公开(公告)号：US09273952B2

公开(公告)日：2016-03-01

申请号：US14338091

申请日：2014-07-22

Applicant: KLA-Tencor Corporation

Inventor： Dieter Mueller ,  Rainer Schierle ,  Daniel Ivanov Kavaldjiev

IPC: G01B9/02 ,  G01B11/06 ,  G01N21/95

CPC classification number: G01B11/06 ,  G01B9/02021 ,  G01B9/02072 ,  G01B9/0209 ,  G01B11/0675 ,  G01B2210/56 ,  G01B2290/30 ,  G01N21/9501

Abstract: A system for inspecting specimens such as semiconductor wafers is provided. The system provides scanning of dual-sided specimens using a diffraction grating that widens and passes nth order (n>0) wave fronts to the specimen surface and a reflective surface for each channel of the light beam. Two channels and two reflective surfaces are preferably employed, and the wavefronts are combined using a second diffraction grating and passed to a camera system having a desired aspect ratio. The system preferably comprises a damping arrangement which filters unwanted acoustic and seismic vibration, including an optics arrangement which scans a first portion of the specimen and a translation or rotation arrangement for translating or rotating the specimen to a position where the optics arrangement can scan the remaining portion(s) of the specimen. The system further includes means for stitching scans together, providing for smaller and less expensive optical elements.

Abstract translation: 提供了用于检查诸如半导体晶片的样本的系统。 该系统使用衍射光栅扫描双面样品，该衍射光栅将第n阶（n> 0）波阵面扩大并通过到样品表面，以及光束每个通道的反射表面。 优选地使用两个通道和两个反射表面，并且使用第二衍射光栅将波前组合并传递到具有期望的纵横比的相机系统。 该系统优选地包括滤波不需要的声波和地震振动的阻尼装置，包括扫描样本的第一部分的光学装置和用于将样本平移或旋转到平行或旋转装置的位置，其中光学装置可以扫描剩余的 样本的一部分。 该系统还包括用于将扫描拼接在一起的装置，为更小且更便宜的光学元件提供。

公开(公告)号：US20140333937A1

公开(公告)日：2014-11-13

申请号：US14338091

申请日：2014-07-22

Applicant: KLA-Tencor Corporation

Inventor： Dieter Mueller ,  Rainer Schierle ,  Daniel Ivanov Kavaldjiev

IPC: G01B11/06

CPC classification number: G01B11/06 ,  G01B9/02021 ,  G01B9/02072 ,  G01B9/0209 ,  G01B11/0675 ,  G01B2210/56 ,  G01B2290/30 ,  G01N21/9501

Abstract: A system for inspecting specimens such as semiconductor wafers is provided. The system provides scanning of dual-sided specimens using a diffraction grating that widens and passes nth order (n>0) wave fronts to the specimen surface and a reflective surface for each channel of the light beam. Two channels and two reflective surfaces are preferably employed, and the wavefronts are combined using a second diffraction grating and passed to a camera system having a desired aspect ratio. The system preferably comprises a damping arrangement which filters unwanted acoustic and seismic vibration, including an optics arrangement which scans a first portion of the specimen and a translation or rotation arrangement for translating or rotating the specimen to a position where the optics arrangement can scan the remaining portion(s) of the specimen. The system further includes means for stitching scans together, providing for smaller and less expensive optical elements.

Abstract translation: 提供了用于检查诸如半导体晶片的样本的系统。 该系统使用衍射光栅扫描双面样品，该衍射光栅将第n阶（n> 0）波阵面扩大并通过到样品表面，以及光束每个通道的反射表面。 优选地使用两个通道和两个反射表面，并且使用第二衍射光栅将波前组合并传递到具有期望的纵横比的相机系统。 该系统优选地包括滤波不需要的声波和地震振动的阻尼装置，包括扫描样本的第一部分的光学装置和用于将样本平移或旋转到平行或旋转装置的位置，其中光学装置可以扫描剩余的 样本的一部分。 该系统还包括用于将扫描拼接在一起的装置，为更小且更便宜的光学元件提供。