公开(公告)号：US20240312821A1

公开(公告)日：2024-09-19

申请号：US18670921

申请日：2024-05-22

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Jung-ho YUN ,  Yonggu KANG ,  Mid Uem RYU ,  Hiroki SANEMASA ,  Takashi MINAMI ,  Daisuke HIGASHITARUMIZU

IPC: H01L21/68 ,  B25J9/16 ,  B65G47/90 ,  H01L21/687

CPC classification number: H01L21/681 ,  B25J9/163 ,  B65G47/905 ,  H01L21/68707

Abstract: An automatic teaching apparatus for semiconductor manufacturing equipment includes: an equipment front end module (EFEM); one or more load ports provided along an edge of one side of the EFEM to be connected to an inside of the EFEM; a transfer robot disposed in the inside of the EFEM and configured to transfer a wafer to the one or more load ports by an end effector to process the wafer, and a load port teaching unit configured to detect a fixed position of the end effector in a state of unloading the wafer such that the wafer is placed in the fixed position within the load port.