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1.发明公开公开(公告)号：US20230245853A1
公开(公告)日：2023-08-03
申请号：US18174585
申请日：2023-02-24
发明人： Eller Y. Juco , Karl Frederick Leeser , David French , Sunil Kapoor , Aaron Bingham , David Alan Metz , Brett Herzig , Jacob L. Hiester , Brian Knight
IPC分类号： H01J37/32 , H01L21/687
CPC分类号： H01J37/32091 , H01L21/68785 , H01J37/32183 , H01J37/321
摘要： A circuit tuning radio frequency (RF) power. The circuit includes a low to mid frequency (LF/HF) tuning circuit including a variable LF/MF capacitor coupled in series with an LF/MF inductor. The LF/MF tuning circuit is coupled between ground and a common node configured to receive an RF input. The circuit includes a high frequency (HF) tuning circuit coupled in parallel to the LF/MF tuning circuit between ground and the common node. The HF tuning circuit includes a variable HF capacitor coupled in series with an HF inductor. Cross parallel isolation occurs between the LF/MF inductor of the LF/MF tuning circuit and the HF inductor of the HF tuning circuit when adjusting the variable LF/MF capacitor or variable HF capacitor.
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公开(公告)号：US10991550B2
公开(公告)日：2021-04-27
申请号：US16121408
申请日：2018-09-04
发明人： Eller Y. Juco , Karl Frederick Leeser , David French , Sunil Kapoor , Aaron Bingham , David Alan Metz , Brett Herzig , Jacob L. Hiester , Brian Knight
IPC分类号： H01J37/32 , H01L21/687
摘要： A circuit tuning radio frequency (RF) power. The circuit includes a low to mid frequency (LF/HF) tuning circuit including a variable LF/MF capacitor coupled in series with an LF/MF inductor. The LF/MF tuning circuit is coupled between ground and a common node configured to receive an RF input. The circuit includes a high frequency (HF) tuning circuit coupled in parallel to the LF/MF tuning circuit between ground and the common node. The HF tuning circuit includes a variable HF capacitor coupled in series with an HF inductor. Cross parallel isolation occurs between the LF/MF inductor of the LF/MF tuning circuit and the HF inductor of the HF tuning circuit when adjusting the variable LF/MF capacitor or variable HF capacitor.
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公开(公告)号：US11594397B2
公开(公告)日：2023-02-28
申请号：US17204876
申请日：2021-03-17
发明人： Eller Y. Juco , Karl Frederick Leeser , David French , Sunil Kapoor , Aaron Bingham , David Alan Metz , Brett Herzig , Jacob L. Hiester , Brian Knight
IPC分类号： H01J37/32 , H01L21/687
摘要： A circuit tuning radio frequency (RF) power. The circuit includes a low to mid frequency (LF/HF) tuning circuit including a variable LF/MF capacitor coupled in series with an LF/MF inductor. The LF/MF tuning circuit is coupled between ground and a common node configured to receive an RF input. The circuit includes a high frequency (HF) tuning circuit coupled in parallel to the LF/MF tuning circuit between ground and the common node. The HF tuning circuit includes a variable HF capacitor coupled in series with an HF inductor. Cross parallel isolation occurs between the LF/MF inductor of the LF/MF tuning circuit and the HF inductor of the HF tuning circuit when adjusting the variable LF/MF capacitor or variable HF capacitor.
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公开(公告)号：US20210202208A1
公开(公告)日：2021-07-01
申请号：US17204876
申请日：2021-03-17
发明人： Eller Y. Juco , Karl Frederick Leeser , David French , Sunil Kapoor , Aaron Bingham , David Alan Metz , Brett Herzig , Jacob L. Hiester , Brian Knight
IPC分类号： H01J37/32 , H01L21/687
摘要： A circuit tuning radio frequency (RF) power. The circuit includes a low to mid frequency (LF/HF) tuning circuit including a variable LF/MF capacitor coupled in series with an LF/MF inductor. The LF/MF tuning circuit is coupled between ground and a common node configured to receive an RF input. The circuit includes a high frequency (HF) tuning circuit coupled in parallel to the LF/MF tuning circuit between ground and the common node. The HF tuning circuit includes a variable HF capacitor coupled in series with an HF inductor. Cross parallel isolation occurs between the LF/MF inductor of the LF/MF tuning circuit and the HF inductor of the HF tuning circuit when adjusting the variable LF/MF capacitor or variable HF capacitor.
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5.发明申请公开(公告)号：US20200075289A1
公开(公告)日：2020-03-05
申请号：US16121408
申请日：2018-09-04
发明人： Eller Y. Juco , Karl Frederick Leeser , David French , Sunil Kapoor , Aaron Bingham , David Alan Metz , Brett Herzig , Jacob L. Hiester , Brian Knight
IPC分类号： H01J37/32 , H01L21/687
摘要： A circuit tuning radio frequency (RF) power. The circuit includes a low to mid frequency (LF/HF) tuning circuit including a variable LF/MF capacitor coupled in series with an LF/MF inductor. The LF/MF tuning circuit is coupled between ground and a common node configured to receive an RF input. The circuit includes a high frequency (HF) tuning circuit coupled in parallel to the LF/MF tuning circuit between ground and the common node. The HF tuning circuit includes a variable HF capacitor coupled in series with an HF inductor. Cross parallel isolation occurs between the LF/MF inductor of the LF/MF tuning circuit and the HF inductor of the HF tuning circuit when adjusting the variable LF/MF capacitor or variable HF capacitor.
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