公开(公告)号：US20240318309A1

公开(公告)日：2024-09-26

申请号：US18574002

申请日：2022-06-28

申请人： JUSUNG ENGINEERING CO., LTD.

发明人： Byung Gwan LIM ,  Sang Kyo KWON ,  Yong Hyun KIM ,  Jin Hyun KIM ,  Hong Eun KIM ,  Il Houng PARK ,  Chang Kyun PARK ,  In Woo BACK ,  Won Ju OH ,  Dong Hwan LEE ,  Yong Hyun LEE ,  Jun Seok LEE ,  Seung Hyun CHO ,  Jeong HEO

IPC分类号： C23C16/448 ,  C23C16/52

CPC分类号： C23C16/448 ,  C23C16/52

摘要： Disclosed are a raw material supply method including vaporizing a raw material in a canister, discharging the vaporized raw material, measuring an inner temperature of the canister, calculating a calculated temperature by using the inner temperature, and compensating a variation of the inner temperature by heating a heating unit disposed on the canister at the calculated temperature and a raw material supply apparatus applied to the method for supplying the raw material. The raw material supply method and apparatus may stably supply the vaporized raw material to a process space.