公开(公告)号：US20140285657A1

公开(公告)日：2014-09-25

申请号：US14215580

申请日：2014-03-17

Applicant: KLA-Tencor Corporation

Inventor： Shiow-Hwei Hwang ,  Amir Bar ,  Grace Hsiu-Ling Chen ,  Daniel L. Cavan

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N2021/8845

Abstract: The present disclosure is directed to a system for inspecting a sample with multiple wavelengths of illumination simultaneously via parallel imaging paths. The system may include at least a first detector or set of detectors configured to detect illumination reflected, scattered, or radiated along a first imaging path from a selected portion of the sample in response to the first wavelength of illumination and a second detector or set of detectors configured to concurrently detect illumination reflected, scattered, or radiated along a second imaging path from the selected portion of the sample (i.e. the same location on the sample) in response to the second wavelength of illumination, where the second imaging path may at least partially share illumination and/or detection optics with an autofocus channel.

Abstract translation: 本公开涉及一种用于经由并行成像路径同时检查具有多个照明波长的照明的样本的系统。 该系统可以包括至少第一检测器或一组检测器，其被配置为响应于第一照明波长，从样品的选定部分沿着第一成像路径检测沿第一成像路径反射，散射或辐射的照射;以及第二检测器或一组 检测器被配置为响应于第二波长的照明，同时检测沿着第二成像路径从样本的所选部分（即样本上的相同位置）反射，散射或辐射的照射，其中第二成像路径可以至少 通过自动对焦通道部分共享照明和/或检测光学元件。

公开(公告)号：US20130321797A1

公开(公告)日：2013-12-05

申请号：US13863519

申请日：2013-04-16

Applicant: KLA-TENCOR CORPORATION

Inventor： Daniel L. Cavan ,  Grace Hsiu-Ling Chen ,  Qibiao Chen

IPC: G01N21/95

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N2021/8835

Abstract: The disclosure is directed to a system and method for inspecting a sample by illuminating the sample at a plurality of different angles and independently processing the resulting image streams. Illumination is directed through a plurality of pupil apertures to a plurality of respective field apertures so that the sample is imaged by portions of illumination directed at different angles. The corresponding portions of light reflected, scattered, or radiated from the surface of the sample are independently processed. Information associated with the independently processed portions of illumination is utilized to determine a location of at least one defect of the sample. Independently processing multiple image streams associated with different illumination angles allows for retention of frequency content that would otherwise be lost by averaging information from multiple imaging angles.

Abstract translation: 本公开涉及一种用于通过以多个不同角度照射样品并独立地处理所得图像流来检查样品的系统和方法。 照明被引导通过多个光瞳孔到多个相应的场孔，使得样本通过以不同角度照射的部分成像。 从样品表面反射，散射或辐射的光的相应部分被独立地处理。 与独立处理的照明部分相关联的信息用于确定样品的至少一个缺陷的位置。 独立地处理与不同照明角度相关联的多个图像流允许保留通过从多个成像角度平均信息而丢失的频率内容。

公开(公告)号：US10429319B2

公开(公告)日：2019-10-01

申请号：US14215580

申请日：2014-03-17

Applicant: KLA-Tencor Corporation

Inventor： Shiow-Hwei Hwang ,  Amir Bar ,  Grace Hsiu-Ling Chen ,  Daniel L. Cavan

IPC: H04N9/47 ,  G01N21/95 ,  G01N21/88

Abstract: The present disclosure is directed to a system for inspecting a sample with multiple wavelengths of illumination simultaneously via parallel imaging paths. The system may include at least a first detector or set of detectors configured to detect illumination reflected, scattered, or radiated along a first imaging path from a selected portion of the sample in response to the first wavelength of illumination and a second detector or set of detectors configured to concurrently detect illumination reflected, scattered, or radiated along a second imaging path from the selected portion of the sample (i.e. the same location on the sample) in response to the second wavelength of illumination, where the second imaging path may at least partially share illumination and/or detection optics with an autofocus channel.

公开(公告)号：US09128064B2

公开(公告)日：2015-09-08

申请号：US13863519

申请日：2013-04-16

Applicant: KLA-Tencor Corporation

Inventor： Daniel L. Cavan ,  Grace Hsiu-Ling Chen ,  Qibiao Chen

IPC: G01N21/95 ,  G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N2021/8835

Abstract: The disclosure is directed to a system and method for inspecting a sample by illuminating the sample at a plurality of different angles and independently processing the resulting image streams. Illumination is directed through a plurality of pupil apertures to a plurality of respective field apertures so that the sample is imaged by portions of illumination directed at different angles. The corresponding portions of light reflected, scattered, or radiated from the surface of the sample are independently processed. Information associated with the independently processed portions of illumination is utilized to determine a location of at least one defect of the sample. Independently processing multiple image streams associated with different illumination angles allows for retention of frequency content that would otherwise be lost by averaging information from multiple imaging angles.

Abstract translation: 本公开涉及一种用于通过以多个不同角度照射样品并独立地处理所得图像流来检查样品的系统和方法。 照明被引导通过多个光瞳孔到多个相应的场孔，使得样本通过以不同角度照射的部分成像。 从样品表面反射，散射或辐射的光的相应部分被独立地处理。 与独立处理的照明部分相关联的信息用于确定样品的至少一个缺陷的位置。 独立地处理与不同照明角度相关联的多个图像流允许保留通过从多个成像角度平均信息而丢失的频率内容。