inclination of the openings etched into the hard mask can be set by way of the TCP power and/or the bias power of a TCP etching chamber, and/or by way of the HBr flow rate.

摘要翻译： 使用由多晶硅制成的硬掩模来蚀刻待图案化的层。 使用抗蚀剂掩模对硬掩模进行图案化。 硬掩模的蚀刻以使蚀刻到硬掩模中的开口具有倾斜侧壁的方式进行。 这减小了开口的横截面，从而可以在要被图案化的层中形成比通过抗蚀剂掩模预定的开口更小的开口。 硬掩模仅使用HBr进行刻蚀。 蚀刻到硬掩模中的开口的倾斜度可以通过TCP蚀刻室的TCP功率和/或偏置功率和/​​或通过HBr流量来设定。

公开(公告)号：US20070218629A1

公开(公告)日：2007-09-20

申请号：US11375590

申请日：2006-03-15

申请人： Matthias Kronke ,  Detlef Weber

发明人： Matthias Kronke ,  Detlef Weber

IPC分类号： H01L21/336

CPC分类号： H01L27/10858 ,  H01L27/10897

摘要： Method of fabricating an integrated memory device including the steps of providing a semiconductor substrate, including an array region and a support region; providing GC-lines in said array region and in said support region, wherein the GC-lines in said support region have a first height; providing in the array region bit line contacts projecting above said GC-lines, wherein said bit line contacts have a second height being higher than said first height; providing a first isolation layer, the maximum height of said GC-lines in said support region including the coverage of said first isolation layer being lower than said second height; providing a second isolation layer on said first isolation layer; and polishing said first isolation layer and said second isolation layer, such that a planar surface of the integrated memory device is provided and such that said bit line contacts are exposed.

摘要翻译： 一种集成存储器件的制造方法，包括以下步骤：提供包括阵列区域和支撑区域的半导体衬底; 在所述阵列区域和所述支撑区域中提供GC线，其中所述支撑区域中的GC线具有第一高度; 提供在所述GC线上方突出的阵列区位线触点，其中所述位线触点具有高于所述第一高度的第二高度; 提供第一隔离层，所述支撑区域中所述GC线的最大高度包括所述第一隔离层的覆盖范围低于所述第二高度; 在所述第一隔离层上提供第二隔离层; 并且抛光所述第一隔离层和所述第二隔离层，使得提供所述集成存储器件的平坦表面，并使所述位线触点露出。

公开(公告)号：US20050176239A1

公开(公告)日：2005-08-11

申请号：US11033471

申请日：2005-01-12

申请人： Matthias Kronke ,  Joachim Patzer

发明人： Matthias Kronke ,  Joachim Patzer

IPC分类号： H01L21/283 ,  H01L21/3205 ,  H01L21/44 ,  H01L21/4763 ,  H01L21/768

CPC分类号： H01L21/7684 ,  H01L21/76838 ,  H01L21/76843 ,  H01L21/76855 ,  H01L21/76858

摘要： The invention provides a method for fabricating contact-making connections, having the steps of: a) providing a substrate (101) with electronic circuit units (102a, 102b) arranged thereon, an intermediate layer (103) filling an interspace between the electronic circuit units (102a, 102b); an insulation layer (104) being deposited on the electronic circuit units (102a, 102b) and on the intermediate layer (103); a masking layer (105) being deposited on the insulation layer (104); and the masking layer (105) being patterned with a through-plating structure (106); b) patterning a contact-making region by means of the masking layer (105), a contact-making hole (112) being etched through the insulation layer (104) and the intermediate layer (103) as far as the substrate (101), a section of the substrate (101) being uncovered in accordance with the through-plating structure (106); c) filling the contact-making hole (112) with a through-plating material (108); d) polishing back the covering layer (107) deposited on the masking layer (105) as far as the masking layer (105); e) depositing a contact-making layer (109) on the masking layer (105) and the through-plating material, the contact-making layer (109) being electrically contact-connected with the through-plating material (108); and f) patterning the contact-making layer (109) together with the residual masking layer (105) in accordance with a structure of a contact-making layer mask (111) applied to the contact-making layer (109) in order to form interconnects as contact-making connections in a metallization plane (M).

摘要翻译： 本发明提供了一种用于制造接触连接的方法，具有以下步骤：a）提供具有布置在其上的电子电路单元（102a，102b）的基板（101），填充中间层 电子电路单元（102a，102b）; 绝缘层（104）沉积在电子电路单元（102a，102b）上和中间层（103）上; 掩蔽层（105）沉积在绝缘层（104）上; 并且所述掩模层（105）用通孔结构（106）图案化; b）通过掩模层（105）图形化接触制造区域，通过绝缘层（104）和中间层（103）蚀刻到基底（101）的接触制造孔（112） 基板（101）的一部分根据贯通电镀结构（106）未覆盖; c）用穿孔材料（108）填充接触孔（112）; d）将沉积在掩蔽层（105）上的覆盖层（107）抛光至掩蔽层（105）; e）在所述掩蔽层（105）和所述通镀材料上沉积接触层（109），所述接触层（109）与所述通镀材料（108）电接触连接; 以及f）根据施加到接触层（109）的接触层掩模（111）的结构，使接触形成层（109）与残留掩模层（105）一起构图，以形成 作为金属化平面（M）中的接触连接。

公开(公告)号：US20060148227A1

公开(公告)日：2006-07-06

申请号：US11115385

申请日：2005-04-27

申请人： Matthias Kronke ,  Joachim Patzer ,  Werner Graf

发明人： Matthias Kronke ,  Joachim Patzer ,  Werner Graf

IPC分类号： H01L21/4763

CPC分类号： H01L21/76897 ,  H01L21/76802 ,  H01L21/76831 ,  H01L27/10888 ,  H01L27/10894

摘要： A silicon dioxide layer is formed and a mask layer is deposited and then patterned to produce openings in the mask layer in the region around the gate contacts onto the gate electrode tracks in the logic region. The surface is uncovered around the gate contacts to the gate electrode tracks in the logic region, reducing the silicon dioxide layer. A sacrificial layer covering the gate electrode tracks is formed and patterned to form sacrificial layer blocks above the contact openings for the bit line contacts between the mutually adjacent gate electrode tracks in the cell array region and above the contact openings for the substrate contacts to the semiconductor surface and the gate contacts onto the gate electrode tracks in the logic region. A filling layer is formed between the sacrificial layer blocks, and the sacrificial layer blocks are removed. The contact opening regions are filled with conductive material.

摘要翻译： 形成二氧化硅层，并且沉积掩模层，然后图案化以在栅极接触周围的区域中的掩模层中产生在逻辑区域中的栅电极轨道上的开口。 围绕逻辑区域中的栅极电极的栅极触点周围没有表面，减少了二氧化硅层。 覆盖栅极电极轨迹的牺牲层被形成并图案化以在接触开口上方形成用于电池阵列区域中相互相邻的栅极电极轨道之间的位线接触和用于衬底接触半导体的接触开口之上的位线接触的牺牲层块 表面，并且栅极接触逻辑区域中的栅极电极轨迹。 在牺牲层块之间形成填充层，去除牺牲层块。 接触开口区域填充有导电材料。