公开(公告)号：US20130092511A1

公开(公告)日：2013-04-18

申请号：US13276066

申请日：2011-10-18

申请人： Kuo-Chung Liu ,  Chih-Chung Lee ,  Peng-Sheng Chien

发明人： Kuo-Chung Liu ,  Chih-Chung Lee ,  Peng-Sheng Chien

IPC分类号： B65G13/02 ,  B65G13/06

CPC分类号： H01L21/67706 ,  B65G13/02 ,  B65G21/209 ,  C03B35/163 ,  C03B35/181 ,  C03B35/185

摘要： A substrate transmission apparatus is provided. The substrate transmission apparatus includes two supporting stands, a transmission shaft having two end portions, a supporting shaft having two end portions, first rollers, and second rollers. Two end portions of the transmission shaft are respectively connected to the two supporting stands. Two end portions of the supporting shaft are respectively connected to the two supporting stands, and the supporting shaft is located above the transmission shaft. The first rollers are fixed at intervals on the transmission shaft and rotate with the transmission shaft to convey a substrate placed thereon. The second rollers are rotatably connected to the supporting shaft and are in contact with an upper surface of the substrate, such that the substrate is conveyed and sandwiched between the first rollers and the second rollers.

摘要翻译： 提供了一种基板传输装置。 基板传输装置包括两个支撑架，具有两个端部的传动轴，具有两个端部的支撑轴，第一辊和第二辊。 传动轴的两个端部分别连接到两个支撑架。 支撑轴的两个端部分别连接到两个支撑架上，并且支撑轴位于传动轴的上方。 第一辊在传动轴上间隔地固定，并与传动轴一起旋转，以传送其上放置的基板。 第二辊子可旋转地连接到支撑轴并且与衬底的上表面接触，使得衬底被输送并夹在第一辊和第二辊之间。