公开(公告)号：US20170274427A1

公开(公告)日：2017-09-28

申请号：US15253577

申请日：2016-08-31

申请人： KABUSHIKI KAISHA TOSHIBA

发明人： Hideaki SAKURAI ,  Kyo OTSUBO ,  Kenji MASUI ,  Tetsuo TAKEMOTO ,  Minako INUKAI ,  Masato NAKA

IPC分类号： B08B7/00 ,  G03F7/00

CPC分类号： B08B7/0014 ,  B08B3/10 ,  B08B7/0092 ,  G03F7/0002 ,  H01L21/02063 ,  H01L21/67051 ,  H01L21/67057

摘要： A substrate cleaning method includes: steps (a) to (d). In step (a), a liquid is supplied onto a nanoimprint template substrate that has a patterned surface with foreign particles to form a liquid film on the patterned surface. In step (b), the liquid film is solidified to form a solidified film including the foreign particles. In step (c), the substrate is reversed. In step (d), the solidified film is melted to remove the foreign particles.

公开(公告)号：US20160343543A1

公开(公告)日：2016-11-24

申请号：US15225491

申请日：2016-08-01

申请人： KABUSHIKI KAISHA TOSHIBA

发明人： Tetsuo TAKEMOTO

IPC分类号： H01J37/32

CPC分类号： H01J37/3211 ,  H01J37/32082 ,  H01J37/32568 ,  H01J37/32715 ,  H01J37/32834 ,  H01J2237/3341

摘要： According to one embodiment, an apparatus for manufacturing a template includes a vacuum chamber, an electrode and an adjustor. The vacuum chamber includes an inlet and an exhaust port of a reactive gas. The vacuum chamber is capable of maintaining an atmosphere depressurized below atmospheric pressure. The electrode is provided in an interior of the vacuum chamber. A high frequency voltage is applied to the electrode. A substrate is placed on the electrode. The substrate has a back surface on a side of the electrode. A recess is provided in the back surface. The adjustor is inserted into the recess. The adjustor is insulative.