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公开(公告)号：US20230279548A1
公开(公告)日：2023-09-07
申请号：US18196605
申请日：2023-05-12
发明人： Ramesh CHANDRASEKHARAN , Antonio Xavier , Frank Loren Pasquale , Ryan Blaquiere , Jennifer Leigh Petraglia , Meenakshi Mamunuru
IPC分类号： C23C16/455 , H01L21/67 , H01J37/32 , C23C16/44
CPC分类号： C23C16/45565 , C23C16/45561 , H01L21/67017 , H01J37/3244 , C23C16/4404
摘要： A gas delivery system includes a 2-port valve including a first valve located between a first port and a second port. A 4-port valve includes a first node connected to a first port and a second port. A bypass path is located between the third port and the fourth port. A second node is located along the bypass path. A second valve is located between the first node and the second node. A manifold block defines gas flow channels configured to connect the first port of the 4-port valve to a first inlet, configured to connect the second port of the 4-port valve to the first port of the 2-port valve, the third port of the 4-port valve to a second inlet, the second port of the 2-port valve to a first outlet, and the fourth port of the 4-port valve to a second outlet.
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公开(公告)号：US11661654B2
公开(公告)日：2023-05-30
申请号：US15956296
申请日：2018-04-18
发明人： Ramesh Chandrasekharan , Antonio Xavier , Frank Loren Pasquale , Ryan Blaquiere , Jennifer Leigh Petraglia , Meenakshi Mamunuru
IPC分类号： C23C16/40 , C23C16/455 , H01L21/67 , H01J37/32 , C23C16/44
CPC分类号： C23C16/45565 , C23C16/4404 , C23C16/45561 , H01J37/3244 , H01L21/67017
摘要： A gas delivery system includes a 2-port valve including a first valve located between a first port and a second port. A 4-port valve includes a first node connected to a first port and a second port. A bypass path is located between the third port and the fourth port. A second node is located along the bypass path. A second valve is located between the first node and the second node. A manifold block defines gas flow channels configured to connect the first port of the 4-port valve to a first inlet, configured to connect the second port of the 4-port valve to the first port of the 2-port valve, the third port of the 4-port valve to a second inlet, the second port of the 2-port valve to a first outlet, and the fourth port of the 4-port valve to a second outlet.
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公开(公告)号：US11959172B2
公开(公告)日：2024-04-16
申请号：US18196605
申请日：2023-05-12
发明人： Ramesh Chandrasekharan , Antonio Xavier , Frank Loren Pasquale , Ryan Blaquiere , Jennifer Leigh Petraglia , Meenakshi Mamunuru
IPC分类号： C23C16/40 , C23C16/44 , C23C16/455 , H01J37/32 , H01L21/67
CPC分类号： C23C16/45565 , C23C16/4404 , C23C16/45561 , H01J37/3244 , H01L21/67017
摘要： A gas delivery system includes a 2-port valve including a first valve located between a first port and a second port. A 4-port valve includes a first node connected to a first port and a second port. A bypass path is located between the third port and the fourth port. A second node is located along the bypass path. A second valve is located between the first node and the second node. A manifold block defines gas flow channels configured to connect the first port of the 4-port valve to a first inlet, configured to connect the second port of the 4-port valve to the first port of the 2-port valve, the third port of the 4-port valve to a second inlet, the second port of the 2-port valve to a first outlet, and the fourth port of the 4-port valve to a second outlet.
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公开(公告)号：US20190323125A1
公开(公告)日：2019-10-24
申请号：US15956296
申请日：2018-04-18
发明人： Ramesh Chandrasekharan , Antonio Xavier , Frank Loren Pasquale , Ryan Blaquiere , Jennifer Leigh Petraglia , Meenakshi Mamunuru
IPC分类号： C23C16/455 , C23C16/44 , H01J37/32 , H01L21/67
摘要： A gas delivery system includes a 2-port valve including a first valve located between a first port and a second port. A 4-port valve includes a first node connected to a first port and a second port. A bypass path is located between the third port and the fourth port. A second node is located along the bypass path. A second valve is located between the first node and the second node. A manifold block defines gas flow channels configured to connect the first port of the 4-port valve to a first inlet, configured to connect the second port of the 4-port valve to the first port of the 2-port valve, the third port of the 4-port valve to a second inlet, the second port of the 2-port valve to a first outlet, and the fourth port of the 4-port valve to a second outlet.
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