公开(公告)号：US12111580B2

公开(公告)日：2024-10-08

申请号：US17243912

申请日：2021-04-29

Applicant: KLA Corporation

Inventor： Amnon Manassen ,  Isaac Salib ,  Raviv Yohanan ,  Diana Shaphirov ,  Eitan Hajaj ,  Vladimir Levinski ,  Avi Abramov ,  Michael Shentcis ,  Ariel Hildesheim ,  Yoav Grauer ,  Shlomo Eisenbach ,  Etay Lavert ,  Iftach Nir

IPC: G03F7/00 ,  G01B11/27 ,  G01N21/35 ,  G01N21/956

CPC classification number: G03F7/706851 ,  G01B11/272 ,  G01N21/35 ,  G01N21/956 ,  G03F7/70625 ,  G03F7/70633 ,  G03F7/70683

Abstract: An optical metrology tool may include one or more illumination sources to generate illumination having wavelengths both within a short-wave infrared (SWIR) spectral range and outside the SWIR spectral range, illumination optics configured to direct the illumination to a sample, a first imaging channel including a first detector configured to image the sample based on a first wavelength range including at least some wavelengths in the SWIR spectral range, a second imaging channel including a second detector configured to image the sample based on a second wavelength range including at least some wavelengths outside the SWIR spectral range, and a controller. The controller may receive first images of the sample from the first detector, receive second images of the sample from the second detector, and generate an optical metrology measurement of the sample based on the first and second images.

公开(公告)号：US20220291143A1

公开(公告)日：2022-09-15

申请号：US17243912

申请日：2021-04-29

Applicant: KLA Corporation

Inventor： Amnon Manassen ,  Isaac Salib ,  Raviv YOHANAN ,  Diana Shaphirov ,  Eitan Hajaj ,  Vladimir Levinski ,  Avi Abramov ,  Michael Shentcis ,  Ariel Hildesheim ,  Yoav Grauer ,  Shlomo Eisenbach ,  Etay Lavert ,  Iftach Nir

IPC: G01N21/956 ,  G01B11/27 ,  G03F7/20 ,  G01N21/35

Abstract: An optical metrology tool may include one or more illumination sources to generate illumination having wavelengths both within a short-wave infrared (SWIR) spectral range and outside the SWIR spectral range, illumination optics configured to direct the illumination to a sample, a first imaging channel including a first detector configured to image the sample based on a first wavelength range including at least some wavelengths in the SWIR spectral range, a second imaging channel including a second detector configured to image the sample based on a second wavelength range including at least some wavelengths outside the SWIR spectral range, and a controller. The controller may receive first images of the sample from the first detector, receive second images of the sample from the second detector, and generate an optical metrology measurement of the sample based on the first and second images.