NOVEL NORBORNENE DERIVATIVE
    2.
    发明申请
    NOVEL NORBORNENE DERIVATIVE 有权
    新奥尔卑斯派代理

    公开(公告)号:US20150307467A1

    公开(公告)日:2015-10-29

    申请号:US14647825

    申请日:2013-11-28

    CPC classification number: C07D303/16 C07D301/14 C07D303/14 C07D303/17

    Abstract: A novel compound useful as a raw material for a resist material is described. A norbornene derivative having epoxy and a methylene-mediated reactive group in a norbornane skeleton is represented by the following formula. In the formula, R1 represents a hydrogen atom, acryloyl, methacryloyl or hydroxymethylacryloyl, and R2 represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms.

    Abstract translation: 描述了可用作抗蚀剂材料的原料的新型化合物。 在降冰片烷骨架中具有环氧基和亚甲基介导的反应性基团的降冰片烯衍生物由下式表示。 在该式中,R 1表示氢原子,丙烯酰基,甲基丙烯酰基或羟甲基丙烯酰基,R 2表示氢原子或碳原子数为1〜4的烷基。

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