公开(公告)号：US20190080878A1

公开(公告)日：2019-03-14

申请号：US16123297

申请日：2018-09-06

Applicant: JEOL Ltd.

Inventor： Akihiro Ikeda ,  Norikazu Arima

IPC: H01J37/063 ,  G02B5/08 ,  H01J3/02

Abstract: An electron gun includes an emitter, an electron gun electrode, and a short-circuiting mechanism for setting the emitter and the electron gun electrode at the same potential. The short-circuiting mechanism includes a first switch member provided with a first switch electrode that is connected to the emitter and a second switch electrode that is connected to the electron gun electrode, a second switch member provided with a third switch electrode, and a drive unit that operates at least one of the first switch member and the second switch member to switch between a state in which the first switch electrode and the second switch electrode are in contact with the third switch electrode and a state in which the first switch electrode and the second switch electrode are separated from the third switch electrode. The short-circuiting mechanism has the same potential as a predetermined voltage.

公开(公告)号：US09396904B2

公开(公告)日：2016-07-19

申请号：US14619381

申请日：2015-02-11

Applicant: JEOL Ltd.

Inventor： Yuji Kohno ,  Norikazu Arima

IPC: H01J37/141

CPC classification number: H01J37/141 ,  H01J2237/1415 ,  Y10T29/4902 ,  Y10T29/49826

Abstract: There is disclosed a method of fabricating a smaller-sized multipole lens having polar elements that can be formed with high accuracy. The method starts with forming a first member (10) having a first yoke (14) formed integrally with first polar elements (12). A second member (20) having a second yoke (24) formed integrally with second polar elements (22) is formed. The first yoke (14) is made to overlap with the second yoke (24). The first member (10) and the second member (20) are held.

Abstract translation: 公开了一种制造具有可以高精度地形成的极性元件的较小尺寸的多极透镜的方法。 该方法开始于形成具有与第一极性元件（12）一体形成的第一轭（14）的第一构件（10）。 形成具有与第二极性元件（22）一体形成的第二磁轭（24）的第二构件（20）。 使第一磁轭（14）与第二磁轭（24）重叠。 保持第一构件（10）和第二构件（20）。

公开(公告)号：US20150287566A1

公开(公告)日：2015-10-08

申请号：US14619381

申请日：2015-02-11

Applicant: JEOL Ltd.

Inventor： Yuji Kohno ,  Norikazu Arima

IPC: H01J37/141

CPC classification number: H01J37/141 ,  H01J2237/1415 ,  Y10T29/4902 ,  Y10T29/49826

Abstract: There is disclosed a method of fabricating a smaller-sized multipole lens having polar elements that can be formed with high accuracy. The method starts with forming a first member (10) having a first yoke (14) formed integrally with first polar elements (12). A second member (20) having a second yoke (24) formed integrally with second polar elements (22) is formed. The first yoke (14) is made to overlap with the second yoke (24). The first member (10) and the second member (20) are held.

Abstract translation: 公开了一种制造具有可以高精度地形成的极性元件的较小尺寸的多极透镜的方法。 该方法开始于形成具有与第一极性元件（12）一体形成的第一轭（14）的第一构件（10）。 形成具有与第二极性元件（22）一体形成的第二磁轭（24）的第二构件（20）。 使第一磁轭（14）与第二磁轭（24）重叠。 保持第一构件（10）和第二构件（20）。

公开(公告)号：US20230317400A1

公开(公告)日：2023-10-05

申请号：US18121931

申请日：2023-03-15

Applicant: JEOL Ltd.

Inventor： Kyouichi Kamino ,  Tomohisa Fukuda ,  Norikazu Arima ,  Yasuyuki Okano ,  Keiichi Yamamoto

IPC: H01J37/067 ,  H01J37/18 ,  H01J37/28

CPC classification number: H01J37/067 ,  H01J37/18 ,  H01J37/28

Abstract: Provided is a charged particle beam source having an emitter that can be replaced easily. The charged particle beam source includes an electron gun chamber; a first unit including both a supportive insulative member mechanically supporting a cable and a first set of terminals electrically connected to the cable; and a second unit including both the emitter that releases charged particles and a second set of terminals electrically connected to the emitter. The chamber has a side wall provided with a through-hole in which the first unit is secured. The second unit can be detachably mounted to the first unit. Within the chamber, the emitter is placed on an optical axis, so that the first and second sets of terminals are brought into contact with each other.

公开(公告)号：US11302509B2

公开(公告)日：2022-04-12

申请号：US16123297

申请日：2018-09-06

Applicant: JEOL Ltd.

Inventor： Akihiro Ikeda ,  Norikazu Arima

IPC: H01J37/063 ,  H01J3/02 ,  G02B5/08

Abstract: An electron gun includes an emitter, an electron gun electrode, and a short-circuiting mechanism for setting the emitter and the electron gun electrode at the same potential. The short-circuiting mechanism includes a first switch member provided with a first switch electrode that is connected to the emitter and a second switch electrode that is connected to the electron gun electrode, a second switch member provided with a third switch electrode, and a drive unit that operates at least one of the first switch member and the second switch member to switch between a state in which the first switch electrode and the second switch electrode are in contact with the third switch electrode and a state in which the first switch electrode and the second switch electrode are separated from the third switch electrode. The short-circuiting mechanism has the same potential as a predetermined voltage.