Mold for forming complex 3D MEMS components

    公开(公告)号:US09738517B2

    公开(公告)日:2017-08-22

    申请号:US14839324

    申请日:2015-08-28

    IPC分类号: B81C99/00 B22C9/06

    CPC分类号: B81C99/009 B22C9/06

    摘要: A mold structure having high-precision multi-dimensional components which includes a first oxide layer superimposed on a top of a first semiconductor substrate; a second oxide layer superimposed on a top of a second semiconductor substrate; integrated designs patterned in at least one of the oxide layers; and the first and second semiconductor substrates bonded to one another into a three dimensional (3D) mold such that the first oxide layer only makes partial contact with the second oxide layer such that a portion of the first oxide layer avoids contact with the second oxide layer, the portion of the first oxide layer directly opposite a surface portion of the second semiconductor substrate that is free of the second oxide, the 3D mold selectively filled with a filling material to form a molded high-precision multi-dimensional component.

    Mold for forming complex 3D MEMS components
    5.
    发明授权
    Mold for forming complex 3D MEMS components 有权
    用于形成复杂3D MEMS部件的模具

    公开(公告)号:US09249015B2

    公开(公告)日:2016-02-02

    申请号:US13778526

    申请日:2013-02-27

    IPC分类号: B81C99/00 B22C9/06

    CPC分类号: B81C99/009 B22C9/06

    摘要: A mold structure having high-precision multi-dimensional components includes: depositing an oxide layer on a top surface of a plurality of semiconductor substrates, patterning a design integrated in one or more of the oxide layers; repositioning the substrates to enable the oxide layers make contact with one another; bonding in sequential order the repositioned substrates using a dielectric bonding, forming a three dimension (3D) mold; filling the 3D mold with filling material and removing the overburden filling material present on a top surface of the component.

    摘要翻译: 具有高精度多维成分的模具结构包括:在多个半导体衬底的顶表面上沉积氧化物层,将集成在一个或多个氧化物层中的设计图案化; 重新定位基板以使氧化物层彼此接触; 使用电介质接合顺序地接合重新定位的基板,形成三维(3D)模具; 用填充材料填充3D模具并去除存在于部件顶表面上的覆盖层填充材料。

    DESIGN OF A MOLD FOR FORMING COMPLEX 3D MEMS COMPONENTS
    6.
    发明申请
    DESIGN OF A MOLD FOR FORMING COMPLEX 3D MEMS COMPONENTS 有权
    用于形成复合3D MEMS组件的模具设计

    公开(公告)号:US20140238574A1

    公开(公告)日:2014-08-28

    申请号:US13778526

    申请日:2013-02-27

    IPC分类号: H01L21/71

    CPC分类号: B81C99/009 B22C9/06

    摘要: A mold structure having high-precision multi-dimensional components includes: depositing an oxide layer on a top surface of a plurality of semiconductor substrates, patterning a design integrated in one or more of the oxide layers; repositioning the substrates to enable the oxide layers make contact with one another; bonding in sequential order the repositioned substrates using a dielectric bonding, forming a three dimension (3D) mold; filling the 3D mold with filling material and removing the overburden filling material present on a top surface of the component.

    摘要翻译: 具有高精度多维成分的模具结构包括:在多个半导体衬底的顶表面上沉积氧化物层,将集成在一个或多个氧化物层中的设计图案化; 重新定位基板以使氧化物层彼此接触; 使用电介质接合顺序地接合重新定位的基板,形成三维(3D)模具; 用填充材料填充3D模具并去除存在于部件顶表面上的覆盖层填充材料。

    DESIGN OF A MOLD FOR FORMING COMPLEX 3D MEMS COMPONENTS
    9.
    发明申请
    DESIGN OF A MOLD FOR FORMING COMPLEX 3D MEMS COMPONENTS 有权
    用于形成复合3D MEMS组件的模具设计

    公开(公告)号:US20150368100A1

    公开(公告)日:2015-12-24

    申请号:US14839324

    申请日:2015-08-28

    IPC分类号: B81C99/00

    CPC分类号: B81C99/009 B22C9/06

    摘要: A mold structure having high-precision multi-dimensional components which includes a first oxide layer superimposed on a top of a first semiconductor substrate; a second oxide layer superimposed on a top of a second semiconductor substrate; integrated designs patterned in at least one of the oxide layers; and the first and second semiconductor substrates bonded to one another into a three dimensional (3D) mold such that the first oxide layer only makes partial contact with the second oxide layer such that a portion of the first oxide layer avoids contact with the second oxide layer, the portion of the first oxide layer directly opposite a surface portion of the second semiconductor substrate that is free of the second oxide, the 3D mold selectively filled with a filling material to form a molded high-precision multi-dimensional component.

    摘要翻译: 一种具有高精度多维分量的模具结构,其包括叠加在第一半导体衬底的顶部上的第一氧化物层; 叠加在第二半导体衬底的顶部上的第二氧化物层; 图案化为至少一个氧化物层的集成设计; 以及第一和第二半导体衬底彼此接合成三维(3D)模具,使得第一氧化物层仅与第二氧化物层部分接触,使得第一氧化物层的一部分避免与第二氧化物层接触 ,第一氧化物层的与第二半导体衬底的不含第二氧化物的表面部分直接相对的部分,3D模具选择性地填充有填充材料以形成模制的高精度多维部件。