公开(公告)号：US20200013582A1

公开(公告)日：2020-01-09

申请号：US16454181

申请日：2019-06-27

Applicant: JEOL Ltd.

Inventor： Yuko Shimizu ,  Hirofumi Iijima ,  Naoki Hosogi ,  Jun Yamashita

IPC: H01J37/22 ,  H01J37/26 ,  H01J37/244

Abstract: An electron microscope comprises: an electron microscope main body including a phase plate that imparts a phase change to an electron wave, a moving mechanism that moves the phase plate, and a detector that acquires an image formed by an electron beam transmitted through a sample; and a control unit that controls the electron microscope main body. The control unit performs a phase plate image acquisition process of acquiring a phase plate image which is an image of the phase plate; an unevenness determination process of determining whether or not the phase plate has unevenness based on the phase plate image; and a moving mechanism control process of moving the phase plate by controlling the moving mechanism when the control unit has determined that the unevenness is present.

公开(公告)号：US10741358B2

公开(公告)日：2020-08-11

申请号：US16454181

申请日：2019-06-27

Applicant: JEOL Ltd.

Inventor： Yuko Shimizu ,  Hirofumi Iijima ,  Naoki Hosogi ,  Jun Yamashita

IPC: H01J37/22 ,  H01J37/244 ,  H01J37/26

Abstract: An electron microscope comprises: an electron microscope main body including a phase plate that imparts a phase change to an electron wave, a moving mechanism that moves the phase plate, and a detector that acquires an image formed by an electron beam transmitted through a sample; and a control unit that controls the electron microscope main body. The control unit performs a phase plate image acquisition process of acquiring a phase plate image which is an image of the phase plate; an unevenness determination process of determining whether or not the phase plate has unevenness based on the phase plate image; and a moving mechanism control process of moving the phase plate by controlling the moving mechanism when the control unit has determined that the unevenness is present.