摘要:
The present invention provides a semiconductor device manufacturing line for applying a series of processes on a semiconductor substrate, and forming an integrated circuit on the semiconductor substrate by employing a semiconductor wafer having a diameter of 6 inches (150±3 mm: SEAJ specification) or less for the semiconductor substrate. This manufacturing line comprises two sub-lines conforming to the same specifications, each of these sub-lines is composed of a series of processing units including a film forming unit, a pattern exposure unit, an etching unit, and a test unit. In at least one pattern exposure unit and one etching unit, fine processing of 0.3 μm or less can be performed.
摘要:
The present invention provides a semiconductor device manufacturing line for applying a series of processes on a semiconductor substrate, and forming an integrated circuit on the semiconductor substrate by employing a semiconductor wafer having a diameter of 6 inches (150±3 mm: SEAJ specification) or less for the semiconductor substrate. This manufacturing line comprises two sub-lines conforming to the same specifications, each of these sub-lines is composed of a series of processing units including a film forming unit, a pattern exposure unit, an etching unit, and a test unit. In at least one pattern exposure unit and one etching unit, fine processing of 0.3 μm or less can be performed.
摘要:
The present invention provides a semiconductor device manufacturing line for applying a series of processes on a semiconductor substrate, and forming an integrated circuit on the semiconductor substrate by employing a semiconductor wafer having a diameter of 6 inches (150±3 mm: SEAJ specification) or less for the semiconductor substrate. This manufacturing line comprises two sub-lines conforming to the same specifications, each of these sub-lines is composed of a series of processing units including a film forming unit, a pattern exposure unit, an etching unit, and a test unit. In at least one pattern exposure unit and one etching unit, fine processing of 0.3 μm or less can be performed.
摘要:
The present invention provides a semiconductor device manufacturing line for applying a series of processes on a semiconductor substrate, and forming an integrated circuit on the semiconductor substrate by employing a semiconductor wafer having a diameter of 6 inches (150±3 mm: SEAJ specification) or less for the semiconductor substrate. This manufacturing line comprises two sub-lines conforming to the same specifications, each of these sub-lines is composed of a series of processing units including a film forming unit, a pattern exposure unit, an etching unit, and a test unit. In at least one pattern exposure unit and one etching unit, fine processing of 0.3 μm or less can be performed.
摘要:
An alignment film or a phase difference device with small shift from a desired alignment direction and a display unit including the same are provided. The alignment film includes: a substrate having a plurality of grooves extending in a specific direction on a surface; and a non-alignment thin film formed along a surface of the plurality of grooves. The phase difference device includes: an alignment film that has a substrate having a plurality of grooves extending in a specific direction on a surface and a non-alignment thin film formed along a surface of the plurality of grooves; and a phase difference layer that is provided being contacted with a surface of the non-alignment thin film, and includes a liquid crystal material that is aligned along an extending direction of a dent formed by the non-alignment thin film and is polymerized.
摘要:
A retardation film which is manufacturable by a simple process, and being capable of preventing a decline in light use efficiency is provided. A retardation film includes: a substrate having a plurality of grooves extending in a specific direction on a surface thereof; and a retardation layer arranged in contact with the surface of the substrate, and including a liquid crystal material, the liquid crystal material being aligned along the extending direction of the plurality of grooves and being polymerized.
摘要:
The present invention is directed to a system and method for distributing voice data information as presence information to all members participating in the group session communication when the presence status of participants has changed. A call control server accepts a request from one of group members for joining or exiting the group session communication, and transmits the information on the member to a media control server. The media control server receives the information and extracts media data, from a memory means, corresponding to the received information, and distributes the extracted media data, as voice data, to all participants of the group session communication.
摘要:
A planar display apparatus with a fluorescent screen formed on the inner surface of a front panel in a planar tube body. An electron gun is disposed at a position deviated in a vertical scanning direction from a region opposite the fluorescent screen, and a vertical deflecting electrode composed of a plurality of parallel electrodes is disposed at an opposite portion relative to the fluorescent screen on the side of a back panel opposed to the front panel of the planar tube body. In a space between the vertical deflecting electrode and the fluorescent screen, there is disposed an electrode structure having at least an electron lens scanning electrode composed of a plurality of parallel electrodes, a splitting electrode for splitting an electron beam from the electron gun into a plurality of beams, a modulating electrode, and horizontal deflection electrodes.
摘要:
A carbon-containing refractory is formed by mixing 1-10 weight % of silicon nitride, 1-35 weight % of carbon, and a remainder of a refractory raw material, molding the mixture into a molded body, and burning the molded body such that fine whiskers of silicon carbide are uniformly distributed within the matrix.
摘要:
A cache system employing an LRU (Least Recently Used) scheme in a replacement algorithm of cache blocks and comprising a directory memory whose entires have LRU counter fields, a host system issuing a read/write command to which an arbitrary LRU setting value is appended, a directory search circuit, and a microprocessor. The directory search circuit searches the directory memory in response to the read/write command issued from the host system. The microprocessor stores the LRU setting value appended to the read/write command in the LRU counter field of the hit entry of the directory memory or of the entry corresponding to the replacement target cache block, in response to the search result of the directory search circuit.