公开(公告)号：US11647338B2

公开(公告)日：2023-05-09

申请号：US17347415

申请日：2021-06-14

Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY ,  FRONICS INC.

Inventor： Keonjae Lee ,  Young Hoon Jung ,  Jae Hyun Han ,  Hee Seung Wang ,  Mingi Chung

IPC: H04R17/02 ,  H10N30/88 ,  H10N30/20 ,  H10N30/853 ,  H10N30/078 ,  H04R3/04 ,  H04R1/04 ,  H04R17/00 ,  H04R7/04 ,  H03F3/183 ,  H01L41/053 ,  H01L41/09 ,  H01L41/187 ,  H01L41/318

CPC classification number: H04R17/02 ,  H01L41/0533 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/318 ,  H03F3/183 ,  H04R1/04 ,  H04R3/04 ,  H04R7/04 ,  H04R17/005 ,  H03F2200/03 ,  H04R2307/025 ,  H04R2440/01

Abstract: Provided is a voice sensor comprising a piezoelectric material layer includes a substrate, a support layer, a metal layer, a piezoelectric material layer on the metal layer and an electrode on the piezoelectric material layer, and the substrate integrally supports a device layer of the voice sensor by exposing a part of a thin film including the piezoelectric material layer, the electrode and a polymer layer.

公开(公告)号：US20210409871A1

公开(公告)日：2021-12-30

申请号：US17347415

申请日：2021-06-14

Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY ,  FRONICS INC.

Inventor： Keonjae Lee ,  Young Hoon Jung ,  Jae Hyun Han ,  Hee Seung Wang ,  Mingi Chung

IPC: H04R17/02 ,  H01L41/053 ,  H01L41/09 ,  H01L41/187 ,  H01L41/318 ,  H03F3/183 ,  H04R3/04 ,  H04R1/04 ,  H04R17/00 ,  H04R7/04

Abstract: Provided is a voice sensor comprising a piezoelectric material layer includes a substrate, a support layer, a metal layer, a piezoelectric material layer on the metal layer and an electrode on the piezoelectric material layer, and the substrate integrally supports a device layer of the voice sensor by exposing a part of a thin film including the piezoelectric material layer, the electrode and a polymer layer.