Roll to roll fabrication apparatus for preventing thermal impact

    公开(公告)号:US11008656B2

    公开(公告)日:2021-05-18

    申请号:US15812767

    申请日:2017-11-14

    摘要: A roll to roll fabrication apparatus includes: a vacuum chamber having an installation chamber and a process chamber; a preprocessing unit in the installation chamber to process a surface of a film which is transferred to enhance a film characteristic in a subsequent CVD process; a process drum in the process chamber to wind the film thereon; a process treatment unit in the process chamber to form a layer by performing a CVD process on the film wound on the process drum; and a plurality of heaters in the installation chamber and the process chamber to gradually increase a temperature of the film wound on the process drum to prevent application of a thermal impact to the film due to the high-temperature process drum.

    Organic light emitting display device and manufacturing method thereof

    公开(公告)号:US10686147B2

    公开(公告)日:2020-06-16

    申请号:US15703806

    申请日:2017-09-13

    IPC分类号: H01L51/00 H01L51/56 H01L27/32

    摘要: A method for manufacturing an organic light emitting display device includes forming a substrate insulating film an upper surface, a lower surface, and at least one of two side surfaces of a substrate and forming an organic light emitting diode (OLED) on the substrate on which the substrate insulating film is formed. An organic light emitting display device includes a substrate having a first surface, a second surface opposite to the first surface, and side surfaces that extend between the first surface and the second surface, a substrate insulating film disposed on the first surface, the second surface, and at least one of the side surfaces of the substrate, and an OLED disposed on one of the first surface or the second surface of the substrate including the substrate insulating film.