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    Method for forming photoresist pattern
    1.
    发明授权
    Method for forming photoresist pattern 失效
    光刻胶图案形成方法

    公开(公告)号：US5759748A

    公开(公告)日：1998-06-02

    申请号：US816479

    申请日：1997-03-13

    申请人： Jun Sung Chun ,  Yong Suk Lee ,  Ki Ho Baik

    发明人： Jun Sung Chun ,  Yong Suk Lee ,  Ki Ho Baik

    IPC分类号： G03F7/004 ,  G03F7/00 ,  G03F7/038 ,  G03F7/039 ,  G03F7/075 ,  G03F7/095 ,  G03F7/26 ,  G03F7/32 ,  G03F7/36 ,  G03F7/40 ,  H01L21/027

    CPC分类号： G03F7/405 ,  G03F7/0755 ,  G03F7/095 ,  G03F7/32

    摘要： A method for forming photoresist patterns, comprising the steps of: coating a chemically enhanced photoresist film on a lower layer; forming a silicon monomer layer on the chemically enhanced photoresist film; exposing the monomer layer through a mask, to selectively polymerize the silicon monomer; removing the unexposed regions of the monomer layer by development; and subjecting the remaining polymerized regions to oxygen plasma developing process to form oxide films through reaction of oxygen with the silicon contained in the polymerized regions and to form photoresist patterns through selective etching of the photoresist film, with the oxide films serving as a mask. Exposure of the silicon monomer generates protons from the chemically enhanced photoresist film which trigger the polymerization of the silicon monomer. The polymer thus formed is not removed by typical developing solutions and serves as a mask when etching the photoresist film with oxygen plasma because a thin silicon oxide (SiO.sub.2) is formed on the silicon contained polymer.

    摘要翻译： 一种形成光致抗蚀剂图案的方法，包括以下步骤：在下层上涂覆化学增强的光致抗蚀剂膜; 在化学增强的光致抗蚀剂膜上形成硅单体层; 使单体层通过掩模曝光，以选择性聚合硅单体; 通过显影去除单体层的未曝光区域; 并且使剩余的聚合区域进行氧等离子体显影处理，以通过氧与聚合区域中所含的硅的反应形成氧化物膜，并且通过选择性蚀刻光致抗蚀剂膜形成光刻胶图案，其中氧化物膜用作掩模。 硅单体的曝光从化学增强的光致抗蚀剂膜产生质子，其触发硅单体的聚合。 这样形成的聚合物不会被典型的显影液除去，并且在用氧等离子体蚀刻光致抗蚀剂膜时用作掩模，因为在含硅聚合物上形成薄的氧化硅（SiO 2）。

    Method of fabricating CMOS image sensor
    3.
    发明申请
    Method of fabricating CMOS image sensor 失效

    公开(公告)号：US20080277751A1

    公开(公告)日：2008-11-13

    申请号：US12151859

    申请日：2008-05-09

    申请人： Yong Suk Lee

    发明人： Yong Suk Lee

    IPC分类号： H01L31/0232

    CPC分类号： H01L27/14685 ,  H01L27/14621 ,  H01L27/14627

    摘要： A method of fabricating a CMOS image sensor is provided, in which a trapezoidal microlens pattern profile is formed to facilitate reflowing the microlens pattern and by which a curvature of the microlens may be enhanced to raise its light-condensing efficiency. The method includes forming a plurality of photodiodes on a semiconductor substrate; forming an insulating interlayer on the semiconductor substrate including the photodiodes; forming a protective layer on the insulating interlayer; forming a plurality of color filters corresponding to the photodiodes; forming a top coating layer on the color filters; forming a microlens pattern on the top coating layer; and forming a plurality of microlenses by reflowing the microlens pattern.

    Method of fabricating CMOS image sensor
    5.
    发明授权
    Method of fabricating CMOS image sensor 失效
    CMOS图像传感器的制作方法

    公开(公告)号：US07646076B2

    公开(公告)日：2010-01-12

    申请号：US12151859

    申请日：2008-05-09

    申请人： Yong Suk Lee

    发明人： Yong Suk Lee

    IPC分类号： H01L31/00

    CPC分类号： H01L27/14685 ,  H01L27/14621 ,  H01L27/14627

    摘要： A method of fabricating a CMOS image sensor is provided, in which a trapezoidal microlens pattern profile is formed to facilitate reflowing the microlens pattern and by which a curvature of the microlens may be enhanced to raise its light-condensing efficiency. The method includes forming a plurality of photodiodes on a semiconductor substrate; forming an insulating interlayer on the semiconductor substrate including the photodiodes; forming a protective layer on the insulating interlayer; forming a plurality of color filters corresponding to the photodiodes; forming a top coating layer on the color filters; forming a microlens pattern on the top coating layer; and forming a plurality of microlenses by reflowing the microlens pattern.

    摘要翻译： 提供一种制造CMOS图像传感器的方法，其中形成梯形微透镜图案轮廓以促进微透镜图案的回流，由此可增强微透镜的曲率以提高其聚光效率。 该方法包括在半导体衬底上形成多个光电二极管; 在包括所述光电二极管的所述半导体衬底上形成绝缘中间层; 在绝缘中间层上形成保护层; 形成与所述光电二极管相对应的多个滤色器; 在滤色器上形成顶部涂层; 在顶部涂层上形成微透镜图案; 以及通过回流微透镜图案形成多个微透镜。

    Burst scheduling methods in Optical Burst Switching system
    6.
    发明申请
    Burst scheduling methods in Optical Burst Switching system 有权
    光突发交换系统中的突发调度方法

    公开(公告)号：US20080285975A1

    公开(公告)日：2008-11-20

    申请号：US11977912

    申请日：2007-10-26

    申请人： Seoung Young Lee ,  Yong Suk Lee ,  Hong Shik Park

    发明人： Seoung Young Lee ,  Yong Suk Lee ,  Hong Shik Park

    IPC分类号： H04J14/08

    CPC分类号： H04L47/10 ,  H04L47/245

    摘要： Provided is a burst scheduling method in an Optical Burst Switching (OBS) system in which a plurality of nodes are connected through a mesh-type network. When a TDB which has used many network resources via a plurality of nodes and an SHG burst generated in a previous node, among bursts including BCPs transmitted from the previous node, compete in a current node so as to occupy a specific output channel, scheduling is performed to cause the TDB to have a higher priority than the SHG burst such that the corresponding output channel is occupied. Therefore, it is possible to minimize a burst loss in a network node, thereby enhancing the overall system performance.

    摘要翻译： 提供了一种在其中通过网状网络连接多个节点的光突发交换（OBS）系统中的突发调度方法。 当在前一节点发送的包括BCP的突发之间经由多个节点使用许多网络资源的TDB和在先前节点中生成的SHG突发，在当前节点中竞争以占用特定的输出信道时，调度是 执行以使TDB具有比SHG突发更高的优先级，使得对应的输出信道被占用。 因此，可以使网络节点中的突发丢失最小化，从而提高整个系统的性能。

    Method of fabricating CMOS image sensor
    7.
    发明授权
    Method of fabricating CMOS image sensor 有权
    CMOS图像传感器的制作方法

    公开(公告)号：US07388270B2

    公开(公告)日：2008-06-17

    申请号：US11301830

    申请日：2005-12-12

    申请人： Yong Suk Lee

    发明人： Yong Suk Lee

    IPC分类号： H01L31/00

    CPC分类号： H01L27/14685 ,  H01L27/14621 ,  H01L27/14627

    摘要： A method of fabricating a CMOS image sensor is provided, in which a trapezoidal microlens pattern profile is formed to facilitate reflowing the microlens pattern and by which a curvature of the microlens may be enhanced to raise its light-condensing efficiency. The method includes forming a plurality of photodiodes on a semiconductor substrate; forming an insulating interlayer on the semiconductor substrate including the photodiodes; forming a protective layer on the insulating interlayer; forming a plurality of color filters corresponding to the photodiodes; forming a top coating layer on the color filters; forming a microlens pattern on the top coating layer; and forming a plurality of microlenses by reflowing the microlens pattern.

    摘要翻译： 提供一种制造CMOS图像传感器的方法，其中形成梯形微透镜图案轮廓以促进微透镜图案的回流，由此可增强微透镜的曲率以提高其聚光效率。 该方法包括在半导体衬底上形成多个光电二极管; 在包括所述光电二极管的所述半导体衬底上形成绝缘中间层; 在绝缘中间层上形成保护层; 形成与所述光电二极管相对应的多个滤色器; 在滤色器上形成顶部涂层; 在顶部涂层上形成微透镜图案; 以及通过回流微透镜图案形成多个微透镜。

    Burst scheduling methods in optical burst switching system
    8.
    发明授权
    Burst scheduling methods in optical burst switching system 有权
    光突发交换系统中的突发调度方法

    公开(公告)号：US08175456B2

    公开(公告)日：2012-05-08

    申请号：US11977912

    申请日：2007-10-26

    申请人： Seoung Young Lee ,  Yong Suk Lee ,  Hong Shik Park

    发明人： Seoung Young Lee ,  Yong Suk Lee ,  Hong Shik Park

    IPC分类号： H04J14/00 ,  H04L12/28

    CPC分类号： H04L47/10 ,  H04L47/245

    摘要： Provided is a burst scheduling method in an Optical Burst Switching (OBS) system in which a plurality of nodes are connected through a mesh-type network. When a TDB which has used many network resources via a plurality of nodes and an SHG burst generated in a previous node, among bursts including BCPs transmitted from the previous node, compete in a current node so as to occupy a specific output channel, scheduling is performed to cause the TDB to have a higher priority than the SHG burst such that the corresponding output channel is occupied. Therefore, it is possible to minimize a burst loss in a network node, thereby enhancing the overall system performance.

    摘要翻译： 提供了一种在其中通过网状网络连接多个节点的光突发交换（OBS）系统中的突发调度方法。 当在前一节点发送的包括BCP的突发之间经由多个节点使用许多网络资源的TDB和在先前节点中生成的SHG突发，在当前节点中竞争以占用特定的输出信道时，调度是 执行以使TDB具有比SHG突发更高的优先级，使得对应的输出信道被占用。 因此，可以使网络节点中的突发丢失最小化，从而提高整个系统的性能。

    Transmit antenna diversity apparatus and method for a base station in a CDMA mobile communication system
    10.
    发明授权
    Transmit antenna diversity apparatus and method for a base station in a CDMA mobile communication system 有权
    CDMA移动通信系统中用于基站的发射天线分集装置和方法

    公开(公告)号：US06798847B2

    公开(公告)日：2004-09-28

    申请号：US10029757

    申请日：2001-12-21

    申请人： Jong Yoon Hwang ,  Sung Jin Kim ,  Ju Ho Lee ,  Yong Suk Lee

    发明人： Jong Yoon Hwang ,  Sung Jin Kim ,  Ju Ho Lee ,  Yong Suk Lee

    IPC分类号： H04L2704

    CPC分类号： H04B7/0632 ,  H04B1/707 ,  H04J13/004

    摘要： Disclosed is a base station transmission apparatus in a mobile communication system using transmit antenna diversity between a base station with a plurality of antennas and a mobile station. A modulator generates a complex symbol in response to a coded symbol. A first spreader generates a plurality of different complex symbols in response to the complex symbol, and generates a plurality of first spread complex symbols by spreading the generated complex symbols with a first orthogonal code assigned to the mobile station. A second spreader generates a plurality of same complex symbols in response to the complex symbol from the modulator, spreads the same complex symbols with a second orthogonal code, and generates a plurality of second spread complex symbols by multiplying the spread complex symbols by weights for the antennas, determined based on feedback information indicating reception status of a base station signal. A summer sums up the first complex symbols and the second complex symbols. Finally, a transmitter complex-spreads an output of the summer, shifts the complex-spread signals to a radio frequency band, and transmits the shifted signals through the antennas.

    摘要翻译： 公开了在具有多个天线的基站与移动台之间使用发射天线分集的移动通信系统中的基站发送装置。 调制器响应于编码符号产生复符号。 第一扩展器响应于复数符号产生多个不同的复数符号，并且通过以分配给移动台的第一正交码扩展生成的复数符号来生成多个第一扩频复数符号。 第二扩展器响应于来自调制器的复符号产生多个相同的复数符号，用第二正交码扩展相同的复数符号，并且通过将扩展复数符号乘以权重来生成多个第二扩展复数符号， 天线，其基于指示基站信号的接收状态的反馈信息确定。 一个夏天总结了第一个复数符号和第二个复数符号。 最后，发射机复合扩展了加法器的输出，将复扩展信号转移到无线电频带，并通过天线发送移位的信号。