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公开(公告)号：US20240043338A1
公开(公告)日：2024-02-08
申请号：US18268879
申请日：2021-12-02
Inventor： Sung Min LEE , Yoon Suk OH , Hyeong Jun KIM , Gyusang OH
CPC classification number: C04B35/44 , C04B41/81 , C04B35/48 , C04B2235/963
Abstract: The present invention provides a plasma-resistant ceramic substrate including a bulk of an oxide composition; and a surface layer in which an oxide composition component constituting the bulk was modified to a composition including one or more anions selected from the group consisting of F− and Cl−, wherein the surface layer is a layer in which a raw material containing one or more anions selected from the group consisting of F− and Cl− is vaporized by heating and adsorbed on the surface of the ceramic substrate to be modified to a composition including one or more anions selected from the group consisting of F− and Cl−, and a method of manufacturing the same. According to the present invention, the plasma resistance and durability of the ceramic substrate can be improved at low cost.
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2.发明申请公开(公告)号：US20190161843A1
公开(公告)日：2019-05-30
申请号：US16200938
申请日：2018-11-27
Inventor： Seong Won KIM , Sung Min LEE , Yoon Suk OH , Hyung Tae KIM
Abstract: The present disclosure relates to a method for preparing a ceramic thermal barrier coating layer including (a) preparing a first suspension in which first oxide particles for thermal barrier coating are dispersed and a second suspension in which second oxide particles for thermal barrier coating are dispersed, respectively; (b) forming a first coating layer on a base material by suspension plasma spraying (SPS) using the first suspension; (c) forming a buffer layer on the first coating layer by the suspension plasma spraying using a mixed suspension of the first suspension and the second suspension; and (d) forming a second coating layer on the buffer layer by the suspension plasma spraying using the second suspension.
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