公开(公告)号：US20170062264A1

公开(公告)日：2017-03-02

申请号：US14840593

申请日：2015-08-31

申请人： KAWASAKI JUKOGYO KABUSHIKI KAISHA ,  KAWASAKI ROBOTICS (USA), INC.

发明人： Mark TANG ,  Eric CHAN ,  Shigeki ONO ,  Shinya KITANO ,  Ming ZENG ,  Hirohiko GOTO

IPC分类号： H01L21/687 ,  B25J15/00 ,  B25J9/04

CPC分类号： H01L21/68707 ,  B25J9/042 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/67778 ,  H01L21/67781

摘要： A control unit of a substrate conveying robot makes a robot arm and a substrate holding device execute a blade member advancing operation, a substrate receiving operation, and a substrate placing operation. The substrate holding device is configured to be capable of being switched between a first working state that a pair of blade members are arranged in the vertical direction and a second working state that a pair of blade members are arranged in a position out of the vertical direction and a single blade member can be advanced into a substrate placing structure.

摘要翻译： 基板输送机械手的控制单元使机器人臂和基板保持装置执行叶片构件前进操作，基板接收操作和基板放置操作。 基板保持装置被构造成能够在一对叶片构件沿垂直方向布置的第一工作状态和一对叶片构件布置在垂直方向外的位置的第二工作状态之间切换 并且单个刀片构件可以前进到衬底放置结构中。

公开(公告)号：US20190389059A1

公开(公告)日：2019-12-26

申请号：US16469184

申请日：2017-12-13

申请人： KAWASAKI JUKOGYO KABUSHIKI KAISHA ,  KAWASAKI ROBOTICS (USA), INC.

发明人： Takeshi SHIBATA ,  Yukimasa YAMADA ,  Takao YAMAGUCHI ,  Tomokazu ARITA ,  Eric CHAN ,  Francisco J. DURAN, Jr. ,  Hajime NAKAHARA ,  Avish Ashok BHARWANI ,  Ming ZENG

IPC分类号： B25J9/16

摘要： A method of teaching a robot, the robot including a first and second end effector that are mounted to a robotic arm wrist, the first and second end effector being rotatable about a same rotational axis independently of each other. The method includes: a first step of, in a state where rotational positions of the first and second end effectors about the rotational axis coincide with each other, attaching a relative motion preventing device to the first and second end effector, the relative motion preventing device preventing the first and second end effector from moving relative to each other; and a fourth step of generating a teaching point of the second end effector based on: a teaching point of the first end effector; and rotational position information about the first and second end effector that are stored in a storage unit in association with each other in a third step.