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公开(公告)号：US11961219B2
公开(公告)日：2024-04-16
申请号：US17170688
申请日：2021-02-08
申请人： KLA Corporation
发明人： Bjorn Brauer
CPC分类号： G06T7/0006 , G06N3/045 , G06N3/088 , G06N20/00 , G06T2207/10061 , G06T2207/10152 , G06T2207/20081 , G06T2207/30148
摘要： Methods and systems for generating a simulated image for a specimen are provided. One system includes one or more computer subsystems and one or more components executed by the one or more computer subsystems. The one or more components include a generative adversarial network (GAN), e.g., a conditional GAN (cGAN), trained with a training set that includes portions of design data for one or more specimens designated as training inputs and corresponding images of the one or more specimens designated as training outputs. The one or more computer subsystems are configured for generating a simulated image for a specimen by inputting a portion of design data for the specimen into the GAN.
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公开(公告)号：US20220036539A1
公开(公告)日：2022-02-03
申请号：US17375951
申请日：2021-07-14
申请人： KLA Corporation
发明人： Bjorn Brauer
摘要： Methods and systems for selecting a mode of a tool used for a process performed on a specimen are provided. One system includes one or more computer subsystems and one or more components executed by the one or more computer subsystems. The one or more components include a generative adversarial network (GAN), e.g., a conditional GAN (cGAN). The computer subsystem(s) are configured for modifying a portion of design data for a specimen to generate an artificially defective portion of the design data and generating simulated images for the specimen by inputting the portion of the design data and the artificially defective portion of the design data into the GAN. The computer subsystem(s) are also configured for determining one or more characteristics of the simulated images and selecting a mode of a tool used for a process performed on the specimen based on the determined one or more characteristics.
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公开(公告)号：US11580650B2
公开(公告)日：2023-02-14
申请号：US17030194
申请日：2020-09-23
申请人： KLA Corporation
发明人： Bjorn Brauer , Vaibhav Gaind
摘要： Methods and systems for aligning images of a specimen generated with different modes of an imaging subsystem are provided. One method includes separately aligning first and second images generated with first and second modes, respectively, to a design for the specimen. For a location of interest in the first image, the method includes generating a first difference image for the location of interest and the first mode and generating a second difference image for the location of interest and the second mode. The method also includes aligning the first and second difference images to each other and determining information for the location of interest from results of the aligning.
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公开(公告)号：US11416982B2
公开(公告)日：2022-08-16
申请号：US17030277
申请日：2020-09-23
申请人： KLA Corporation
发明人： Bjorn Brauer , Hucheng Lee , Sangbong Park
摘要： Methods and systems for controlling a process for inspection of a specimen are provided. One system includes one or more computer subsystems configured for determining a statistical characteristic of difference images generated for multiple instances of a care area on a specimen and determining variation in the statistical characteristic compared to a statistical characteristic of difference images generated for multiple instances of the care area on one or more other specimens. In addition, the one or more computer subsystems are configured for determining one or more changes to one or more parameters used for detecting defects in the care area on the specimen based on the variation.
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公开(公告)号：US11328435B2
公开(公告)日：2022-05-10
申请号：US17334179
申请日：2021-05-28
申请人： KLA Corporation
发明人： Bjorn Brauer , Huan Jin , Xiaochun Li
摘要： Methods and systems for determining one or more alignment parameters for use in a process performed on a specimen are provided. One method includes determining measures of similarity between images generated by an imaging system for corresponding locations in each of two or more pairs of dies on a specimen and performing cluster analysis based on the determined measures of similarity to identify the images that are most similar to each other and to assign different subsets of the images that are most similar to each other to different die clusters, respectively. The method also includes separately determining one or more alignment parameters for two or more of the different die clusters. The one or more alignment parameters are used for aligning images generated by the imaging system for the specimen or another specimen to a common reference.
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公开(公告)号：US11328411B2
公开(公告)日：2022-05-10
申请号：US17246034
申请日：2021-04-30
申请人： KLA Corporation
发明人： Hong Chen , Kenong Wu , Xiaochun Li , James A. Smith , Eugene Shifrin , Qing Luo , Michael Cook , Wei Si , Leon Yu , Bjorn Brauer , Nurmohammed Patwary , Ramon Ynzunza , Neil Troy
摘要： Systems and methods for detecting defects on a reticle are provided. One system includes computer subsystem(s) configured for performing at least one repeater defect detection step in front-end processing during an inspection process performed on a wafer having features printed in a lithography process using a reticle. The at least one repeater defect detection step performed in the front-end processing includes identifying any defects detected at corresponding locations in two or more test images by double detection and any defects detected by stacked defect detection as first repeater defect candidates. One or more additional repeater defect detections may be performed on the first repeater defect candidates to generate final repeater defect candidates and identify defects on the reticle from the final repeater defect candidates.
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公开(公告)号：US20210097666A1
公开(公告)日：2021-04-01
申请号：US17030277
申请日：2020-09-23
申请人： KLA Corporation
发明人： Bjorn Brauer , Hucheng Lee , Sangbong Park
摘要： Methods and systems for controlling a process for inspection of a specimen are provided. One system includes one or more computer subsystems configured for determining a statistical characteristic of difference images generated for multiple instances of a care area on a specimen and determining variation in the statistical characteristic compared to a statistical characteristic of difference images generated for multiple instances of the care area on one or more other specimens. In addition, the one or more computer subsystems are configured for determining one or more changes to one or more parameters used for detecting defects in the care area on the specimen based on the variation.
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公开(公告)号：US20200265574A1
公开(公告)日：2020-08-20
申请号：US16677615
申请日：2019-11-07
申请人： KLA Corporation
发明人： Bjorn Brauer
摘要： Methods and systems for selecting one or more design files for use in test image to design alignment are provided. One method includes identifying which of first and second sets of images best match test images generated for a specimen by comparing the first and second sets of images to the test images. The first and second sets of images include images of patterned features in first and second sets, respectively, of design layers on the specimen that are different from each other. The method also includes selecting design file(s) for the specimen that best match the identified set of images by comparing the identified set of images to the design files and storing information for the selected design file(s) for use in a process in which patterned features in the selected design file(s) are aligned to patterned features in test images generated for specimens in the process.
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公开(公告)号：US12056867B2
公开(公告)日：2024-08-06
申请号：US17465810
申请日：2021-09-02
申请人： KLA Corporation
发明人： Bjorn Brauer , Sangbong Park , Hucheng Lee
CPC分类号： G06T7/001 , G06T7/337 , G06T7/80 , G06V10/24 , G06V10/751 , G06T2207/10148 , G06T2207/30148 , G06V2201/06
摘要： Wafer-to-wafer and within-wafer image contrast variations can be identified and mitigated by extracting an image frame during recipe setup and then during runtime at the same location. Image contrast is determined for the two image frames. A ratio of the contrast for the two image frames can be used to determine contrast variations and focus variation.
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公开(公告)号：US11619592B2
公开(公告)日：2023-04-04
申请号：US16910011
申请日：2020-06-23
申请人： KLA Corporation
发明人： Bjorn Brauer , Hucheng Lee , Sangbong Park
摘要： Methods and systems for selecting defect detection methods for inspection of a specimen are provided. One system includes one or more computer subsystems configured for separating polygons in a care area into initial sub-groups based on a characteristic of the polygons on the specimen and determining a characteristic of noise in output generated by a detector of an inspection subsystem for the polygons in the different initial sub-groups. The computer subsystem(s) are also configured for determining final sub-groups for the polygons by combining any two or more of the different initial sub-groups having substantially the same values of the characteristic of the noise. In addition, the computer subsystem(s) are configured for selecting first and second defect detection methods for application to the output generated by the detector of the inspection subsystem during inspection of the specimen or another specimen.
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