公开(公告)号：US20230197520A1

公开(公告)日：2023-06-22

申请号：US17557579

申请日：2021-12-21

Applicant: Intel Corporation

Inventor： Yi SHI ,  Omkar KARHADE ,  Shawna M. LIFF ,  Zhihua ZOU ,  Ryan MACKIEWICZ ,  Nitin A. DESHPANDE ,  Debendra MALLIK ,  Arnab SARKAR

IPC: H01L21/822 ,  H01L21/56 ,  H01L23/31 ,  H01L23/00

CPC classification number: H01L21/822 ,  H01L21/561 ,  H01L23/3128 ,  H01L24/97 ,  H01L2224/97 ,  H01L2924/15311

Abstract: Embodiments herein relate to systems, apparatuses, or processes for attaching dummy dies to a wafer that includes a plurality of active dies, where the dummy dies are placed along or in dicing streets where the wafer is to be cut during singulation. In embodiments, the dummy dies may be attached to the wafer using a die attach film, or may be attached using hybrid bonding. Other embodiments may be described and/or claimed.