公开(公告)号：US20140166051A1

公开(公告)日：2014-06-19

申请号：US14105986

申请日：2013-12-13

Applicant: KLA-Tencor Corporation

Inventor： Karl R. Umstadter ,  Michael P. Kanouff ,  Rudy Garcia ,  Mike Romero

IPC: B05B1/00

CPC classification number: G03F7/70916 ,  G03F7/70033 ,  H01J37/32449 ,  H05G2/001

Abstract: An assembly, including: a nozzle including a first chamber with a first orifice arranged to receive a stream of gas; a second chamber with a second orifice to emit the stream; a throat connecting the nozzle chambers; and a collector including: top and bottom walls with first and second openings; a third chamber bounded by the top and bottom walls and including a third opening connected to the second orifice to receive the stream; and a fourth opening. The first chamber tapers from the first orifice to the throat. The second chamber expands in size from the throat to the second orifice. The third chamber expands in size from the third opening to the fourth opening. The collector is arranged to: entrain, in the stream, debris entering the third chamber through first or second opening; and emit the stream, with the entrained debris, from the fourth opening.

Abstract translation: 一种组件，包括：喷嘴，其包括具有布置成接收气流的第一孔的第一室; 具有第二孔的第二室，用于排出所述流; 连接喷嘴室的喉部; 和收集器，包括：具有第一和第二开口的顶壁和底壁; 第三室，其由顶壁和底壁限定，并且包括连接到第二孔以接收流的第三开口; 和第四个开口。 第一个室从第一个孔到喉咙逐渐变细。 第二腔室的尺寸从喉部扩大到第二孔口。 第三室从第三个开口扩大到第四个开口。 收集器布置成：在流中夹带通过第一或第二开口进入第三室的碎屑; 并从第四个开口排出带有夹带的碎屑的流。

公开(公告)号：US20190295804A1

公开(公告)日：2019-09-26

申请号：US16249069

申请日：2019-01-16

Applicant: KLA-Tencor Corporation

Inventor： Gildardo Delgado ,  Katerina Ioakeimidi ,  Frances A. Hill ,  Rudy F. Garcia ,  Mike Romero ,  Zefram Marks ,  Gary V. Lopez

IPC: H01J37/073 ,  H01J37/285 ,  H01J37/29 ,  H01J37/244

Abstract: A high-brightness electron beam source is disclosed. The electron beam source may include a broadband illumination source configured to generate broadband illumination. A tunable spectral filter may be configured to filter the broadband illumination to provide filtered illumination having an excitation spectrum. The electron beam source may further include a photocathode configured to emit one or more electron beams in response to the filtered illumination, wherein emission from the photocathode is adjustable based on the excitation spectrum of the filtered illumination from the tunable spectral filter.