公开(公告)号：US20130092511A1

公开(公告)日：2013-04-18

申请号：US13276066

申请日：2011-10-18

申请人： Kuo-Chung Liu ,  Chih-Chung Lee ,  Peng-Sheng Chien

发明人： Kuo-Chung Liu ,  Chih-Chung Lee ,  Peng-Sheng Chien

IPC分类号： B65G13/02 ,  B65G13/06

CPC分类号： H01L21/67706 ,  B65G13/02 ,  B65G21/209 ,  C03B35/163 ,  C03B35/181 ,  C03B35/185

摘要： A substrate transmission apparatus is provided. The substrate transmission apparatus includes two supporting stands, a transmission shaft having two end portions, a supporting shaft having two end portions, first rollers, and second rollers. Two end portions of the transmission shaft are respectively connected to the two supporting stands. Two end portions of the supporting shaft are respectively connected to the two supporting stands, and the supporting shaft is located above the transmission shaft. The first rollers are fixed at intervals on the transmission shaft and rotate with the transmission shaft to convey a substrate placed thereon. The second rollers are rotatably connected to the supporting shaft and are in contact with an upper surface of the substrate, such that the substrate is conveyed and sandwiched between the first rollers and the second rollers.

摘要翻译： 提供了一种基板传输装置。 基板传输装置包括两个支撑架，具有两个端部的传动轴，具有两个端部的支撑轴，第一辊和第二辊。 传动轴的两个端部分别连接到两个支撑架。 支撑轴的两个端部分别连接到两个支撑架上，并且支撑轴位于传动轴的上方。 第一辊在传动轴上间隔地固定，并与传动轴一起旋转，以传送其上放置的基板。 第二辊子可旋转地连接到支撑轴并且与衬底的上表面接触，使得衬底被输送并夹在第一辊和第二辊之间。

公开(公告)号：US20060022049A1

公开(公告)日：2006-02-02

申请号：US11148382

申请日：2005-06-09

申请人： Kuo-Chung Liu ,  Wen-Jui Tseng

发明人： Kuo-Chung Liu ,  Wen-Jui Tseng

IPC分类号： G06K7/10

CPC分类号： G03F7/70741 ,  G03F7/70541 ,  H01L21/67294

摘要： A mask management and bar code reading apparatus thereof are disclosed. The mask management method comprises providing a bar code reading apparatus, scanning a mask bar code on the mask by the bar code reading apparatus, transferring scanned information to a mask management system, producing a box bar code, moving the mask to a mask pod from a mask protective case, sticking the box bar code on the mask pod, inputting the data recorded in the box bar code into an exposure equipment, and exposing the mask by the exposure equipment. The bar code reading apparatus includes at least a clamping element to clamp the mask protective case, at least a reading head disposed on the clamping element to read a mask bar code, and a first light source providing a first light to irradiate the mask protective case to increase reading accuracy of the reading head.

摘要翻译： 公开了一种掩模管理和条形码阅读装置。 掩模管理方法包括提供条形码读取装置，通过条形码读取装置扫描掩码上的掩码条形码，将扫描的信息传送到掩模管理系统，产生箱式条形码，将掩模移动到掩模盒中 掩模保护盒，将盒子条形码粘贴在掩模盒上，将记录在盒子条形码中的数据输入到曝光设备中，并通过曝光设备曝光掩模。 条形码读取装置至少包括夹持掩模保护壳的夹持元件，至少设置在夹持元件上的读取头以读取掩模条形码的第一光源和提供第一光以照射掩模保护壳体的第一光源 以提高阅读头的阅读精度。

公开(公告)号：US07389930B2

公开(公告)日：2008-06-24

申请号：US11148382

申请日：2005-06-09

申请人： Kuo-Chung Liu ,  Wen-Jui Tseng

发明人： Kuo-Chung Liu ,  Wen-Jui Tseng

IPC分类号： G06K7/10

CPC分类号： G03F7/70741 ,  G03F7/70541 ,  H01L21/67294

摘要： A mask management and bar code reading apparatus thereof are disclosed. The mask management method comprises providing a bar code reading apparatus, scanning a mask bar code on the mask by the bar code reading apparatus, transferring scanned information to a mask management system, producing a box bar code, moving the mask to a mask pod from a mask protective case, sticking the box bar code on the mask pod, inputting the data recorded in the box bar code into an exposure equipment, and exposing the mask by the exposure equipment. The bar code reading apparatus includes at least a clamping element to clamp the mask protective case, at least a reading head disposed on the clamping element to read a mask bar code, and a first light source providing a first light to irradiate the mask protective case to increase reading accuracy of the reading head.

摘要翻译： 公开了一种掩模管理和条形码阅读装置。 掩模管理方法包括提供条形码读取装置，通过条形码读取装置扫描掩码上的掩码条形码，将扫描的信息传送到掩模管理系统，产生箱式条形码，将掩模移动到掩模盒中 掩模保护盒，将盒子条形码粘贴在掩模盒上，将记录在盒子条形码中的数据输入到曝光设备中，并通过曝光设备曝光掩模。 条形码读取装置至少包括夹持掩模保护壳的夹持元件，至少设置在夹持元件上的读取头以读取掩模条形码的第一光源和提供第一光以照射掩模保护壳体的第一光源 以提高阅读头的阅读精度。

公开(公告)号：US20070076196A1

公开(公告)日：2007-04-05

申请号：US11458986

申请日：2006-07-20

申请人： Kuo-Chung Liu ,  Tan-Cheng Chen ,  Ching-Sung Tai ,  Renn-Chung Chiu

发明人： Kuo-Chung Liu ,  Tan-Cheng Chen ,  Ching-Sung Tai ,  Renn-Chung Chiu

IPC分类号： G01N21/88

CPC分类号： G01N21/9501 ,  G01N21/8803 ,  G01N2201/062

摘要： A method for performing a visual inspection of a wafer is described. First, a visual inspection system for a wafer comprising at least a wafer carrying apparatus, a light source and a reflecting element is provided. The wafer carrying apparatus is used for carrying a wafer. The light source is disposed relative to the wafer carrying apparatus for illuminating the backside of the wafer. The reflecting element is disposed relative to the wafer carrying apparatus for receiving the reflection from the backside of the wafer. Then, a wafer is placed on the wafer carrying apparatus and the backside of the wafer is illuminated using the light source. Thereafter, the wafer surface and the backside of the wafer reflected to the reflecting element are inspected.

摘要翻译： 描述了一种用于执行晶片目视检查的方法。 首先，提供至少包括晶片承载装置，光源和反射元件的晶片的目视检查系统。 晶片承载装置用于承载晶片。 光源相对于用于照亮晶片背面的晶片承载装置设置。 反射元件相对于晶片承载装置设置，用于从晶片的背面接收反射。 然后，将晶片放置在晶片承载装置上，并且使用光源照射晶片的背面。 此后，检查晶片表面和反射到反射元件的晶片的背面。