公开(公告)号：US09810619B2

公开(公告)日：2017-11-07

申请号：US14022305

申请日：2013-09-10

Applicant: KLA-Tencor Corporation

Inventor： Zhongping Cai ,  Jingyi Xiong ,  Tyler Trytko ,  Alexander Slobodov ,  Paul Doyle ,  Anatoly Romanovsky

IPC: G01N21/01 ,  G01N21/956 ,  G01B5/00

CPC classification number: G01N21/01 ,  G01B5/0004 ,  G01N21/956

Abstract: A system for substrate tilt and focus control in an inspection system includes a dynamically actuatable substrate stage assembly including a substrate stage for securing a substrate; a tilt-height detection system including: a height detection sub-system and a tilt detection sub-system. The system further includes a first actuator configured to selectably actuate the substrate along a direction perpendicular to the surface of the substrate at a location of the substrate stage assembly; and an additional actuator configured to selectably actuate the substrate along a direction substantially perpendicular to the surface of the substrate at an additional location of the substrate stage assembly; and a MIMO tilt-focus controller communicatively coupled to the height detection sub-system, the tilt detection sub-system, the first actuator and the additional actuator.

公开(公告)号：US10690599B1

公开(公告)日：2020-06-23

申请号：US16170954

申请日：2018-10-25

Applicant: KLA-Tencor Corporation

Inventor： Stephen Biellak ,  Tyler Trytko

IPC: G01N21/88 ,  G01T1/24 ,  G01N21/95

Abstract: An inspection system with radiation-induced false count mitigation includes an illumination source configured to illuminate a sample and a liquid-cooling coincidence detector, which includes an illumination detector to detect illumination from the sample, a liquid-cooling device for regulating a temperature of the illumination detector via a liquid, and photodetectors to detect light generated in the liquid in response to particle radiation. The liquid-cooling coincidence detector may also include controllers to identify a set of illumination detection events based on an illumination signal received from the illumination detector, identify a set of radiation detection events based on radiation signals received from the photodetectors, compare the set of radiation detection events to the set of illumination detection events to identify a set of coincidence events, and exclude the set of coincidence events from the set of illumination detection events to generate a set of identified features on the sample.

公开(公告)号：US20140071457A1

公开(公告)日：2014-03-13

申请号：US14022305

申请日：2013-09-10

Applicant: Kla-Tencor Corporation

Inventor： Zhongping Cai ,  Jingyi Xiong ,  Tyler Trytko ,  Alexander Slobodov ,  Paul Doyle ,  Anatoly Romanovsky

IPC: G01N21/01

CPC classification number: G01N21/01 ,  G01B5/0004 ,  G01N21/956

Abstract: A system for substrate tilt and focus control in an inspection system includes a dynamically actuatable substrate stage assembly including a substrate stage for securing a substrate; a tilt-height detection system including: a height detection sub-system and a tilt detection sub-system. The system further includes a first actuator configured to selectably actuate the substrate along a direction perpendicular to the surface of the substrate at a location of the substrate stage assembly; and an additional actuator configured to selectably actuate the substrate along a direction substantially perpendicular to the surface of the substrate at an additional location of the substrate stage assembly; and a MIMO tilt-focus controller communicatively coupled to the height detection sub-system, the tilt detection sub-system, the first actuator and the additional actuator.

Abstract translation: 用于检查系统中的基板倾斜和聚焦控制的系统包括可动态致动的基板台组件，其包括用于固定基板的基板台; 倾斜高度检测系统，包括：高度检测子系统和倾斜检测子系统。 该系统还包括第一致动器，其被配置为在衬底台组件的位置处沿着垂直于衬底的表面的方向可选择地致动衬底; 以及附加致动器，其构造成在衬底台组件的附加位置处沿着基本上垂直于衬底表面的方向可选择地致动衬底; 以及通信地耦合到高度检测子系统，倾斜检测子系统，第一致动器和附加致动器的MIMO倾斜对焦控制器。