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US09396904B2 Multipole lens, method of fabricating same, and charged particle beam system 有权
多极镜，其制造方法和带电粒子束系统

  • Patent Title: Multipole lens, method of fabricating same, and charged particle beam system
  • Patent Title (中): 多极镜，其制造方法和带电粒子束系统
  • Application No.: US14619381
    Application Date: 2015-02-11
  • Publication No.: US09396904B2
    Publication Date: 2016-07-19
  • Inventor: Yuji Kohno , Norikazu Arima
  • Applicant: JEOL Ltd.
  • Applicant Address: JP Tokyo
  • Assignee: JEOL Ltd.
  • Current Assignee: JEOL Ltd.
  • Current Assignee Address: JP Tokyo
  • Agency: The Webb Law Firm
  • Priority: JP2014-25291 20140213
  • Main IPC: H01J37/141
  • IPC: H01J37/141
Multipole lens, method of fabricating same, and charged particle beam system
Abstract:
There is disclosed a method of fabricating a smaller-sized multipole lens having polar elements that can be formed with high accuracy. The method starts with forming a first member (10) having a first yoke (14) formed integrally with first polar elements (12). A second member (20) having a second yoke (24) formed integrally with second polar elements (22) is formed. The first yoke (14) is made to overlap with the second yoke (24). The first member (10) and the second member (20) are held.
Abstract(Chinese):

公开了一种制造具有可以高精度地形成的极性元件的较小尺寸的多极透镜的方法。 该方法开始于形成具有与第一极性元件（12）一体形成的第一轭（14）的第一构件（10）。 形成具有与第二极性元件（22）一体形成的第二磁轭（24）的第二构件（20）。 使第一磁轭（14）与第二磁轭（24）重叠。 保持第一构件（10）和第二构件（20）。

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