公开(公告)号：US20220392739A1

公开(公告)日：2022-12-08

申请号：US17832054

申请日：2022-06-03

Applicant: JEOL Ltd.

Inventor： Munehiro Kozuka ,  Tsutomu Negishi ,  Tatsuhito Kimura ,  Yoshikazu Ishikawa ,  Hisashi Kawahara

IPC: H01J37/22 ,  H01J37/08 ,  H01J37/09 ,  H01J37/20 ,  H01J37/244 ,  H01J37/305 ,  H01L21/66

Abstract: A specimen machining device for machining a specimen by irradiating the specimen with an ion beam includes an ion source for irradiating the specimen with the ion beam, a shielding member disposed on the specimen to block the ion beam, a specimen stage for holding the specimen, a camera for photographing the specimen, a coaxial illumination device for irradiating the specimen with illumination light along an optical axis of the camera, and a processing unit for determining whether to terminate the machining based on an image photographed by the camera. The processing unit performs processing for acquiring information indicating a target machined width, processing for acquiring the image, processing for measuring a machined width on the acquired image, and processing for terminating the machining when the measured machined width equals or exceeds the target machined width.