公开(公告)号：US11668655B2

公开(公告)日：2023-06-06

申请号：US16272528

申请日：2019-02-11

Applicant: KLA-Tencor Corporation

Inventor： Vaibhav Gaind ,  Grace H. Chen ,  Amrit Poudel ,  Mark S. Wang

IPC: G01N21/88 ,  G01N21/95

CPC classification number: G01N21/8851 ,  G01N21/9501 ,  G01N2021/8874 ,  G01N2021/8887

Abstract: A semiconductor-inspection tool scans a semiconductor die using a plurality of optical modes. A plurality of defects on the semiconductor die are identified based on results of the scanning. Respective defects of the plurality of defects correspond to respective pixel sets of the semiconductor-inspection tool. The scanning fails to resolve the respective defects. The results include multi-dimensional data based on pixel intensity for the respective pixel sets, wherein each dimension of the multi-dimensional data corresponds to a distinct mode of the plurality of optical modes. A discriminant function is applied to the results to transform the multi-dimensional data for the respective pixel sets into respective scores. Based at least in part on the respective scores, the respective defects are divided into distinct classes.

公开(公告)号：US20200025689A1

公开(公告)日：2020-01-23

申请号：US16272528

申请日：2019-02-11

Applicant: KLA-Tencor Corporation

Inventor： Vaibhav Gaind ,  Grace H. Chen ,  Amrit Poudel ,  Mark S. Wang

IPC: G01N21/88 ,  G01N21/95

Abstract: A semiconductor-inspection tool scans a semiconductor die using a plurality of optical modes. A plurality of defects on the semiconductor die are identified based on results of the scanning. Respective defects of the plurality of defects correspond to respective pixel sets of the semiconductor-inspection tool. The scanning fails to resolve the respective defects. The results include multi-dimensional data based on pixel intensity for the respective pixel sets, wherein each dimension of the multi-dimensional data corresponds to a distinct mode of the plurality of optical modes. A discriminant function is applied to the results to transform the multi-dimensional data for the respective pixel sets into respective scores. Based at least in part on the respective scores, the respective defects are divided into distinct classes.